{"id":866,"date":"2018-09-12T14:47:04","date_gmt":"2018-09-12T14:47:04","guid":{"rendered":""},"modified":"2018-09-12T22:47:20","modified_gmt":"2018-09-12T14:47:20","slug":"%e7%a2%b3%e5%8c%96%e7%a1%85%e5%8a%9f%e7%8e%87%e5%99%a8%e4%bb%b6%e5%8f%8a%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=866","title":{"rendered":"\u78b3\u5316\u7845\u529f\u7387\u5668\u4ef6\u53ca\u5e94\u7528"},"content":{"rendered":"

\n\t  \u78b3\u5316\u7845\uff08SiC\uff09\u534a\u5bfc\u4f53\u6750\u6599\u662f\u81ea\u7b2c\u4e00\u4ee3\u5143\u7d20\u534a\u5bfc\u4f53\u6750\u6599\uff08Si\u3001Ge\uff09\u548c\u7b2c\u4e8c\u4ee3\u5316\u5408\u7269\u534a\u5bfc\u4f53\u6750\u6599\uff08GaAs\u3001GaP\u3001InP\u7b49\uff09\u4e4b\u540e\u53d1\u5c55\u8d77\u6765\u7684\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u3002\u4f5c\u4e3a\u4e00\u79cd\u5bbd\u7981\u5e26\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u78b3\u5316\u7845\u5177\u6709\u7981\u5e26\u5bbd\u5ea6\u5927\u3001\u51fb\u7a7f\u573a\u5f3a\u9ad8\u3001\u70ed\u5bfc\u7387\u5927\u3001\u8f7d\u6d41\u5b50\u9971\u548c\u6f02\u79fb\u901f\u5ea6\u9ad8\u3001\u4ecb\u7535\u5e38\u6570\u5c0f\u3001\u6297\u8f90\u5c04\u80fd\u529b\u5f3a\u3001\u5316\u5b66\u7a33\u5b9a\u6027\u826f\u597d\u7b49\u7279\u70b9\uff0c\u53ef\u4ee5\u7528\u6765\u5236\u9020\u5404\u79cd\u8010\u9ad8\u6e29\u7684\u9ad8\u9891\u5927\u529f\u7387\u5668\u4ef6\uff0c\u5e94\u7528\u4e8e\u7845\u5668\u4ef6\u96be\u4ee5\u80dc\u4efb\u7684\u573a\u5408\uff0c\u6216\u5728\u4e00\u822c\u5e94\u7528\u4e2d\u4ea7\u751f\u7845\u5668\u4ef6\u96be\u4ee5\u4ea7\u751f\u7684\u6548\u679c\u3002

\n\t 

\n\t  1. <\/strong>\u78b3\u5316\u7845\u6750\u6599\u7684\u7279\u70b9<\/strong>

\n\t  SiC\u6750\u6599\u7684\u4e00\u4e2a\u663e\u8457\u7279\u70b9\u662f\u540c\u8d28\u591a\u578b\uff0c\u5236\u4f5c\u5668\u4ef6\u6700\u5e38\u7528\u7684\u662f4H-SiC\u548c6H-SiC\u4e24\u79cd\u3002\u5982\u88681\u6240\u793a\uff0c\u548c\u4f20\u7edf\u7684\u534a\u5bfc\u4f53\u6750\u6599\uff0c\u5982Si\u3001GaAs\u7b49\u76f8\u6bd4\uff0cSiC\u6750\u6599\u5177\u6709\u66f4\u9ad8\u7684\u70ed\u4f20\u5bfc\u7387\uff083\uff5e13\u500d\uff09\uff0c\u4f7f\u5f97SiC\u5668\u4ef6\u53ef\u4ee5\u5728\u9ad8\u6e29\u4e0b\u957f\u65f6\u95f4\u7a33\u5b9a\u5de5\u4f5c\uff1b\u66f4\u9ad8\u7684\u4e34\u754c\u51fb\u7a7f\u7535\u573a\uff084\uff5e20\u500d\uff09\u548c\u66f4\u5927\u7684\u8f7d\u6d41\u5b50\u9971\u548c\u901f\u7387\uff0c\u6709\u5229\u4e8e\u63d0\u9ad8\u5668\u4ef6\u7684\u5de5\u4f5c\u9891\u7387\u3002<\/span><\/p>\n

\n\t\u88681 \u4e0d\u540c\u534a\u5bfc\u4f53\u6750\u6599\u7684\u7279\u6027\u5bf9\u6bd4<\/span><\/div>\n
\n\t\"\u4e0d\u540c\u534a\u5bfc\u4f53\u6750\u6599\u7684\u7279\u6027\u5bf9\u6bd4\" <\/span><\/div>\n

 

\n  2. <\/strong>SiC\u6750\u6599\u5236\u5907<\/strong>

\n  SiC\u5355\u6676\u7684\u5236\u5907\u6700\u5e38\u7528\u7684\u65b9\u6cd5\u662f\u7269\u7406\u6c14\u76f8\u4f20\u8f93\uff08PVT\uff09\uff0c\u5927\u7ea6\u5360\u6676\u5706\u4f9b\u5e94\u91cf\u768490%\u4ee5\u4e0a\u3002\u6b64\u5916\uff0c\u9ad8\u6e29\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\uff08CVD\uff09\u4e5f\u8d8a\u6765\u8d8a\u91cd\u8981\uff0c\u8be5\u65b9\u6cd5\u80fd\u4ea7\u751f\u6781\u4f4e\u6742\u8d28\u542b\u91cf\u7684\u6676\u952d\u3002\u540c\u65f6\uff0c\u8fd9\u4e24\u79cd\u65b9\u6cd5\u5747\u53ef\u5e94\u7528\u4e8e\u5236\u5907SiC\u5916\u5ef6\u300220\u4e16\u7eaa50\u5e74\u4ee3Lely\u4f7f\u7528\u4e24\u5c42\u77f3\u58a8\u821f\uff0c\u4f7f\u5916\u5c42\u7684\u5769\u57da\u52a0\u70ed\u52302500\u2103\uff0cSiC\u900f\u8fc7\u91cc\u5c42\u7684\u591a\u7a7a\u77f3\u58a8\u5347\u534e\u8fdb\u5165\u5185\u5c42\u5f62\u6210\u6676\u4f53\u300270\u5e74\u4ee3\u540e\u671f\uff0cTairrov\u548cTsvetkov\u5bf9Lely\u6cd5\u8fdb\u884c\u4e86\u6539\u8fdb\uff0cSiC\u6e90\u5728\u77f3\u58a8\u821f\u7684\u5e95\u90e8\uff0c\u5e95\u90e8\u6e29\u5ea6\u8fbe2200\u2103\uff0c\u9876\u90e8\u6e29\u5ea6\u8f83\u4f4e\u5e76\u653e\u7f6e\u7c7d\u6676\uff0c\u6e29\u5ea6\u68af\u5ea6\u4e3a20~40\u2103\/cm\uff0c\u8fd9\u79cd\u65b9\u6cd5\u53c8\u79f0\u4e3aPVT\u3002

\n 

\n  \u7531\u4e8eSiC\u5355\u6676\u7684\u5236\u5907\u96be\u5ea6\u8f83\u5927\uff0c\u6210\u672c\u9ad8\uff0c\u56e0\u6b64SiC\u5916\u5ef6\u751f\u957f\u5728SiC\u5668\u4ef6\u6280\u672f\u4e2d\u4e3e\u8db3\u8f7b\u91cd\u3002\u5bf9\u4e8e\u4e0d\u540c\u7684\u886c\u5e95\uff0c\u751f\u957fSiC\u5916\u5ef6\u53ef\u4ee5\u5206\u4e3a\u4e24\u79cd\uff1a\u4ee5SiC\u4e3a\u886c\u5e95\u7684\u540c\u8d28\u5916\u5ef6\u751f\u957f\u548c\u4ee5Si\u548c\u84dd\u5b9d\u77f3\u4e3a\u886c\u5e95\u7684\u5f02\u8d28\u5916\u5ef6\u751f\u957f\u3002\u81ea\u4ece\u8f83\u5927\u76f4\u5f84\u7684SiC\u6676\u7247\u5546\u4e1a\u5316\u540e\uff0cSiC\u540c\u8d28\u5916\u5ef6\u751f\u957f\u6280\u672f\u53d1\u5c55\u5f88\u5feb\uff0cSiC\u540c\u8d28\u5916\u5ef6\u751f\u957f\u4e3b\u8981\u91c7\u7528\u4ee5\u4e0b\u65b9\u6cd5\uff1a\u5347\u534e\u6216\u7269\u7406\u6c14\u76f8\u4f20\u8f93\uff08PVT\uff09\u3001\u5206\u5b50\u675f\u5916\u5ef6\uff08MBE\uff09\u3001\u6db2\u76f8\u5916\u5ef6\uff08LPE\uff09\u53ca\u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\uff08CVD\uff09\u3002

\n 

\n  \u5206\u5b50\u675f\u5916\u5ef6\u6cd5\u5c06\u539f\u6750\u6599\u8fdb\u884c\u84b8\u53d1\u5e76\u4f5c\u4e3a\u5206\u5b50\u675f\u8fdb\u884c\u4f20\u8f93\uff0c\u6700\u540e\u5230\u8fbe\u7ecf\u8fc7\u9884\u70ed\u3001\u5904\u4e8e\u65cb\u8f6c\u72b6\u6001\u7684\u886c\u5e95\u3002\u8fd9\u79cd\u65b9\u6cd5\u53ef\u4ee5\u63d0\u4f9b\u9ad8\u7eaf\u8d28\u91cf\u3001\u9ad8\u7cbe\u51c6\u539a\u5ea6\u3001\u4f4e\u6e29\uff08600~1200\u2103\uff09\u7684\u5916\u5ef6\u5c42\u3002\u6db2\u76f8\u5916\u5ef6\u662f\u4e00\u79cd\u76f8\u5bf9\u6bd4\u8f83\u7b80\u5355\u800c\u4e14\u6210\u672c\u8f83\u4f4e\u7684\u751f\u957f\u65b9\u6cd5\uff0c\u751f\u957f\u53d1\u751f\u5728\u4e09\u76f8\u5e73\u8861\u7ebf\u4e0a\uff0c\u4f46\u8fd9\u79cd\u65b9\u6cd5\u5bf9\u5916\u5ef6\u5c42\u8868\u9762\u5f62\u8c8c\u96be\u4ee5\u8fdb\u884c\u5f88\u597d\u5730\u63a7\u5236\uff0c\u8fdb\u800c\u9650\u5236\u4e86LPE\u7684\u4f7f\u7528\u3002

\n 

\n  \u5316\u5b66\u6c14\u76f8\u6dc0\u79ef\u6cd5\u4e2d\uff0c\u886c\u5e95\u653e\u5728\u65cb\u8f6c\u540c\u65f6\u88ab\u52a0\u70ed\u7684\u77f3\u58a8\u6258\u76d8\u4e0a\uff0c\u6c14\u76f8\u7684\u5206\u5b50\u675f\u6269\u6563\u5230\u886c\u5e95\u8868\u9762\u5e76\u5206\u89e3\uff0c\u7531\u886c\u5e95\u8868\u9762\u5438\u6536\u540e\u4e0e\u8868\u9762\u53cd\u5e94\uff0c\u5f62\u6210\u5916\u5ef6\u5c42\u3002\u8fd9\u79cd\u65b9\u6cd5\u76ee\u524d\u662fSiC\u886c\u5e95\u751f\u4ea7\u7684\u4e3b\u8981\u5916\u5ef6\u5de5\u827a\u3002

\n 

\n  3. <\/strong>SiC\u529f\u7387\u5668\u4ef6\u53ca\u5e94\u7528<\/strong>

\n  SiC\u529f\u7387\u5668\u4ef6\u4e3b\u8981\u5305\u62ec\u529f\u7387\u4e8c\u6781\u7ba1\uff08SBD\u548cPiN\u7b49\uff09\u3001\u5355\u6781\u578b\u529f\u7387\u6676\u4f53\u7ba1\uff08MOSFET\u3001JFET\u548cSIT\u7b49)\u548c\u53cc\u6781\u578b\u8f7d\u6d41\u5b50\u529f\u7387\u6676\u4f53\u7ba1\uff08BJT\u548cGTO\u7b49\uff09\u3002

\n 

\n  3<\/strong>.1<\/strong> \u529f\u7387\u4e8c\u6781\u7ba1<\/strong>

\n  \u8096\u7279\u57fa\u52bf\u5792\u4e8c\u6781\u7ba1\uff08SBD\uff09\u4f5c\u4e3a\u4e00\u79cd\u5355\u6781\u6027\u5668\u4ef6\uff0c\u5728\u5bfc\u901a\u8fc7\u7a0b\u4e2d\u6ca1\u6709\u989d\u5916\u8f7d\u6d41\u5b50\u6ce8\u5165\u548c\u50a8\u5b58\uff0c\u56e0\u800c\u57fa\u672c\u6ca1\u6709\u53cd\u5411\u6062\u590d\u7535\u6d41\uff0c\u5176\u5173\u65ad\u8fc7\u7a0b\u5f88\u5feb\uff0c\u5f00\u5173\u635f\u8017\u5f88\u5c0f\u3002\u7531\u4e8e\u78b3\u5316\u7845\u6750\u6599\u7684\u4e34\u754c\u96ea\u5d29\u51fb\u7a7f\u7535\u573a\u5f3a\u5ea6\u8f83\u9ad8\uff0c\u53ef\u4ee5\u5236\u4f5c\u51fa\u8d85\u8fc71000V\u7684\u53cd\u5411\u51fb\u7a7f\u7535\u538b\u3002\u57283kV\u4ee5\u4e0a\u7684\u6574\u6d41\u5668\u5e94\u7528\u9886\u57df\uff0c\u7531\u4e8eSiC PiN\u4e8c\u6781\u7ba1\u4e0eSi\u5668\u4ef6\u76f8\u6bd4\u5177\u6709\u66f4\u5feb\u7684\u5f00\u5173\u901f\u5ea6\u3001\u9ad8\u7ed3\u6e29\u627f\u53d7\u80fd\u529b\u3001\u9ad8\u7535\u6d41\u5bc6\u5ea6\u548c\u66f4\u9ad8\u7684\u529f\u7387\u5bc6\u5ea6\uff0cSiC PiN\u4e8c\u6781\u7ba1\u5728\u7535\u529b\u8bbe\u5907\u3001\u80fd\u91cf\u50a8\u5907\u3001\u8d85\u9ad8\u538b\u56fa\u6001\u7535\u6e90\u9886\u57df\u626e\u6f14\u66f4\u91cd\u8981\u7684\u89d2\u8272\u3002

\n 

\n  3<\/strong>.2<\/strong> \u5355\u6781\u578b\u529f\u7387\u6676\u4f53\u7ba1<\/strong>

\n  \u78b3\u5316\u7845MOSFET\u7684\u7a81\u51fa\u4f18\u52bf\u4f53\u73b0\u5728\uff1a\u5bfc\u901a\u7535\u963b\u5c0f\uff1b\u4f4e\u7535\u5bb9\uff0c\u5f00\u5173\u901f\u5ea6\u5feb\uff1b\u9a71\u52a8\u7535\u8def\u7b80\u5355\uff1b\u6b63\u6e29\u5ea6\u7cfb\u6570\u6613\u4e8e\u5e76\u8054\u3002\u56e0\u800c\uff0c\u5e94\u7528\u78b3\u5316\u7845MOSFET\u80fd\u591f\u63d0\u9ad8\u7cfb\u7edf\u7684\u6548\u7387\uff0c\u964d\u4f4e\u6563\u70ed\u9700\u6c42\uff0c\u63d0\u9ad8\u5f00\u5173\u9891\u7387\u4e14\u589e\u52a0\u96ea\u5d29\u5f3a\u5ea6\u3002\u8fd9\u4e9b\u4f18\u52bf\u51b3\u5b9a\u4e86\u5176\u5728\u592a\u9633\u80fd\u8f6c\u6362\u5668\u3001\u9ad8\u538bDC\/DC\u53d8\u6362\u5668\u548c\u7535\u673a\u9a71\u52a8\u7b49\u9886\u57df\u4e2d\u5177\u6709\u5e7f\u9614\u7684\u5e94\u7528\u3002\u7531\u4e8eSiC MOSFET\u5b58\u5728\u6c9f\u9053\u7535\u5b50\u8fc1\u79fb\u7387\u548cSiO2\u5c42\u51fb\u7a7f\u7684\u95ee\u9898\uff0c\u56e0\u6b64\u4f5c\u4e3a\u6ca1\u6709\u8096\u7279\u57fa\u63a5\u89e6\u548cMOS\u754c\u9762\u7684\u5355\u6781\u5668\u4ef6SiC JFET\u5c31\u5f88\u6709\u5438\u5f15\u529b\u3002SiC JFET\u6709\u7740\u4f18\u826f\u7684\u7279\u6027\u548c\u7ed3\u6784\u548c\u76f8\u5bf9\u7b80\u5316\u7684\u5236\u9020\u5de5\u827a\u3002SiC JFET\u4ea7\u54c1\u5206\u4e3a\u5e38\u5f00\u6c9f\u9053\u578b\uff08normally-on\uff09\u548c\u5e38\u95ed\u6c9f\u9053\u578b\uff08normally-off\uff09\u4e24\u79cd\uff0c\u5176\u4e2d\u5e38\u95ed\u6c9f\u9053\u578b\u80fd\u591f\u4e0e\u73b0\u6709\u7684\u6807\u51c6\u6805\u6781\u9a71\u52a8\u82af\u7247\u76f8\u5339\u914d\uff0c\u800c\u5e38\u5f00\u6c9f\u9053\u578b\u5219\u9700\u8981\u8d1f\u538b\u7ef4\u6301\u5173\u65ad\u72b6\u6001\u3002SIT\uff08\u9759\u7535\u611f\u5e94\u6676\u4f53\u7ba1\uff09\uff0c\u4e3b\u8981\u7528\u4e8e\u4ece\u8d85\u9ad8\u9891\u5230\u5fae\u6ce2\u9891\u7387\u7684\u5927\u529f\u7387\u653e\u5927\u5668\u548c\u53d1\u5c04\u5668\u3001\u7535\u6e90\u8c03\u8282\u8bbe\u5907\u4e2d\u7684\u5927\u529f\u7387\u8f6c\u6362\u3002

\n 

\n  3<\/strong>.3<\/strong> \u53cc\u6781\u578b\u8f7d\u6d41\u5b50\u529f\u7387\u6676\u4f53\u7ba1<\/strong>

\n  SiC\u53cc\u6781\u578b\u529f\u7387\u5668\u4ef6BJT\u56e0SiC\u4e34\u754c\u96ea\u5d29\u51fb\u7a7f\u7535\u573a\u5f3a\u5ea6\u662fSi\u768410\u500d\uff0c\u800c\u6bd4Si BJT\u7684\u4e8c\u6b21\u51fb\u7a7f\u4e34\u754c\u7535\u6d41\u5bc6\u5ea6\u9ad8100\u500d\uff0c\u4e0d\u4f1a\u6709Si BJT\u90a3\u6837\u4e25\u5cfb\u7684\u4e8c\u6b21\u51fb\u7a7f\u95ee\u9898\uff0c\u6b64\u5916\uff0c\u4e34\u754c\u96ea\u5d29\u51fb\u7a7f\u7535\u573a\u5f3a\u5ea6\u9ad8\u8fd9\u4e00\u6750\u6599\u4f18\u52bf\u4e5f\u4f7fSiC BJT\u5728\u76f8\u540c\u7684\u963b\u65ad\u7535\u538b\u4e0b\u53ef\u6bd4Si BJT\u6709\u8f83\u7a84\u7684\u57fa\u533a\u548c\u96c6\u7535\u533a\uff0c\u8fd9\u5bf9\u63d0\u9ad8\u7535\u6d41\u589e\u76caβ\u548c\u5f00\u5173\u901f\u5ea6\u5341\u5206\u6709\u5229\uff0cSiC BJT\u4e3b\u8981\u5206\u4e3a\u5916\u5ef6\u53d1\u5c04\u6781\u548c\u79bb\u5b50\u6ce8\u5165\u53d1\u5c04\u6781BJT\uff0c\u5178\u578b\u7684\u7535\u6d41\u589e\u76ca\u572810\uff5e50\u4e4b\u95f4\u3002\u4e0e\u78b3\u5316\u7845\u529f\u7387MOS\u76f8\u6bd4\uff0c\u5bf93kV\u4ee5\u4e0a\u7684\u963b\u65ad\u7535\u538b\uff0c\u78b3\u5316\u7845\u6676\u95f8\u7ba1\u7684\u901a\u6001\u7535\u6d41\u5bc6\u5ea6\u53ef\u4ee5\u63d0\u9ad8\u51e0\u4e2a\u6570\u91cf\u7ea7\uff0c\u7279\u522b\u9002\u5408\u9ad8\u538b\u5927\u7535\u6d41\u5f00\u5173\u65b9\u9762\u7684\u5e94\u7528\u3002\u5bf9\u78b3\u5316\u7845\u6676\u95f8\u7ba1\u7684\u5f00\u53d1\u4e3b\u8981\u96c6\u4e2d\u4e8eGTO\uff0c\u76ee\u524d\u963b\u65ad\u7535\u538b\u6700\u5927\u7684GTO\u5668\u4ef6\uff0c\u963b\u65ad\u7535\u538b\u4e3a12.7kV\u3002

\n 

\n  4. <\/strong>\u7ed3\u675f\u8bed<\/strong>

\n  SiC\u6750\u6599\u7684\u4f18\u826f\u7279\u6027\u53caSiC\u529f\u7387\u5668\u4ef6\u7684\u5de8\u5927\u6027\u80fd\u4f18\u52bf\uff0c\u6fc0\u52b1\u7740\u4eba\u4eec\u4e0d\u65ad\u5730\u7814\u7a76\u4e0e\u5f00\u53d1\uff0c\u968f\u7740\u5927\u5c3a\u5bf8SiC\u6676\u5706\u751f\u957f\u6280\u672f\u548c\u5668\u4ef6\u5236\u9020\u6280\u672f\u7684\u7684\u53d1\u5c55\uff0cSiC\u529f\u7387\u5668\u4ef6\u5c06\u5728\u6c11\u7528\u548c\u519b\u4e8b\u65b9\u9762\u5f97\u5230\u66f4\u5e7f\u6cdb\u7684\u5e94\u7528\u3002<\/span>
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