{"id":6646,"date":"2021-11-12T08:32:22","date_gmt":"2021-11-12T00:32:22","guid":{"rendered":"http:\/\/www.szryc.com\/?p=6646"},"modified":"2021-11-12T08:32:22","modified_gmt":"2021-11-12T00:32:22","slug":"mos%e7%ae%a1%e9%98%88%e5%80%bc%e7%94%b5%e5%8e%8b%e4%b8%8e%e6%b2%9f%e9%95%bf%e5%92%8c%e6%b2%9f%e5%ae%bd%e7%9a%84%e5%85%b3%e7%b3%bb%e5%8f%8a%e5%bd%b1%e5%93%8d%e9%98%88%e5%80%bc%e7%94%b5%e5%8e%8b","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=6646","title":{"rendered":"MOS\u7ba1\u9608\u503c\u7535\u538b\u4e0e\u6c9f\u957f\u548c\u6c9f\u5bbd\u7684\u5173\u7cfb\u53ca\u5f71\u54cd\u9608\u503c\u7535\u538b\u7684\u56e0\u7d20"},"content":{"rendered":"<p><u>\u9608\u503c\u7535\u538b<\/u>\u00a0\uff08Threshold voltage\uff09\uff1a\u901a\u5e38\u5c06\u4f20\u8f93\u7279\u6027\u66f2\u7ebf\u4e2d\u8f93\u51fa<u>\u7535\u6d41<\/u>\u968f\u8f93\u5165\u7535\u538b\u6539\u53d8\u800c\u6025\u5267\u53d8\u5316\u8f6c\u6298\u533a\u7684\u4e2d\u70b9\u5bf9\u5e94\u7684\u8f93\u5165\u7535\u538b\u79f0\u4e3a\u9608\u503c\u7535\u538b\u3002\u5728\u63cf\u8ff0\u4e0d\u540c\u7684\u5668\u4ef6\u65f6\u5177\u6709\u4e0d\u540c\u7684\u53c2\u6570\u3002\u5982\u63cf\u8ff0\u573a\u53d1\u5c04\u7684\u7279\u6027\u65f6\uff0c\u7535\u6d41\u8fbe\u523010mA\u65f6\u7684\u7535\u538b\u88ab\u79f0\u4e3a\u9608\u503c\u7535\u538b\u3002<\/p>\n<p>\u5982MOS\u7ba1\uff0c\u5f53\u5668\u4ef6\u7531\u8017\u5c3d\u5411\u53cd\u578b\u8f6c\u53d8\u65f6\uff0c\u8981\u7ecf\u5386\u4e00\u4e2a Si \u8868\u9762\u7535\u5b50\u6d53\u5ea6\u7b49\u4e8e\u7a7a\u7a74\u6d53\u5ea6\u7684\u72b6\u6001\u3002\u6b64\u65f6\u5668 \u4ef6\u5904\u4e8e\u4e34\u754c\u5bfc\u901a\u72b6\u6001\uff0c\u5668\u4ef6\u7684\u6805\u7535\u538b\u5b9a\u4e49\u4e3a\u9608\u503c\u7535\u538b\uff0c\u5b83\u662f<u>MOSFET<\/u>\u7684\u91cd\u8981\u53c2\u6570\u4e4b\u4e00 \u3002MOS\u7ba1\u7684\u9608\u503c\u7535\u538b\u7b49\u4e8e\u80cc\u6805\uff08backga<u>te<\/u>\uff09\u548c\u6e90\u6781\uff08source\uff09\u63a5\u5728\u4e00\u8d77\u65f6\u5f62\u6210\u6c9f\u9053\uff08channel\uff09\u9700\u8981\u7684\u6805\u6781\uff08gate\uff09\u5bf9source\u504f\u7f6e\u7535\u538b\u3002\u5982\u679c\u6805\u6781\u5bf9\u6e90\u6781\u504f\u7f6e\u7535\u538b\u5c0f\u4e8e\u9608\u503c\u7535\u538b\uff0c\u5c31\u6ca1\u6709\u6c9f\u9053\uff08channel\uff09\u3002<\/p>\n<p align=\"center\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6649\" title=\"o4YBAF0IrKWAWx_VAACNpvvAGeM488\" src=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/o4YBAF0IrKWAWx_VAACNpvvAGeM488.png\" alt=\"o4YBAF0IrKWAWx_VAACNpvvAGeM488\" width=\"720\" height=\"733\" srcset=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/o4YBAF0IrKWAWx_VAACNpvvAGeM488.png 720w, http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/o4YBAF0IrKWAWx_VAACNpvvAGeM488-295x300.png 295w\" sizes=\"(max-width: 720px) 100vw, 720px\" \/><\/p>\n<p>\u5173\u4e8e MOSFET \u7684 W \u548c L \u5bf9\u5176\u9608\u503c\u7535\u538b Vth \u7684\u5f71\u54cd\uff0c\u5b9e\u9645\u5728\u8003\u8651\u5de5\u827a\u76f8\u5173\u56e0\u7d20\u540e\u90fd\u662f\u6bd4\u8f83\u590d\u6742\uff0c\u4f46\u662f\u4e5f\u53ef\u4ee5\u6709\u4e00\u4e9b\u7b80\u5316\u7684\u5206\u6790\uff0c\u8fd9\u91cc\u4e3b\u8981\u8fd8\u662f\u5206\u6790\u5f53\u6676\u4f53\u7ba1\u5904\u5728\u7a84\u6c9f\u9053\u548c\u77ed\u6c9f\u9053\u60c5\u51b5\u4e0b\uff0cMOSFET \u8017\u5c3d\u533a\u7684\u7535\u8377\u7684\u53d8\u5316\uff0c\u4ece\u800c\u5206\u6790\u5176\u5bf9\u6676\u4f53\u7ba1\u7684\u9608\u503c\u7535\u538b\u7684\u4f5c\u7528\u3002<\/p>\n<h2>Narrow channel \u7a84\u6c9f\u7684\u5206\u6790<\/h2>\n<div class=\"post-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6656\" title=\"image_thumb3\" src=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb3.png\" alt=\"image_thumb3\" width=\"307\" height=\"169\" srcset=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb3.png 307w, http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb3-300x165.png 300w\" sizes=\"(max-width: 307px) 100vw, 307px\" \/>\u00a0\u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6654\" title=\"image_thumb4\" src=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb4.png\" alt=\"image_thumb4\" width=\"226\" height=\"176\" \/><\/div>\n<p>\u4ece\u5de6\u56fe\u53ef\u4ee5\u770b\u5230\uff0c\u51b3\u5b9a MOSFET \u9608\u503c\u7535\u538b\u7684\u8017\u5c3d\u5c42\u7535\u8377\uff0c\u5e76\u4e0d\u4ec5\u662f\u5728\u6805\u4e0b\u533a\u57df\u7684\u7535\u8377 Qch\uff1b\u5b9e\u9645\u4e0a\u5728\u56fe\u4e2d\u8017\u5c3d\u533a\u5de6\u53f3\u4e0e\u8868\u9762\u76f8\u63a5\u5904\uff0c\u8fd8\u9700\u8981\u6709\u989d\u5916\u7684\u7535\u8377 Qchw\u3002<br \/>\n<span id=\"more-1787\"><\/span><br \/>\n\u5728\u6676\u4f53\u7ba1\u7684\u6c9f\u5bbd W \u8f83\u5927\u65f6\uff0cQchw \u8fd9\u4e00\u989d\u5916\u7684\u7535\u8377\u53ef\u4ee5\u5ffd\u7565\uff1b\u800c\u5f53\u6c9f\u5bbd W \u8f83\u5c0f\u65f6\uff0cQchw \u4e0d\u80fd\u518d\u5ffd\u7565\uff0c\u4f7f\u5f97\u7b49\u6548\u7684\u8017\u5c3d\u5c42\u7535\u8377\u5bc6\u5ea6\u589e\u52a0\uff0cMOS \u7ba1\u7684\u9608\u503c\u7535\u538b\u5347\u9ad8\uff0c\u5373\u5982\u4e0a\u9762\u53f3\u56fe\u6240\u793a.<\/p>\n<p>\u5b9e\u9645\u4e0a\uff0c\u7a84\u6c9f\u5bfc\u81f4\u7684\u9608\u503c\u7535\u538b\u7684\u53d8\u5316\u4e5f\u53ef\u4ee5\u7406\u89e3\u4e3a\u5728\u6c9f\u5bbd W \u65b9\u5411\u7684\u8fb9\u7f18\u7535\u573a\u7684\u7535\u529b\u7ebf\u51fa\u73b0\u5728\u6c9f\u9053\u4ee5\u5916\uff0c\u56e0\u6b64\u9700\u8981\u66f4\u591a\u7684\u6805\u7535\u538b\u6765\u7ef4\u6301\u6c9f\u9053\u5f00\u542f\u3002\u56e0\u6b64\u7a84\u6c9f\u7684\u6548\u5e94\u5b9e\u9645\u4e0a\u4e0e\u5177\u4f53\u7684\u96c6\u6210\u7535\u8def\u5de5\u827a\uff0c\u4f8b\u5982\u5668\u4ef6\u91c7\u7528\u7684\u9694\u79bb\u65b9\u5f0f\u548c\u9694\u79bb\u533a\u57df\u7684\u63ba\u6742\u6d53\u5ea6\u7b49\u5173\u7cfb\u5f88\u5927\u3002<\/p>\n<p>\u5bf9\u4e8e STI \uff08shallow trench isolation\uff09 \u9694\u79bb\u65b9\u5f0f\u7684 MOSFET\uff0c \u7531\u4e8e STI wall \u7684\u4f5c\u7528\uff0c\u6c9f\u5bbd W \u65b9\u5411\u7684\u8fb9\u7f18\u7535\u573a\u7684\u7535\u529b\u7ebf\u5b9e\u9645\u4e0a\u662f\u5728\u6c9f\u9053\u65b9\u5411\u96c6\u4e2d\uff0c\u56e0\u6b64\u4f1a\u51fa\u73b0\u6240\u8c13\u7684 inverse narrow-width effect\uff0c\u4e5f\u5373\u662f\u968f\u7740\u6c9f\u5bbd W \u7684\u51cf\u5c0f\uff0c\u9608\u503c\u7535\u538b\u968f\u4e4b\u51cf\u5c0f\u3002<\/p>\n<h2>Short channel \u77ed\u6c9f\u7684\u5206\u6790<\/h2>\n<div class=\"post-image\"><img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6653\" title=\"image_thumb5\" src=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb5.png\" alt=\"image_thumb5\" width=\"291\" height=\"178\" \/>\u00a0<img loading=\"lazy\" decoding=\"async\" class=\"alignnone size-full wp-image-6655\" title=\"image_thumb6\" src=\"http:\/\/www.szryc.com\/wp-content\/uploads\/2021\/11\/image_thumb6.png\" alt=\"image_thumb6\" width=\"229\" height=\"186\" \/><\/div>\n<p>\u5982\u4e0a\u9762\u5de6\u56fe\u6240\u793a, \u6676\u4f53\u7ba1\u4e2d\u8017\u5c3d\u5c42\u7535\u8377\u5305\u62ec\u4ece\u6e90\u5230\u6f0f\u7684\u6240\u6709\u7535\u8377\u3002 \u4f46\u662f, \u5b9e\u9645\u4e0a\u5728\u9760\u8fd1\u6e90\u548c\u6f0f\u7aef\u7684\u90e8\u5206\u7535\u8377\u00a0 Qchl , \u4e0d\u518d\u76f4\u63a5\u53d7\u63a7\u4e8e\u6805, \u800c\u662f\u7531\u6e90\u548c\u6f0f\u6765\u63a7\u5236. \u56e0\u6b64 Qchl \u662f\u4e0d\u5e94\u8be5\u5305\u542b\u5728\u9608\u503c\u7535\u538b\u7684\u8ba1\u7b97\u4e2d\u7684.<\/p>\n<p>\u7c7b\u4f3c\u4e4b\u524d\u7684\u5206\u6790, \u5f53\u6c9f\u957f L \u8f83\u5c0f\u65f6, \u9700\u8981\u8003\u8651 Qchl \u5f71\u54cd, \u4f7f\u7b49\u6548\u7684\u8017\u5c3d\u5c42\u7535\u8377\u5bc6\u5ea6\u51cf\u5c0f, MOS \u7ba1\u7684\u9608\u503c\u7535\u538b\u51cf\u5c0f\uff0c\u5373\u5982\u4e0a\u9762\u53f3\u56fe\u6240\u793a\u3002<\/p>\n<p>\u5728\u5177\u4f53\u5de5\u827a\u4e2d, \u7531\u4e8e\u5b58\u5728\u6c9f\u9053\u7684\u975e\u5747\u5300\u63ba\u6742\u7b49\u73b0\u8c61\uff0c\u5b9e\u9645\u4e0a\u4f1a\u4f7f\u5f97\u6709 reverse short-channel effect \u7684\u51fa\u73b0\uff0c\u5373\u968f\u7740 MOSFET \u7684\u6c9f\u957f L \u7684\u51cf\u5c0f\uff0c\u9608\u503c\u7535\u538b\u4f1a\u5148\u5c0f\u5e45\u5347\u9ad8\uff0c\u4e4b\u540e L \u8fdb\u4e00\u6b65\u51cf\u5c0f\u65f6\uff0c\u9608\u503c\u7535\u538b\u4e0b\u964d\uff0c\u5e76\u4e14\u6b64\u65f6\u7684\u9608\u503c\u7535\u538b\u5bf9\u6c9f\u957f\u7684\u53d8\u5316\u66f4\u4e3a\u654f\u611f\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"<p>\u9608\u503c\u7535\u538b\u00a0\uff08Threshold voltage\uff09\uff1a\u901a\u5e38\u5c06\u4f20\u8f93\u7279\u6027\u66f2\u7ebf\u4e2d\u8f93\u51fa\u7535\u6d41\u968f\u8f93\u5165\u7535\u538b\u6539\u53d8\u800c\u6025\u5267\u53d8\u5316\u8f6c\u6298\u533a\u7684 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[15],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/6646"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=6646"}],"version-history":[{"count":1,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/6646\/revisions"}],"predecessor-version":[{"id":6657,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/6646\/revisions\/6657"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=6646"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=6646"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=6646"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}