{"id":5318,"date":"2021-10-27T14:56:25","date_gmt":"2021-10-27T06:56:25","guid":{"rendered":"http:\/\/www.szryc.com\/?p=5318"},"modified":"2021-10-27T14:56:25","modified_gmt":"2021-10-27T06:56:25","slug":"%e7%a2%b3%e5%8c%96%e7%a1%85%e5%8a%9f%e7%8e%87%e6%99%b6%e4%bd%93%e7%9a%84%e8%ae%be%e8%ae%a1%e5%8f%91%e5%b1%95%e5%8f%8a%e9%a9%b1%e5%8a%a8%e7%94%b5%e5%8e%8b%e9%99%90%e5%88%b6","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=5318","title":{"rendered":"\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u8bbe\u8ba1\u53d1\u5c55\u53ca\u9a71\u52a8\u7535\u538b\u9650\u5236"},"content":{"rendered":"

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\"pYYBAGF2CwKAWjlIAAAnSo9OlMc615\"\uff081\uff09<\/p>\n

1.\u51cf\u5c11\u901a\u9053\u957f\u5ea6L\uff0c\u5c31\u5fc5\u987b\u8003\u8651DIBL\u6548\u5e94<\/p>\n

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5.\u964d\u4f4e\u901a\u9053\u5bfc\u901a\u9608\u503c\u7535\u538bVT\uff0c\u4f1a\u9020\u6210\u5e94\u7528\u4e0a\u53ef\u80fd\u7684\u8bef\u5bfc\u901a\u73b0\u8c61<\/p>\n

6.\u63d0\u9ad8\u901a\u9053\u7684\u7535\u5b50\u8fc1\u79fb\u7387\u03bcch\u6765\u6539\u5584\u529f\u7387\u6676\u4f53\u7684\u901a\u9053\u901a\u6001\u7535\u963b\uff0c\u4f46\u662f\u5fc5\u987b\u4ece\u6676\u4f53\u5e73\u9762\uff08crystal plane\uff09\u9009\u7528\u53ca\u5236\u7a0b\u4e0a\u7740\u624b<\/p>\n

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\"poYBAGF2CZyAT2tAAAMnQfO88Mo835\"<\/p>\n

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\"pYYBAGF2CaKAeBfDAAMFkhCGPoA905\"<\/div>\n

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\"poYBAGF2Ca-Ad5m-AAE1xnXr14o835\"<\/div>\n

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\"pYYBAGF2CeCAKScTAAEJdhbZ6FM187\"<\/div>\n

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\u56fe2 \uff08a\uff09\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u6676\u4f53\u5e73\u9762\uff08b\uff09\u6c9f\u69fd\u5f0f\u529f\u7387\u6676\u4f53\u91c7\u7528\u7684\u6676\u4f53\u5e73\u9762\uff08c\uff09\u300a1120\u300b\u6676\u4f53\u5e73\u9762\u7684\u9ad8\u7535\u5b50\u8fc1\u79fb\u7387<\/p>\n

\u503c\u5f97\u4e00\u63d0\u7684\u662f\uff0c\u5728\u5e73\u9762\u5f0f\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u5236\u9020\u901a\u9053\u91c7\u7528\u7684\u300a0001\u300b\u7845\u5e73\u9762\u4e2d\uff0c\u53d7\u5230\u6676\u4f53\u7f3a\u9677\u7a0b\u5ea6\u8f83\u9ad8\uff0c\u9020\u6210\u7535\u5b50\u8fc1\u79fb\u7387\u8f83\u4f4e\u53ca\u4ea7\u751f\u8f83\u9ad8\u7684\u901a\u9053\u7535\u963b\u3002\u8981\u514b\u670d\u8fd9\u4e2a\u95ee\u9898\uff0c\u5728\u8bbe\u8ba1\u4e0a\u4f1a\u4f7f\u7528\u8f83\u8584\u7684\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\uff0c\u4f7f\u5176\u5177\u6709\u8f83\u4f4e\u7684\u95e8\u6781\u9608\u503c\u7535\u538b\uff08~2V\uff09\uff0c\u8fdb\u800c\u964d\u4f4e\u901a\u9053\u7535\u963b\uff0c\u8fd9\u4e5f\u662f\u5e73\u9762\u5f0f\u7ed3\u6784\u529f\u7387\u6676\u4f53\u7684\u7279\u5f81\u4e4b\u4e00\u3002\u5728\u5b9e\u9645\u5e94\u7528\u65f6\uff0c\u4f1a\u5efa\u8bae\u7528\u6237\u5728\u8bbe\u8ba1\u9a71\u52a8\u7535\u8def<\/u>\u65f6\uff0c\u622a\u6b62\u65f6\u9a71\u52a8\u7535\u538b\u91c7\u7528\u8d1f\u7535\u538b\uff0c\u4ee5\u907f\u514d\u9a71\u52a8\u65f6\u7684\u9519\u8bef\u64cd\u4f5c\u9020\u6210\u529f\u7387\u6676\u4f53\u70e7\u6bc1\u3002\u53cd\u4e4b\uff0c\u5728\u6c9f\u69fd\u5f0f\u7ed3\u6784\u7684\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u56e0\u5176\u5177\u6709\u8f83\u9ad8\u7684\u95e8\u6781\u9608\u503c\u7535\u538b\uff08\u300b4V\uff09\uff0c\u65e0\u8bba\u54ea\u4e00\u79cd\u7535\u8def\u7ed3\u6784\uff0c\u90fd\u4e0d\u9700\u8981\u4f7f\u7528\u8d1f\u7535\u538b\u9a71\u52a8\u3002<\/p>\n

\u5982\u4e0a\u6240\u8ff0\uff0c\u78b3\u5316\u7845\u6750\u6599\u5177\u6709\u9ad8\u4e34\u754c\u7535\u573a\u5f3a\u5ea6\uff0c\u91c7\u7528\u78b3\u5316\u7845\u505a\u4e3a\u9ad8\u538b\u529f\u7387\u6676\u4f53\u6750\u6599\u7684\u4e3b\u8981\u8003\u91cf\u4e4b\u4e00\uff0c\u662f\u5728\u622a\u6b62\u65f6\u80fd\u591f\u4ee5\u7845\u6750\u65991\/10\u7684\u78ca\u6676\u5c42\u539a\u5ea6\u8fbe\u5230\u76f8\u540c\u7684\u8010\u538b\u3002\u4f46\u5728\u5b9e\u9645\u4e0a\u529f\u7387\u6676\u4f53\u5185\u7684\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u7535\u538b\u5f3a\u5ea6\uff0c\u9650\u5236\u4e86\u78b3\u5316\u7845\u6750\u6599\u80fd\u591f\u88ab\u4f7f\u7528\u7684\u6700\u5927\u4e34\u754c\u7535\u573a\u5f3a\u5ea6\uff0c\u8fd9\u662f\u56e0\u4e3a\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u7684\u6700\u5927\u503c\u4ec5\u670910MV\/cm\u3002\u6309\u9ad8\u65af\u5b9a\u5f8b\u63a8\u7b97\uff0c\u529f\u7387\u6676\u4f53\u5185\u4e0e\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u76f8\u90bb\u7684\u78b3\u5316\u7845\u6240\u80fd\u4f7f\u7528\u7684\u573a\u5f3a\u5ea6\u4ec5\u67094MV\/cm\uff0c\u5982\u56fe3\u6240\u793a\u3002\u78b3\u5316\u7845\u6750\u6599\u7684\u573a\u5f3a\u5ea6\u8d8a\u9ad8\uff0c\u5bf9\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u9020\u6210\u7684\u573a\u5f3a\u5ea6\u5c31\u8d8a\u9ad8\uff0c\u5bf9\u529f\u7387\u6676\u4f53\u53ef\u9760\u5ea6\u7684\u6311\u6218\u5c31\u8d8a\u5927\u3002\u56e0\u6b64\u5728\u78b3\u5316\u7845\u6750\u6599\u4e34\u754c\u7535\u573a\u5f3a\u5ea6\u7684\u9650\u5236\uff0c\u4f7f\u529f\u7387\u6676\u4f53\u7684\u8bbe\u8ba1\u8005\u5fc5\u987b\u91c7\u7528\u4e0d\u540c\u4e8e\u4f20\u7edf\u7684\u6c9f\u69fd\u5f0f\u529f\u7387\u6676\u4f53\u7ed3\u6784\uff0c\u5728\u80fd\u591f\u8fbe\u5230\u66f4\u4f4e\u78b3\u5316\u7845\u6750\u6599\u573a\u5f3a\u5ea6\u4e0b\uff0c\u5c3d\u53ef\u80fd\u51cf\u5c11\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u7684\u539a\u5ea6\uff0c\u4ee5\u964d\u4f4e\u901a\u9053\u7535\u963b\u503c\u3002\u5728\u53ef\u80fd\u6709\u6548\u964d\u4f4e\u78b3\u5316\u7845\u6750\u6599\u4e34\u754c\u7535\u573a\u5f3a\u5ea6\u7684\u6c9f\u69fd\u5f0f\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7ed3\u6784\uff0c\u5982\u82f1\u98de\u51cc\u7684\u975e\u5bf9\u79f0\u6c9f\u69fd\u5f0f\uff08Asymmetric Trench\uff09\u7ed3\u6784\u6216\u662f\u7f57\u59c6<\/u>\u7684\u53cc\u6c9f\u69fd\u5f0f\uff08Double trench\uff09\u7ed3\u6784\uff0c\u90fd\u662f\u80fd\u591f\u5728\u8fbe\u5230\u4f4e\u901a\u6001\u7535\u963b\u7684\u6761\u4ef6\u4e4b\u4e0b\uff0c\u7ef4\u6301\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u7684\u539a\u5ea6\uff0c\u56e0\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u51b3\u5b9a\u4e86\u5b83\u7684\u53ef\u9760\u5ea6\u3002<\/p>\n

\"poYBAGF2Ch2AbkPVAAJityrc9I4159\"<\/p>\n

\u56fe3\u95e8\u6781\u6c27\u5316\u5c42\u573a\u5f3a\u5ea6\u9650\u5236\u4e86\u529f\u7387\u6676\u4f53\u5185\u78b3\u5316\u7845\u6750\u6599\u7684\u573a\u5f3a\u5ea6<\/p>\n

\"pYYBAGF2CieAcaHGAAEK9kM-erk086\"<\/p>\n

\uff08a\uff09<\/p>\n

\"pYYBAGF2Cj2AWJ2pAADpHKMJevk150\"<\/div>\n

\uff08b\uff09<\/p>\n

\u56fe4 \u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7ed3\u6784<\/p>\n

\uff08a\uff09\u82f1\u98de\u51cc\u7684\u975e\u5bf9\u79f0\u6c9f\u69fd\u5f0f\u7ed3\u6784 \uff08b\uff09\u7f57\u59c6\u7684\u53cc\u6c9f\u69fd\u5f0f\u7ed3\u6784<\/p>\n

\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u7684\u7535\u573a\u5f3a\u5ea6\u6311\u6218\u4e0d\u4ec5\u6765\u81ea\u78b3\u5316\u7845\u6750\u6599\u7684\u5f71\u54cd\uff0c\u4e5f\u6765\u81ea\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u5b83\u672c\u8eab\u3002\u7845\u6750\u6599\u5728\u88ab\u5236\u9020\u534a\u5bfc\u4f53\u7684\u8fc7\u7a0b\u4e2d\u7ecf\u8fc7\u8680<\/u>\u523b\u53ca\u6c27\u5316\u4f5c\u7528\uff0c\u53ef\u4ee5\u4ea7\u751f\u539a\u5ea6\u76f8\u5bf9\u5747\u5300\u3001\u6742\u8d28\u5c11\u7684\u95e8\u6781\u6c27\u5316\u5c42\u3002\u4f46\u5728\u78b3\u5316\u7845\u6750\u6599\u7ecf\u8fc7\u8680\u523b\u53ca\u6c27\u5316\u4f5c\u7528\u540e\uff0c\u9664\u4e86\u4ea7\u751f\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u5916\uff0c\u5c1a\u6709\u4e0d\u5c11\u7684\u6742\u8d28\u53ca\u78b3\uff0c\u8fd9\u4e9b\u6742\u8d28\u53ca\u78b3\u4f1a\u5f71\u54cd\u95e8\u6781\u6c27\u5316\u5c42\u7684\u6709\u6548\u539a\u5ea6\u53ca\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u53ef\u9760\u5ea6\uff0c\u5982\u56fe5\u6240\u793a\u3002<\/p>\n

\"poYBAGF2CkmAH7nwAACC-bEEQ-I258\"<\/p>\n

\u56fe5 \u78b3\u5316\u7845\u95e8\u6781\u6c27\u5316\u7edd\u7f18\u5c42\u53d7\u6742\u8d28\u5f71\u54cd\u9020\u6210\u6709\u6548\u539a\u5ea6\u6539\u53d8<\/p>\n

\u8003\u8651\u5230\u95e8\u6781\u6c27\u5316\u5c42\u539a\u5ea6\u5bf9\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u53ef\u9760\u5ea6\u7684\u5f71\u54cd\uff0c\u5728\u95e8\u6781\u6c27\u5316\u5c42\u7684\u8bbe\u8ba1\u4e0a\u5fc5\u9700\u8003\u8651\u8fd9\u4e9b\u53ef\u80fd\u5f71\u54cd\u95e8\u6781\u6c27\u5316\u5c42\u6709\u6548\u539a\u5ea6\u7684\u56e0\u7d20\u3002\u9664\u4e86\u91c7\u7528\u66f4\u539a\u7684\u95e8\u6781\u6c27\u5316\u5c42\u8bbe\u8ba1\u4ee5\u63d0\u9ad8\u78b3\u5316\u7845\u7684\u53ef\u9760\u6027\u4e4b\u5916\uff0c\u8fd8\u8981\u9488\u5bf9\u95e8\u6781\u6c27\u5316\u5c42\u8fdb\u884c\u8fdc\u8d85\u51fa\u989d\u5b9a\u95e8\u6781\u7535\u538b\u7684\u957f\u65f6\u95f4\u7535\u538b\u6d4b\u8bd5<\/u>\u3002\u5982\u56fe6\u6240\u793a\uff0cVGUSE\u662f\u95e8\u6781\u7535\u538b\u5efa\u8bae\u503c\uff0cVGMAX \u662f\u989d\u5b9a\u95e8\u6781\u7535\u538b\u6700\u5927\u503c\uff0c\u968f\u7740\u65f6\u95f4\u63a8\u79fb\u589e\u52a0\u95e8\u6781\u7535\u538b\u503c\uff0c\u76f4\u5230\u6240\u6709\u7684\u529f\u7387\u6676\u4f53\u95e8\u6781\u90fd\u70e7\u6bc1\u5931\u6548\u3002 \u91c7\u7528\u8fd9\u6837\u7684\u95e8\u6781\u6d4b\u8bd5\uff0c\u53ef\u4ee5\u68c0\u6d4b\u51fa\u95e8\u6781\u6c27\u5316\u5c42\u4f1a\u5728\u4e0d\u540c\u7684\u7535\u538b\u4e0b\u4ea7\u751f\u5931\u6548\u3002\u4e00\u822c\u6765\u8bf4\uff0c\u5728\u8f83\u4f4e\u7535\u538b\u4e0b\u5931\u6548\u662f\u7531\u4e8e\u4e0a\u8ff0\u6742\u8d28\u9020\u6210\u6709\u6548\u95e8\u6781\u539a\u5ea6\u51cf\u5c11\u7684\u5916\u5728\u7f3a\u9677\uff08extrinsic defect\uff09;\u800c\u5728\u8f83\u9ad8\u7535\u538b\u4e0b\u7684\u5931\u6548\u88ab\u79f0\u4e3a\u672c\u8d28\u7f3a\u9677\uff08Intrinsic defect\uff09\uff09\uff0c\u662f\u6765\u81eaF-N\u96a7\u7a7f\u6548\u5e94\uff08Fowler-Nordheim tunneling\uff09\u7684\u4f5c\u7528\uff0c\u6216\u662f\u95e8\u6781\u6c27\u5316\u5c42\u8d85\u8fc7\u5176\u6700\u5927\u7535\u573a10MV\/cm\u3002<\/p>\n

\"pYYBAGF2CnKAIcDDAABkAoHyMTE351\"<\/p>\n

\"poYBAGF2Co-AIJB5AAC3VMBU-rQ506\"<\/div>\n

\u56fe6 \u78b3\u5316\u7845\u95e8\u6781\u6c27\u5316\u5c42\u53ef\u9760\u5ea6\u6d4b\u8bd5\u53ca\u5176\u672c\u8d28\u7f3a\u9677\u53ca\u975e\u672c\u8d28\u7f3a\u9677\u793a\u610f\u56fe<\/p>\n

\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u53e6\u4e00\u9879\u8bbe\u8ba1\u6311\u6218\u5c31\u662f\u95e8\u6781\u9608\u503c\u7535\u538b\u7684\u4e0d\u7a33\u5b9a\u6027\uff08threshold voltage instability\uff09\u3002\u95e8\u6781\u9608\u503c\u7535\u538b\u7684\u4e0d\u7a33\u5b9a\u6027\uff0c\u4f1a\u5f71\u54cd\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u53ef\u9760\u5ea6\u3002\u5982\u679c\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u9608\u503c\u7535\u538b\u5f80\u4e0a\uff0c\u4f1a\u9020\u6210\u529f\u7387\u6676\u4f53\u7684\u901a\u6001\u7535\u963b\u503c\u53ca\u5bfc\u901a\u635f\u8017\u589e\u52a0\uff1b\u53cd\u4e4b\uff0c\u5982\u679c\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u9608\u503c\u7535\u538b\u5f80\u4e0b\uff0c\u4f1a\u9020\u6210\u529f\u7387\u6676\u4f53\u6613\u4ea7\u751f\u8bef\u5bfc\u901a\u800c\u70e7\u6bc1\u3002\u95e8\u6781\u9608\u503c\u7535\u538b\u7684\u4e0d\u7a33\u5b9a\u6027\u6709\u4e24\u79cd\u73b0\u8c61\uff0c\u53ef\u56de\u590d\u578b\u9608\u503c\u7535\u538b\u6ede\u540e\u4f5c\u7528\uff08Reversible threshold voltage hysteresis\uff09 \u53ca\u4e0d\u53ef\u56de\u590d\u578b\u7684\u9608\u503c\u7535\u538b\u6f02\u79fb\uff08threshold voltage drif<\/u>t\uff09\uff1b\u95e8\u6781\u9608\u503c\u7535\u538b\u7684\u4e0d\u7a33\u5b9a\u6027\u6765\u81ea\u4e8e\u95e8\u6781\u6c27\u5316\u5c42\u53ca\u78b3\u5316\u7845\u7684\u4ecb\u9762\u95f4\u5b58\u5728\u7f3a\u9677\uff08trap\uff09\uff0c\u5982\u540c\u5bf9\u4ecb\u9762\u95f4\u7684\u7535\u5bb9<\/u>\u8fdb\u884c\u5145\u653e\u7535\uff0c\u800c\u95e8\u6781\u7535\u538b\u9a71\u52a8\u8fc7\u7a0b\u9020\u6210\u7535\u5b50\u6216\u7535\u6d1e\u88ab\u6355\u83b7\uff0c\u4ece\u800c\u5f62\u6210\u9608\u503c\u7535\u538b\u7684\u6ede\u540e\u4f5c\u7528\u3002<\/p>\n

\"pYYBAGF2Cp6AdgwtAAHugrD9Oao766\"<\/p>\n

\u56fe7 \u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u95e8\u6781\u9608\u503c\u7535\u538b\u7684\u6ede\u540e\u4f5c\u7528\u53ca\u504f\u79fb<\/p>\n

\u5982\u5f0f\uff082\uff09\uff0c\u9608\u503c\u7535\u538b\u6ede\u540e\u4f5c\u7528\u662f\u7531\u95e8\u6781\u6c27\u5316\u5c42\u63a5\u9762\u7684\u7f3a\u9677\u5bc6\u5ea6\uff08Density of defect\uff09\u53ca\u6750\u6599\u7684\u5e26\u9699\uff08bandgap\uff09\u6240\u51b3\u5b9a\u3002\u76f8\u6bd4\u4e8e\u7845\u6750\u6599\uff0c\u78b3\u5316\u7845\u7684\u6750\u6599\u7f3a\u9677\u5bc6\u5ea6\u6bd4\u7845\u6750\u6599\u7f3a\u9677\u5bc6\u5ea6\u9ad81000~10000\u500d\uff1b\u800c\u78b3\u5316\u7845\u7684\u5e26\u9699\u7ea6\u4e3a\u7845\u76843\u500d\uff0c\u56e0\u800c\u9020\u6210\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u7684\u9608\u503c\u7535\u538b\u6ede\u540e\u4f5c\u7528\u5728\u672a\u7ecf\u5904\u7406\u4e4b\u524d\uff0c\u9ad8\u8fbe\u6570\u4f0f\u7279\uff08V\uff09\u4e4b\u591a\uff0c\u800c\u7845\u6750\u6599\u53ea\u6709\u6570\u6beb\u4f0f\u7279\uff08mV\uff09\u3002\u8fd9\u4e5f\u662f\u7535\u6e90\u4f9b\u5e94\u5668\u8bbe\u8ba1\u8005\u5728\u4f7f\u7528\u78b3\u5316\u7845\u529f\u7387\u6676\u4f53\u65f6\u6240\u5fc5\u987b\u6ce8\u610f\u7684\u8003\u91cf\u91cd\u70b9\u4e4b\u4e00\u3002
\n\"pYYBAGF2Cq6AMjxpAABfbxTlqq4225\"<\/p>\n

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\"pYYBAGF2CrqAUgXWAAAfdqnCdAI381\"<\/div>\n

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\"pYYBAGF2CsqALcMAAAM2m2WRyzA851\"<\/div>\n

\uff08a\uff09 \uff08b\uff09<\/p>\n

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\"poYBAGF2CuWAKuJtAAGtTfLPDSU402\"<\/p>\n

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