{"id":2290,"date":"2019-04-01T09:42:02","date_gmt":"2019-04-01T09:42:02","guid":{"rendered":""},"modified":"2019-04-01T17:42:22","modified_gmt":"2019-04-01T09:42:22","slug":"%e5%85%a8%e7%90%83%e9%a6%96%e6%ac%be%e4%b8%9a%e5%86%85%e6%9c%80%e4%bd%8e%e7%9a%84%e5%8a%9f%e8%80%97mems+%e8%b6%85%e5%a3%b0%e6%b3%a2%e4%bc%a0%e6%84%9f%e5%99%a8","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=2290","title":{"rendered":"\u5168\u7403\u9996\u6b3e\u4e1a\u5185\u6700\u4f4e\u7684\u529f\u8017MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668"},"content":{"rendered":"

\n\t\u57fa\u4e8e MEMS \u7684\u5fae\u578b“\u7845\u82af\u7247\u58f0\u5450”\u88c5\u7f6e\u63d0\u4f9b\u4e86\u6beb\u7c73\u7ea7\u7cbe\u5ea6\u7684\u8ddd\u79bb\u4f20\u611f\u529f\u80fd\uff0c\u5e76\u5177\u6709\u4e1a\u5185\u6700\u4f4e\u7684\u529f\u8017\u3002\u8fd9\u79cd MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668<\/u>\u53ef\u7528\u4e8e\u8ddd\u79bb\u6d4b\u91cf\u3001\u4f4d\u7f6e\u8ffd\u8e2a\u3001\u4eba\u5458\u5b58\u5728\u68c0\u6d4b\u4ee5\u53ca\u6d88\u8d39\u7535\u5b50\u3001\u673a\u5668\u4eba\u3001\u65e0\u4eba\u673a<\/u>\u7b49\u9886\u57df\u7684\u907f\u969c\u5e94\u7528\u3002<\/p>\n

\n\t\u8d85\u58f0\u6ce2\u98de\u884c\u65f6\u95f4 \uff08ToF\uff09 \u4f20\u611f\u5668\u901a\u5e38\u88ab\u8ba4\u4e3a\u662f\u9002\u7528\u4e8e\u6c7d\u8f66\u3001\u5de5\u4e1a\u4ee5\u53ca\u65e0\u4eba\u673a\u548c\u673a\u5668\u4eba\u5e94\u7528\u7684\u6700\u4f73\u8ddd\u79bb\u4f20\u611f\u5668\u3002\u76f8\u6bd4\u4e8e\u5149\u5b66\u4f20\u611f\u5668<\/u>\u6216\u7ea2\u5916<\/u>\u4f20\u611f\u5668\uff0c\u5b83\u5177\u6709\u8bf8\u591a\u4f18\u52bf\u3002\u5b83\u53ef\u63d0\u4f9b\u6700\u7cbe\u786e\u7684\u8ddd\u79bb\u6d4b\u91cf\uff0c\u4e0d\u53d7\u76ee\u6807\u7269\u4f53\u7684\u5c3a\u5bf8\u6216\u989c\u8272\u7684\u5f71\u54cd\uff0c\u4e5f\u4e0d\u53d7\u73af\u5883\u566a\u97f3\u7684\u5e72\u6270\uff0c\u5e76\u4e14\u53ef\u4ee5\u5728\u9633\u5149\u76f4\u5c04\u7684\u73af\u5883\u4e0b\u4f7f\u7528\u3002\u8fd9\u4e9b\u4f18\u70b9\u4ee5\u53ca\u575a\u56fa\u8010\u7528\u3001\u7cbe\u786e\u548c\u53ef\u9760\u7684\u7279\u70b9\u8ba9\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5de5\u4e1a\u53ca\u6c7d\u8f66\u5e94\u7528\u3002<\/p>\n

\n\t <\/div>\n

\n\t\u7136\u800c\uff0c\u76f4\u81f3\u4eca\u5929\uff0c\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u4ecd\u9700\u8981\u590d\u6742\u7684\u4fe1\u53f7\u5904\u7406\uff0c\u7531\u4e8e\u5c3a\u5bf8\u5de8\u5927\u800c\u65e0\u6cd5\u9002\u7528\u4e8e\u6d88\u8d39\u7535\u5b50\u4ea7\u54c1\u3002<\/p>\n

\n\t\u5343\u5206\u4e4b\u4e00\u7684\u5c3a\u5bf8\uff0c \u767e\u5206\u4e4b\u4e00\u7684\u529f\u8017<\/strong><\/p>\n

\n\t\u73b0\u5728\uff0c TDK<\/u> \u516c\u53f8\u63a8\u51fa\u4e86\u4e00\u4e2a\u57fa\u4e8e MEMS \u7684\u5fae\u578b\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u4ea7\u54c1\uff0c\u76f8\u6bd4\u4e8e\u4f20\u7edf\u7684\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\uff0c\u5b83\u53ef\u4ee5\u63d0\u4f9b\u76f8\u540c\u7684\u6027\u80fd\u548c\u53ef\u9760\u6027\uff0c\u4f46\u5176\u5c3a\u5bf8\u53ea\u6709\u4f20\u7edf\u4ea7\u54c1\u7684\u5343\u5206\u4e4b\u4e00\uff0c\u529f\u8017\u4f4e\u81f3\u4f20\u7edf\u4ea7\u54c1\u7684\u767e\u5206\u4e4b\u4e00\u3002\u8fd9\u79cd\u5fae\u578b\u4f20\u611f\u5668\u5c3a\u5bf8\u5fae\u5c0f\uff0c\u53ef\u4ee5\u96c6\u6210\u5230\u7d27\u51d1\u7684\u6d88\u8d39\u54c1\u4e2d\u4f7f\u5176\u5177\u5907\u8d85\u58f0\u6ce2\u68c0\u6d4b\u80fd\u529b\uff0c<\/p>\n

\n\t\u4f8b\u5982\uff0c\u7528\u4e8e\u667a\u80fd\u624b\u673a\u548c\u53ef\u7a7f\u6234\u8bbe\u5907\u4e2d\u3002\u6d4b\u91cf\u8ddd\u79bb\u65f6\uff0c\u8fd9\u79cd\u4f20\u611f\u5668\u9996\u5148\u53d1\u5c04\u8d85\u58f0\u6ce2\u8109\u51b2\uff0c\u7136\u540e\u76d1\u542c\u4f20\u611f\u5668\u89c6\u573a\u8303\u56f4\u5185\u76ee\u6807\u7269\u7684\u53cd\u5c04\u56de\u58f0\u3002\u6bcf\u4e2a\u56de\u58f0\u5747\u4ee5\u58f0\u901f\u4f20\u64ad\uff0c\u901a\u8fc7\u6d4b\u91cf\u56de\u58f0\u7684\u98de\u884c\u65f6\u95f4\u53ef\u7cbe\u786e\u5730\u6d4b\u91cf\u4f20\u611f\u5668\u81f3\u76ee\u6807\u7269\u7684\u8ddd\u79bb\u3002<\/p>\n

\n\t\"\u5168\u7403\u9996\u6b3e\u4e1a\u5185\u6700\u4f4e\u7684\u529f\u8017MEMS<\/p>\n

\n\t\u56fe 1\uff1a MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u7684\u9876\u9762\u548c\u5e95\u9762\uff08\u5de6\u56fe\uff09\u3002\u6b64\u4f20\u611f\u5668\u65b9\u6846\u56fe\u663e\u793a\u4e86\u4e0e\u538b\u7535\u5f0f MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668 \uff08PMUT\uff09 \u76f8\u8fde\u7684 CMOS \u7247\u4e0a\u7cfb\u7edf \uff08SoC\uff09\u3002<\/p>\n

\n\t\u76ee\u524d\uff0c\u6709\u4e24\u79cd\u4ea7\u54c1\u53ef\u5411\u5ba2\u6237\u63d0\u4f9b\u5de5\u7a0b\u6837\u54c1\uff0c\u5373\u6700\u5927\u4f20\u611f\u8303\u56f4\u4e3a 100 cm \u7684 CH-101 \u578b\u548c\u6700\u5927\u4f20\u611f\u8303\u56f4\u4e3a 500 cm \u7684 CH-201 \u957f\u8ddd\u79bb\u578b\u4f20\u611f\u5668\u3002\u8fd9\u4e9b\u5fae\u578b\u88c5\u7f6e\u91c7\u7528\u4e86\u7d27\u51d1\u7684 3.5 mm x 3.5 mmLGA \u5c01\u88c5\uff0c\u5c06\u538b\u7535\u5f0f MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668\uff08PMUT\uff09\u4e0e\u5b9a\u5236\u7684 CMOS \u7247\u4e0a\u7cfb\u7edf \uff08SoC\uff09 \u7ed3\u5408\u5728\u4e00\u8d77\uff0c\u5b8c\u6210\u4e86\u6240\u6709\u8d85\u58f0\u6ce2 ToF \u4fe1\u53f7\u5904\u7406\u8fc7\u7a0b\uff08\u56fe 1\uff09\u3002 CH-101 \u548c CH-201 \u5747\u91c7\u7528 1.8 V \u7535\u6e90\u4f9b\u7535\uff0c\u5e76\u5177\u6709\u65b9\u4fbf\u7684 I2C<\/u> \u63a5\u53e3\uff0c\u53ef\u65b9\u4fbf\u5730\u96c6\u6210\u5230\u6d88\u8d39\u7535\u5b50\u4ea7\u54c1\u4e2d\u3002<\/p>\n

\n\t\u9ad8\u7cbe\u5ea6\u8ddd\u79bb\u6d4b\u91cf\u6027\u80fd\u548c\u5bbd\u89c6\u573a<\/strong><\/p>\n

\n\t\u5c3d\u7ba1\u5c3a\u5bf8\u5fae\u5c0f\uff0c\u8fd9\u79cd\u5168\u65b0\u7684 MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u4ecd\u5177\u6709\u5353\u8d8a\u7684\u6027\u80fd\u3002\u4f8b\u5982\uff0c CH-201 \u5728 120cm \u5904\u7684\u8ddd\u79bb\u6d4b\u91cf\u4fe1\u53f7\u566a\u97f3\u4ec5\u4e3a 0.35 mm \uff081σ\uff09\uff0c\u662f\u7ade\u54c1\u7ea2\u5916 ToF \u4f20\u611f\u5668\u566a\u97f3\u7684\u767e\u5206\u4e4b\u4e00\u3002\u6b64\u5916\uff0cCH-101 \u548c CH-201 \u53ef\u63d0\u4f9b\u89c6\u573a\uff08FoV\uff09\u6700\u9ad8\u53ef\u8fbe\u5230 180 °\uff0c\u56e0\u6b64\u53ea\u9700\u4e00\u4e2a\u90e8\u4ef6\u5c31\u80fd\u591f\u5b9e\u73b0\u5bf9\u6574\u4e2a\u7a7a\u95f4\u8303\u56f4\u7684\u68c0\u6d4b\u3002\u8fd8\u6709\u591a\u79cd\u5916\u58f3\u53c2\u8003\u8bbe\u8ba1\u53ef\u4f9b\u9009\u62e9\uff0c\u4f7f\u5f97\u5ba2\u6237\u80fd\u901a\u8fc7\u6539\u53d8\u4f20\u611f\u5668\u58f0\u5b66\u7aef\u53e3\u5468\u56f4\u533a\u57df\u7684\u5f62\u72b6\u4ee5\u805a\u7126\u548c\u5f15\u5bfc\u8d85\u58f0\u6ce2\u675f\uff0c\u4ece\u800c\u5b9e\u73b0\u6240\u9700\u7684\u6c34\u5e73\u548c\u5782\u76f4\u89c6\u573a\u3002<\/p>\n

\n\t\"\u5168\u7403\u9996\u6b3e\u4e1a\u5185\u6700\u4f4e\u7684\u529f\u8017MEMS<\/p>\n

\n\t120cm \u5904\u7684\u8ddd\u79bb\u566a\u97f3\u76ee\u6807\u8ddd\u79bb\u5e26\u6709\u7a84\u89c6\u573a\u5916\u58f3\u65f6\u7684\u89c6\u573a<\/p>\n

\n\t\u56fe 2\uff1a CH-201 \u578b\u4f20\u611f\u5668\u7684\u8ddd\u79bb\u566a\u97f3\u4ec5\u4e3a\u4f20\u7edf\u7ea2\u5916 ToF \u4f20\u611f\u5668\u7684\u767e\u5206\u4e4b\u4e00\uff08\u5de6\u56fe\uff09\u3002\u7a84\u89c6\u573a\u5916\u58f3\u662f\u53ef\u7528\u7684\u53c2\u8003\u8bbe\u8ba1\u4e4b\u4e00\uff0c\u53ef\u5c06\u4f20\u611f\u5668\u8d85\u58f0\u6ce2\u675f\u6574\u5f62\u4ee5\u5b9e\u73b0\u9884\u671f\u7684\u89c6\u573a\uff08\u53f3\u56fe\uff09\u3002<\/p>\n

\n\t\u8d85\u4f4e\u529f\u8017\u7684\u7247\u4e0a\u7cfb\u7edf \uff08SoC\uff09 \u63a7\u5236\u6574\u4e2a ToF \u5904\u7406\u8fc7\u7a0b\uff1a\u53d1\u9001\u8d85\u58f0\u6ce2\u8109\u51b2\uff0c\u5c06\u63a5\u6536\u7684\u8d85\u58f0\u56de\u6ce2\u6570\u5b57\u5316\uff0c\u68c0\u6d4b ToF \u5230\u6700\u8fd1\u76ee\u6807\u5e76\u901a\u8fc7 I2C \u8fd4\u56de 16 \u4f4d ToF \u4fe1\u53f7\u3002\u7247\u4e0a\u7cfb\u7edf \uff08SoC\uff09 \u4f7f\u5524\u9192\u68c0\u6d4b\u5e94\u7528\u80fd\u591f\u59cb\u7ec8\u5904\u4e8e\u5de5\u4f5c\u72b6\u6001;\u5728\u6bcf\u79d2 1 \u6b21\u91c7\u6837\u6d4b\u91cf\u7684\u72b6\u51b5\u4e0b\uff0c\u603b\u7535\u6d41<\/u>\u6d88\u8017\u4f4e\u81f3 8 µA\u3002\u7531\u4e8e\u9a71\u52a8\u7a0b\u5e8f\u91c7\u7528 C \u8bed\u8a00\u7f16\u5199\uff0c\u5f00\u53d1\u8005\u53ef\u4ee5\u5728\u5d4c\u5165\u5f0f\u7cfb\u7edf\u4e2d\u8f7b\u677e\u4f7f\u7528 CH-101 \u548c CH-201\u3002\u6b64\u5916\uff0c\u5355\u4e2a\u5fae\u63a7\u5236\u5668\u5373\u53ef\u63a7\u5236\u591a\u4e2a CH-101 \u548c CH-201 \u4f20\u611f\u5668\uff0c\u6709\u52a9\u4e8e\u5b9e\u73b0\u590d\u6742\u7684\u591a\u4f20\u611f\u5668\u6d4b\u91cf\u529f\u80fd\u3002<\/p>\n

\n\t\u6781\u5176\u5e7f\u6cdb\u7684\u6f5c\u5728\u5e94\u7528<\/strong><\/p>\n

\n\t\u5168\u65b0\u7684 MEMS \u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u662f\u65e0\u4eba\u673a\u53ca\u673a\u5668\u4eba\u7b49\u5e94\u7528\u6ce8\u5b9a\u8981\u9009\u62e9\u7684\u4ea7\u54c1\uff0c\u5728\u8fd9\u7c7b\u5e94\u7528\u4e2d\uff0c\u5176\u5b83\u7c7b\u578b\u7684\u8ddd\u79bb\u4f20\u611f\u5668\u65e0\u6cd5\u63d0\u4f9b\u6240\u9700\u7684\u6027\u80fd\u3002\u5b83\u4eec\u4e5f\u662f\u667a\u80fd\u97f3\u7bb1<\/u>\u7b49\u667a\u6167\u5bb6\u5ead\u4ea7\u54c1\u7684\u7406\u60f3\u9009\u62e9\uff0c\u5728\u8fd9\u7c7b\u5e94\u7528\u4e2d\uff0c\u88ab\u52a8\u7ea2\u5916\uff08PI<\/u>R\uff09\u548c\u5149\u5b66\u63a5\u8fd1\u4f20\u611f\u5668<\/u>\u90fd\u6ca1\u6709\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u6709\u6548\u3002\u8fd9\u79cd\u5fae\u578b\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u8fd8\u53ef\u4ee5\u7cbe\u786e\u5730\u8ffd\u8e2a\u76ee\u6807\u7269\uff0c\u4f8b\u5982\uff0c\u5728\u865a\u62df\u73b0\u5b9e\u548c\u589e\u5f3a\u73b0\u5b9e\uff08VR<\/u>\/AR\uff09\u7cfb\u7edf\u4e2d\uff0c\u8ffd\u8e2a\u624b\u6301\u5f0f\u6e38\u620f\u63a7\u5236\u5668\u3002\u667a\u80fd\u624b\u673a\u662f\u53e6\u4e00\u4e2a\u91cd\u8981\u7684\u5e94\u7528\u9886\u57df\uff1a\u7531\u4e8e CH-101 \u5177\u6709\u5bbd\u89c6\u573a\uff0c\u5373\u4f7f\u5b89\u88c5\u5728\u624b\u673a\u7684\u9876\u90e8\u6216\u5e95\u90e8\u4ecd\u80fd\u591f\u5b9e\u73b0\u7cbe\u786e\u7684\u8ddd\u79bb\u6d4b\u91cf\uff0c\u56e0\u6b64\u8bbe\u8ba1\u5e08\u53ef\u4ee5\u7701\u7565\u624b\u673a\u524d\u9762\u7684\u5149\u5b66\u63a5\u8fd1\u4f20\u611f\u5668\uff0c\u4ece\u800c\u5b9e\u73b0\u624b\u673a\u5168\u9762\u5c4f\u8bbe\u8ba1\u3002<\/p>\n

\n\t\u5728\u8ddd\u79bb\u6d4b\u91cf\u548c\u7269\u4f53\u63a2\u6d4b\u5e94\u7528\u4e2d\uff0c\u4ee5\u524d\u88ab\u8feb\u5728\u5927\u5c3a\u5bf8\u8d85\u58f0\u4f20\u611f\u5668\u4e0e\u57fa\u4e8e\u6fc0\u5149<\/u>\u7684\u7ea2\u5916 ToF \u4f20\u611f\u5668\u4e4b\u95f4\u9009\u62e9\u7684\u8bbe\u8ba1\u5e08\u4eec\u73b0\u5728\u53ef\u4ee5\u53d7\u76ca\u4e8e\u65b0\u578b\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u7684\u80fd\u529b\uff1a<\/p>\n

\n\t• \u63d0\u4f9b\u7cbe\u786e\u3001\u4f4e\u5ef6\u65f6\u7684\u8ddd\u79bb\u6d4b\u91cf\u7ed3\u679c\uff0c\u6d4b\u91cf\u901f\u5ea6\u9ad8\u8fbe\u6bcf\u79d2\u91c7\u6837 100 \u6b21\uff0c\u4f4d\u7f6e\u566a\u97f3\u5c0f\u4e8e1mm<\/p>\n

\n\t• \u5728\u4eba\u5458\u63a5\u8fd1\u3001\u79fb\u52a8\u548c\u6d3b\u52a8\u68c0\u6d4b\u7b49\u5e94\u7528\u4e2d\u53ef\u5b9e\u73b0\u4f20\u611f\u5668\u59cb\u7ec8\u4fdd\u6301\u5de5\u4f5c\u72b6\u6001\uff0c\u529f\u8017\u4f4e\u81f3 15µW<\/p>\n

\n\t• \u63a2\u6d4b\u7269\u4f53\u7684\u89c6\u573a\u9ad8\u8fbe 180°\uff0c\u56e0\u6b64\u4e00\u4e2a\u4f20\u611f\u5668\u5c31\u80fd\u591f\u68c0\u6d4b\u6574\u4e2a\u623f\u95f4\u573a\u666f<\/p>\n

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