{"id":1844,"date":"2018-12-19T03:11:00","date_gmt":"2018-12-19T03:11:00","guid":{"rendered":""},"modified":"2018-12-19T11:11:43","modified_gmt":"2018-12-19T03:11:43","slug":"mems%e6%83%af%e6%80%a7%e4%bc%a0%e6%84%9f%e5%99%a8%e6%8a%95%e8%b5%84%e7%ad%96%e7%95%a5%e8%a7%a3%e6%9e%90","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=1844","title":{"rendered":"MEMS\u60ef\u6027\u4f20\u611f\u5668\u6295\u8d44\u7b56\u7565\u89e3\u6790"},"content":{"rendered":"

\n\t\u4e2d\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4e2d\u5b58\u5728\u7740\u5de8\u5927\u53d1\u5c55\u7a7a\u95f4\u7684\u9886\u57df\u9664\u4e86CPU<\/u>\u3001GPU<\/u>\u3001FLASH\u3001DSP<\/u>\u548cFPGA<\/u>\u4e4b\u5916\uff0cMEMS\u60ef\u6027\u4f20\u611f\u5668<\/u>\u4e5f\u662f\u4e00\u4e2a\u5173\u952e\u7684\u9886\u57df\uff0c\u5728\u534a\u5bfc\u4f53\u5668\u4ef6\u56fd\u4ea7\u5316\u65e5\u76ca\u9ad8\u6da8\u7684\u4eca\u5929\uff0c\u547c\u5524MEMS\u60ef\u6027\u4f20\u611f\u5668\u9886\u57df\u7684“\u738b\u8005”\u3002<\/p>\n

\n\t\u7b2c\u4e00\u8282<\/p>\n

\n\t <\/div>\n

\n\tMEMS\u4f20\u611f\u5668\u4ecb\u7ecd<\/p>\n

\n\t\u4e00\u3001MEMS\u4f20\u611f\u5668\u6280\u672f\u4ecb\u7ecd<\/p>\n

\n\tMEMS\uff08Micro-Electro-Mechanical Syste<\/u>m\uff09\u5373\u5fae\u673a\u7535\u7cfb\u7edf\uff0c\u4e5f\u53eb\u505a\u5fae\u7535\u5b50\u673a\u68b0\u7cfb\u7edf\u3001\u5fae\u7cfb\u7edf\u3001\u5fae\u673a\u68b0\u7b49\uff0c\u6307\u5c3a\u5bf8\u5728\u51e0\u6beb\u7c73\u4e43\u81f3\u66f4\u5c0f\u7684\u9ad8\u79d1\u6280\u88c5\u7f6e\uff0c\u53ef\u6279\u91cf\u5236\u4f5c\uff0c\u5c06\u5fae\u578b\u4f20\u611f\u5668\u3001\u5fae\u578b\u6267\u884c\u5668\u4ee5\u53ca\u4fe1\u53f7\u5904\u7406\u548c\u63a7\u5236\u7535\u8def\u3001\u751a\u81f3\u63a5\u53e3\u3001\u901a\u4fe1\u548c\u7535\u6e90\u7b49\u96c6\u4e3a\u4e00\u4f53\u7684\u5fae\u578b\u5668\u4ef6\u6216\u7cfb\u7edf\u3002MEMS\u662f\u5229\u7528\u4f20\u7edf\u7684\u534a\u5bfc\u4f53\u5de5\u827a\u548c\u6750\u6599\uff0c\u901a\u8fc7\u5fae\u7c73\u6280\u672f\u5728\u82af\u7247\u4e0a\u5236\u9020\u5fae\u578b\u673a\u68b0\uff0c\u5e76\u5c06\u5176\u4e0e\u5bf9\u5e94\u7535\u8def\u96c6\u6210\u4e3a\u4e00\u4e2a\u6574\u4f53\u3002\u53d7\u76ca\u4e8e\u666e\u901a\u4f20\u611f\u5668\u65e0\u6cd5\u4f01\u53ca\u7684IC\u7845\u7247\u52a0\u5de5\u6279\u91cf\u5316\u751f\u4ea7\u5e26\u6765\u7684\u6210\u672c\u4f18\u52bf\uff0cMEMS\u540c\u65f6\u53c8\u5177\u5907\u666e\u901a\u4f20\u611f\u5668\u65e0\u6cd5\u5177\u5907\u7684\u5fae\u578b\u5316\u548c\u9ad8\u96c6\u6210\u5ea6\u3002<\/p>\n

\n\tMEMS\u5176\u5de5\u4f5c\u539f\u7406\u662f\u5916\u90e8\u73af\u5883\u7269\u7406\u3001\u5316\u5b66\u548c\u751f\u7269\u7b49\u4fe1\u53f7\u8f93\u5165\uff0c\u901a\u8fc7\u5fae\u4f20\u611f\u5668\u8f6c\u6362\u6210\u7535\u4fe1\u53f7\uff0c\u7ecf\u8fc7\u4fe1\u53f7\u5904\u7406\uff08\u6a21\u62df\u4fe1\u53f7\u6216\u6570\u5b57\u4fe1\u53f7\uff09\u540e\uff0c\u7531\u5fae\u6267\u884c\u5668\u6267\u884c\u52a8\u4f5c\uff0c\u8fbe\u5230\u4e0e\u5916\u90e8\u73af\u5883“\u4e92\u52a8”\u7684\u529f\u80fd\u3002\u5982\u56fe1-1-1\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u4f20\u7edf\u9ea6\u514b\u98ce\u4f20\u611f\u5668\u4e0eMEMS\u9ea6\u514b\u98ce\u4f20\u611f\u5668\u5bf9\u6bd4\u5982\u56fe1-1-2\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\tMEMS\u4f20\u611f\u5668\u54c1\u79cd\u7e41\u591a\uff0c\u5206\u7c7b\u65b9\u6cd5\u4e5f\u5f88\u591a\u3002\u6309\u5176\u5de5\u4f5c\u539f\u7406\uff0c\u53ef\u5206\u4e3a\u7269\u7406\u578b\u3001\u5316\u5b66\u578b\u548c\u751f\u7269\u578b\u4e09\u7c7b\u3002\u6bcf\u79cdMEMS\u4f20\u611f\u5668\u53c8\u6709\u591a\u79cd\u7ec6\u5206\u65b9\u6cd5\uff0c\u6309\u68c0\u6d4b\u8d28\u91cf\u7684\u8fd0\u52a8\u65b9\u5f0f\u5212\u5206\uff0c\u6709\u89d2\u632f\u52a8\u5f0f\u548c\u7ebf\u632f\u52a8\u5f0f\u52a0\u901f\u5ea6\u8ba1\u3002\u6309\u68c0\u6d4b\u8d28\u91cf\u652f\u627f\u65b9\u5f0f\u5212\u5206\uff0c\u6709\u626d\u6446\u5f0f\u3001\u60ac\u81c2\u6881\u5f0f\u548c\u5f39\u7c27\u652f\u627f\u65b9\u5f0f\u3002\u6309\u4fe1\u53f7\u68c0\u6d4b\u65b9\u5f0f\u5212\u5206\uff0c\u6709\u7535\u5bb9<\/u>\u5f0f\u3001\u7535\u963b\u5f0f\u548c\u96a7\u9053\u7535\u6d41<\/u>\u5f0f\u3002\u6309\u63a7\u5236\u65b9\u5f0f\u5212\u5206\u6709\u5f00\u73af\u548c\u95ed\u73af\u5f0f\u3002\u5e38\u89c1\u7684MEMS\u4f20\u611f\u5668\u6709\u538b\u529b\u4f20\u611f\u5668<\/u>\u3001\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u3001\u5fae\u673a\u68b0\u9640\u87ba\u4eea<\/u>\u3001\u60ef\u6027\u4f20\u611f\u5668\u3001MEMS\u7845\u9ea6\u514b\u98ce\u7b49\u3002<\/p>\n

\n\t<\/p>\n

\n\t<\/p>\n

\n\t\u4e8c\u3001MEMS\u60ef\u6027\u4f20\u611f\u5668\u4ecb\u7ecd<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u4e3b\u8981\u662f\u6307MEMS\u52a0\u901f\u5ea6\u8ba1\u548cMEMS\u9640\u87ba\u4eea\u3002MEMS\u60ef\u6027\u4f20\u611f\u5668\u57281990\u5e74\u4ee3\u5f00\u59cb\u89c4\u6a21\u5e94\u7528\u5728\u6c7d\u8f66\u5de5\u4e1a\u548c\u56fd\u9632\u5de5\u4e1a\uff0c20\u4e16\u7eaa\u521d\u5f00\u59cb\u5e94\u7528\u4e8e\u624b\u673a\u7b49\u6d88\u8d39\u7535\u5b50\u9886\u57df\uff0c\u7269\u8054\u7f51\u6709\u671b\u5f15\u9886\u4e0b\u4e00\u6ce2\u589e\u957f\u6d6a\u6f6e\uff08\u5982\u56fe2-1-1\u6240\u793a\uff09\u3002<\/p>\n

\n\t<\/p>\n

\n\tMEMS\u9640\u87ba\u4eea\u548cMEMS\u52a0\u901f\u5ea6\u8ba1\uff0c\u5747\u7531\u4e00\u9897MEMS\u82af\u7247\u548c\u4e00\u9897ASIC<\/u>\u82af\u7247\u7ec4\u6210\uff0c\u4e8c\u9897\u82af\u7247\u5c01\u88c5\u4e00\u8d77\u6784\u6210\u4e86\u9640\u87ba\u4eea\u6216\u52a0\u901f\u5ea6\u8ba1\uff0c\u5982\u56fe2-2-2\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u96c6\u6210\u82e5\u5e72\u8f74\u52a0\u901f\u5ea6\u8ba1\u548c\u9640\u87ba\u4eea\u4e3a\u4e00\u4f53\uff0c\u53ef\u6784\u6210IMU\uff08Inerti<\/u>al Measurement Unit\u60ef\u6027\u6d4b\u91cf\u5355\u5143\uff09\uff0cIMU\u53ef\u7528\u4e8e\u6d4b\u91cf\u7269\u4f53\u4e09\u8f74\u59ff\u6001\u89d2(\u6216\u89d2\u901f\u7387)\u4ee5\u53ca\u52a0\u901f\u5ea6\u3002ST\u7684\u4e5d\u8f74MEMS IMU\u4f20\u611f\u5668\uff08\u4e09\u8f74\u9640\u87ba\u4eea+\u4e09\u8f74\u52a0\u901f\u5ea6\u8ba1\uff09\u3001InvenSense<\/u>\u7684\u4e5d\u8f74IMU\u4f20\u611f\u5668\uff08\u4e09\u8f74\u9640\u87ba\u4eea+\u4e09\u8f74\u52a0\u901f\u5ea6\u8ba1\uff09\uff0c\u5982\u56fe2-2-3\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u4f4e\u7cbe\u5ea6\u7684MEMS\u60ef\u6027\u4f20\u611f\u5668\u7684\u5e94\u7528\u9886\u57df\u4ee5\u6d88\u8d39\u7535\u5b50\u4e3a\u4ee3\u8868\uff0c\u5982\u624b\u673a\u3001\u6e38\u620f\u673a\u3001\u65e0\u7ebf\u9f20\u6807\u3001\u6570\u7801\u76f8\u673a\u3001\u786c\u76d8\u4fdd\u62a4\u3001\u8ba1\u6b65\u5668\u3001\u9632\u76d7\u7cfb\u7edf\u3001GSP\u5bfc\u822a\u3001\u8001\u4eba\u5065\u5eb7\u68c0\u6d4b\u3001\u73a9\u5177\u3001\u73a9\u5177\u7ea7\u65e0\u4eba\u673a<\/u>\u3001\u667a\u80fd\u8fd0\u52a8\u5668\u68b0\u7b49\u4ea7\u54c1\u4e2d\uff0c\u57fa\u672c\u529f\u80fd\u662f\u6d4b\u91cf\u7269\u4f53\u7684\u76f4\u7ebf\u52a0\u901f\u5ea6\u3001\u503e\u659c\u89d2\u5ea6\u3001\u8f6c\u52a8\u901f\u5ea6\u3001\u632f\u52a8\u9891\u7387\u548c\u529b\u5ea6\u7b49\uff0c\u8fd9\u4e9b\u57fa\u672c\u7684\u7269\u7406\u4fe1\u53f7\u901a\u8fc7\u5e94\u7528\u7a0b\u5e8f\u7684\u5f00\u53d1\uff0c\u53ef\u4ee5\u884d\u751f\u51fa\u5404\u79cd\u5404\u6837\u7684\u529f\u80fd\u3002\u4e3b\u8981\u4f9b\u5e94\u5546\u4e3aST\u3001Bosch<\/u>\u3001Invensense\uff08TDK<\/u>\uff09\u3001Mcu<\/u>be\u3001\u82cf\u5dde\u660e\u7693\u3001Kionix\uff08Rohm\uff09\u7b49\u3002<\/p>\n

\n\t\u4e2d\u7cbe\u5ea6\u7684MEMS\u60ef\u6027\u4f20\u611f\u5668\u7684\u5e94\u7528\u9886\u57df\u4ee5\u6c7d\u8f66\u4e3a\u4ee3\u8868\uff0c\u4e3b\u8981\u529f\u80fd\u4e3a\uff1a\u5b89\u5168\u6c14\u56ca\u89e6\u53d1\u3001\u7535\u5b50\u7a33\u5b9a\u7cfb\u7edf\u3001\u9632\u4fa7\u7ffb\u3001\u8f6e\u80ce\u9632\u76d7\u3001TPMS\uff08\u80ce\u538b\u76d1\u63a7\uff09\u3001GPS\u8f85\u52a9\u5bfc\u822a\u3001\u81ea\u52a8\u9a7e\u9a76<\/u>\u7b49\u3002\u6839\u636e\u529f\u80fd\u4e0d\u540c\u89c4\u683c\u4e0d\u540c\uff0c\u5982\u5b89\u5168\u6c14\u56ca\u89e6\u53d1\u7684\u52a0\u901f\u5ea6\u8ba1\u91cf\u7a0b\u5728±70g\uff5e±100g\uff0c\u7535\u5b50\u7a33\u5b9a\u7cfb\u7edf\u3001\u9632\u4fa7\u7ffb\u7b49\u7684\u52a0\u901f\u5ea6\u8ba1\u91cf\u7a0b\uff5e±2g\uff0c\u96f6\u504f\u6e29\u6f02\u5728±0.1\uff5e±1mg\/\u2103\uff0c\u7535\u5b50\u7a33\u5b9a\u7cfb\u7edf\u7684\u9640\u87ba\u4eea\u7684\u91cf\u7a0b\u5728±200°\/s\uff5e±500°\/s\uff0c\u96f6\u504f\u7a33\u5b9a\u6027\uff08\u5e38\u6e29Allen\uff09\u57282\uff5e15°\/h\uff0c\u53e6\u5916\u8fd8\u6709\u7cbe\u5bc6\u519c\u4e1a\u3001\u5de5\u4e1a\u81ea\u52a8\u5316\u3001\u5927\u578b\u533b\u7597\u8bbe\u5907\u3001\u673a\u5668\u4eba\u3001\u5de5\u5382\u673a\u68b0\u3001\u5de5\u4e1a\u7ea7\u65e0\u4eba\u673a\u3001\u4eea\u5668\u4eea\u8868\u3001\u8f68\u9053\u4ea4\u901a\u7b49\u5e94\u7528\u9886\u57df\u3002\u4e3b\u8981\u4f9b\u5e94\u5546\u4e3aADI<\/u>\u3001Bosch\u3001\u677e\u4e0b<\/u>\u3001\u7cbe\u5de5\u3001Murata\u3001Silicon sensing\u3001Infineon\u3001MEMSIC\u7b49\u3002<\/p>\n

\n\t\u9ad8\u7cbe\u5ea6\u7684MEMS\u60ef\u6027\u4f20\u611f\u5668\u7684\u5e94\u7528\u4ee5\u822a\u5929\u548c\u56fd\u9632\u9886\u57df\u4e3a\u4ee3\u8868\uff0c\u5305\u62ec\u5bfc\u5f39\u5bfc\u5f15\u5934\u3001\u901a\u4fe1\u5929\u7ebf\u6307\u5411\u63a7\u5236\u3001\u667a\u80fd\u70ae\u5f39\u3001\u5149\u5b66\u7784\u51c6\u7a33\u5b9a\u7cfb\u7edf\u3001\u6c34\u4e0b\u7269\u4f53\u5bfc\u822a\u3001\u98de\u673a\u59ff\u6001\u76d1\u63a7\u3001\u6218\u573a\u673a\u5668\u4eba\u7b49\uff0c\u5176\u6027\u80fd\u6307\u6807\u8981\u6c42\u5168\u5de5\u4f5c\u6e29\u5ea6\u533a\u57df\u5f97\u5230\u4fdd\u8bc1\uff0c\u5176\u4e2d\u5c0f\u91cf\u7a0b\u52a0\u901f\u5ea6\u8ba1\u7684\u91cf\u7a0b\u572810\uff5e100g\uff0c\u96f6\u504f\u7a33\u5b9a\u6027<10mg\uff1b\u5927\u90e8\u5206\u9640\u87ba\u4eea\u7684\u91cf\u7a0b\u5728100°\/s\uff5e500°\/s\uff0c\u96f6\u504f\u7a33\u5b9a\u6027\uff08\u5e38\u6e29Allen\uff09\u57280.2°\/h\uff5e1°\/h\u3002\u4e3b\u8981\u4f9b\u5e94\u5546\u4e3aHoneywell\u3001BEI\u3001Sensonor\u3001Colibrys\u3001Endevco\u3001Systron Donner\u3001Sagem\u7b49\u3002<\/p>\n

\n\t\u7b2c\u4e8c\u8282<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u884c\u4e1a\u5206\u6790<\/p>\n

\n\t\u4e00\u3001MEMS\u4f20\u611f\u5668\u6240\u5c5e\u884c\u4e1a\u548c\u6cd5\u89c4<\/p>\n

\n\t\uff08\u4e00\uff09\u6240\u5c5e\u884c\u4e1a<\/p>\n

\n\t\u6839\u636e\u4e2d\u56fd\u8bc1\u76d1\u4f1a\u53d1\u5e03\u7684\u300a\u4e0a\u5e02\u516c\u53f8\u884c\u4e1a\u5206\u7c7b\u6307\u5f15\u300b\uff082012 \u5e74\u4fee\u8ba2\uff09\u89c4\u5b9a\uff0cMEMS\u4f20\u611f\u5668\u6240\u5c5e\u884c\u4e1a\u4e3a“\u8ba1\u7b97\u673a\u3001\u901a\u4fe1\u548c\u5176\u4ed6\u7535\u5b50\u8bbe\u5907\u5236\u9020\u4e1a”\uff08C39\uff09\uff1b\u6839\u636e\u56fd\u5bb6\u7edf\u8ba1\u5c402017\u5e746\u6708\u9881\u5e03\u5b9e\u65bd\u7684\u300a\u56fd\u6c11\u7ecf\u6d4e\u884c\u4e1a\u5206\u7c7b\u300b\u56fd\u5bb6\u6807\u51c6\uff08GB\/T4754-2017\uff09\uff0cMEMS\u4f20\u611f\u5668\u6240\u5904\u884c\u4e1a\u4e3a“\u8ba1\u7b97\u673a\u3001\u901a\u4fe1\u548c\u5176\u4ed6\u7535\u5b50\u8bbe\u5907\u5236\u9020\u4e1a”\u884c\u4e1a\u4e0b\u7684“\u7535\u5b50\u5143\u4ef6\u53ca\u7535\u5b50\u4e13\u7528\u6750\u6599\u5236\u9020”\uff08C3983\uff09\u5b50\u884c\u4e1a\uff0c\u7ec6\u5206\u884c\u4e1a\u4e3a\u654f\u611f\u5143\u4ef6\u53ca\u4f20\u611f\u5668\u5236\u9020\u3002<\/p>\n

\n\t\uff08\u4e8c\uff09\u884c\u4e1a\u76d1\u7ba1\u4f53\u5236\u3001\u4e3b\u8981\u6cd5\u5f8b\u6cd5\u89c4\u53ca\u653f\u7b56<\/p>\n

\n\t1\u3001\u884c\u4e1a\u76d1\u7ba1\u4f53\u5236<\/p>\n

\n\t1) \u884c\u4e1a\u76d1\u7ba1\u4f53\u5236\u53ca\u4e3b\u7ba1\u90e8\u95e8<\/p>\n

\n\tMEMS\u4f20\u611f\u5668\u6240\u5c5e\u884c\u4e1a\u7684\u4e3b\u7ba1\u90e8\u95e8\u4e3b\u8981\u4e3a\u5de5\u4fe1\u90e8\u3002\u5de5\u4fe1\u90e8\u4e3b\u8981\u8d1f\u8d23\u7814\u7a76\u62df\u5b9a\u4fe1\u606f\u5316\u53d1\u5c55\u6218\u7565\u3001\u65b9\u9488\u653f\u7b56\u548c\u603b\u4f53\u89c4\u5212\uff1b\u62df\u5b9a\u672c\u884c\u4e1a\u7684\u6cd5\u5f8b\u3001\u6cd5\u89c4\uff0c\u53d1\u5e03\u884c\u653f\u89c4\u7ae0\uff1b\u7ec4\u7ec7\u5236\u8ba2\u884c\u4e1a\u7684\u4ea7\u4e1a\u653f\u7b56\u3001\u4ea7\u4e1a\u89c4\u5212\uff0c\u7ec4\u7ec7\u5236\u8ba2\u884c\u4e1a\u7684\u6280\u672f\u653f\u7b56\u3001\u4f53\u5236\u548c\u6807\u51c6\u7b49\uff0c\u5e76\u5bf9\u884c\u4e1a\u7684\u53d1\u5c55\u65b9\u5411\u8fdb\u884c\u5b8f\u89c2\u8c03\u63a7\u3002<\/p>\n

\n\t2\uff09\u884c\u4e1a\u534f\u4f1a\u53ca\u5176\u4ed6\u7ec4\u7ec7<\/p>\n

\n\t\u4e2d\u56fd\u534a\u5bfc\u4f53\u884c\u4e1a\u534f\u4f1a\u662fMEMS\u4f20\u611f\u5668\u6240\u5c5e\u884c\u4e1a\u7684\u884c\u4e1a\u81ea\u5f8b\u7ec4\u7ec7\uff0c\u4e3b\u8981\u8d1f\u8d23\u4ea7\u4e1a\u53ca\u5e02\u573a\u7814\u7a76\uff0c\u5bf9\u4f1a\u5458\u4f01\u4e1a\u63d0\u4f9b\u884c\u4e1a\u5f15\u5bfc\u3001\u54a8\u8be2\u670d\u52a1\u3001\u884c\u4e1a\u81ea\u5f8b\u7ba1\u7406\u4ee5\u53ca\u4ee3\u8868\u4f1a\u5458\u4f01\u4e1a\u5411\u653f\u5e9c\u90e8\u95e8\u63d0\u51fa\u4ea7\u4e1a\u53d1\u5c55\u5efa\u8bae\u548c\u610f\u89c1\u7b49\u3002<\/p>\n

\n\t\u5de5\u4fe1\u90e8\u548c\u534a\u5bfc\u4f53\u534f\u4f1a\u6784\u6210\u4e86\u60ef\u6027\u4f20\u611f\u5668\u884c\u4e1a\u7684\u7ba1\u7406\u4f53\u7cfb\uff0c\u5404\u60ef\u6027\u4f20\u611f\u5668\u4f01\u4e1a\u5728\u4e3b\u7ba1\u90e8\u95e8\u7684\u4ea7\u4e1a\u5b8f\u89c2\u8c03\u63a7\u548c\u884c\u4e1a\u534f\u4f1a\u81ea\u5f8b\u89c4\u8303\u7684\u7ea6\u675f\u4e0b\uff0c\u9762\u5411\u5e02\u573a\u81ea\u4e3b\u7ecf\u8425\uff0c\u81ea\u4e3b\u627f\u62c5\u5e02\u573a\u98ce\u9669\u3002<\/p>\n

\n\t2\u3001\u884c\u4e1a\u4e3b\u8981\u6cd5\u89c4\u53ca\u653f\u7b56<\/p>\n

\n\t\u8fd1\u5e74\u6765\uff0c\u56fd\u5bb6\u5c42\u9762\u5927\u529b\u63a8\u8fdbMEMS\u4f20\u611f\u5668\u884c\u4e1a\u53d1\u5c55\uff0c\u5305\u62ec\u5982\u4e0b\u3002<\/p>\n

\n\t2017\u5e7412\u6708\uff0c\u5de5\u4fe1\u90e8\u53d1\u5e03\u667a\u80fd\u4f20\u611f\u5668\u4ea7\u4e1a\u4e09\u5e74\u884c\u52a8\u6307\u5357\uff082017-2019\u5e74\uff09\u3002\u52302019\u5e74\uff0c\u5efa\u6210\u667a\u80fd\u4f20\u611f\u5668\u521b\u65b0\u4e2d\u5fc3\uff1b\u6a21\u62df\u4eff\u771f\u3001\u8bbe\u8ba1\u3001MEMS\u5de5\u827a\u3001\u6676\u5706\u7ea7\u5c01\u88c5\u548c\u4e2a\u6027\u5316\u6d4b\u8bd5\u6280\u672f\u8fbe\u5230\u56fd\u9645\u6c34\u5e73\uff1b\u6db5\u76d6\u667a\u80fd\u4f20\u611f\u5668\u6a21\u62df\u4e0e\u6570\u5b57\/\u6570\u5b57\u4e0e\u6a21\u62df\u8f6c\u6362(AD\/DA)\u3001\u4e13\u7528\u96c6\u6210\u7535\u8def\uff08ASIC\uff09\u3001\u8f6f\u4ef6\u7b97\u6cd5\u7b49\u7684\u8f6f\u786c\u4ef6\u96c6\u6210\u80fd\u529b\u5927\u5e45\u6500\u5347\u3002\u652f\u6301\u4f01\u4e1a\u63a2\u7d22\u7814\u53d1\u65b0\u578bMEMS\u4f20\u611f\u5668\u8bbe\u8ba1\u6280\u672f\u3001\u5236\u9020\u5de5\u827a\u6280\u672f\u3001\u96c6\u6210\u521b\u65b0\u4e0e\u667a\u80fd\u5316\u6280\u672f\u7b49\uff0c\u6301\u7eed\u63d0\u5347\u539f\u521b\u6027\u7814\u53d1\u80fd\u529b\uff0c\u9010\u6b65\u6784\u5efa\u9ad8\u6c34\u51c6\u6280\u672f\u521b\u65b0\u4f53\u7cfb\u3002\u6838\u5fc3\u6280\u672f\u653b\u5173\u5de5\u7a0b\u5305\u62ec\uff1a\u63d0\u5347MEMS\u4f20\u611f\u5668\u96c6\u6210\u5316\u6c34\u5e73\uff0c\u63a8\u52a8\u96c6\u6210\u8ddd\u79bb\u3001\u73af\u5883\u5149\u3001\u4e09\u7ef4\u666f\u6df1\u7b49\u5149\u5b66\u7ec4\u5408\u667a\u80fd\u4f20\u60d1\u5668\u4ea7\u54c1\u5b9e\u73b0\u5546\u7528\u3002<\/p>\n

\n\t2015\u5e745\u6708\uff0c\u56fd\u52a1\u9662\u516c\u5e03\u300a\u4e2d\u56fd\u5236\u90202025\u300b\uff0c\u5728\u5341\u5927\u91cd\u70b9\u9886\u57df\u4e2d\u660e\u786e\u63d0\u51fa\u8981\u7a81\u7834\u673a\u5668\u4eba\u672c\u4f53\u3001\u51cf\u901f\u5668\u3001\u4f3a\u670d\u7535\u673a\u3001\u63a7\u5236\u5668\u3001\u4f20\u611f\u5668\u4e0e\u9a71\u52a8\u5668\u7b49\u5173\u952e\u96f6\u90e8\u4ef6\u53ca\u7cfb\u7edf\u96c6\u6210\u8bbe\u8ba1\u5236\u9020\u7b49\u6280\u672f\u74f6\u9888\u3002<\/p>\n

\n\t2013\u5e742\u6708\uff0c\u5de5\u4e1a\u548c\u4fe1\u606f\u5316\u90e8\u3001\u79d1\u6280\u90e8\u3001\u8d22\u653f\u90e8\u3001\u56fd\u5bb6\u6807\u51c6\u5316\u7ba1\u7406\u59d4\u5458\u4f1a\u7ec4\u7ec7\u5236\u5b9a\u4e86\u300a\u52a0\u5feb\u63a8\u8fdb\u4f20\u611f\u5668\u53ca\u667a\u80fd\u5316\u4eea\u5668\u4eea\u8868\u4ea7\u4e1a\u53d1\u5c55\u884c\u52a8\u8ba1\u5212\u300b\uff0c\u5236\u5b9a\u4e86\u5177\u4f53\u7684\u4ea7\u4e1a\u53d1\u5c55\u76ee\u6807\uff0c\u5e76\u7ed9\u51fa\u4e86 2013-2025 \u5e74\u7684\u53d1\u5c55\u8def\u7ebf\u56fe\u3002<\/p>\n

\n\t2013\u5e742\u6708\uff0c\u56fd\u52a1\u9662\u53d1\u5e03\u300a\u56fd\u52a1\u9662\u5173\u4e8e\u63a8\u8fdb\u7269\u8054\u7f51\u6709\u5e8f\u5065\u5eb7\u53d1\u5c55\u7684\u6307\u5bfc\u610f\u89c1\u300b\uff0c\u5176\u4e2d\u7740\u91cd\u63d0\u51fa“\u52a0\u5f3a\u4f4e\u6210\u672c\u3001\u4f4e\u529f\u8017\u3001\u9ad8\u7cbe\u5ea6\u3001\u9ad8\u53ef\u9760\u3001\u667a\u80fd\u5316\u4f20\u611f\u5668\u7684\u7814\u53d1\u4e0e\u4ea7\u4e1a\u5316\uff0c\u7740\u529b\u7a81\u7834\u7269\u8054\u7f51\u6838\u5fc3\u82af\u7247\u3001\u8f6f\u4ef6\u3001\u4eea\u5668\u4eea\u8868\u7b49\u57fa\u7840\u5171\u6027\u6280\u672f\uff0c\u52a0\u5feb\u4f20\u611f\u5668\u7f51\u7edc\u3001\u667a\u80fd\u7ec8\u7aef\u3001\u5927\u6570\u636e\u5904\u7406\u3001\u667a\u80fd\u5206\u6790\u3001\u670d\u52a1\u96c6\u6210\u7b49\u5173\u952e\u6280\u672f\u7814\u53d1\u521b\u65b0”\u3002<\/p>\n

\n\t2011\u5e742\u6708\uff0c\u5de5\u4e1a\u548c\u4fe1\u606f\u5316\u90e8\u5370\u53d1\u300a\u7269\u8054\u7f51“\u5341\u4e8c\u4e94”\u53d1\u5c55\u89c4\u5212\u300b\uff0c\u63d0\u51fa“\u63d0\u5347\u611f\u77e5\u6280\u672f\u6c34\u5e73\u3002\u91cd\u70b9\u652f\u6301\u8d85\u9ad8\u9891\u548c\u5fae\u6ce2\u5c04\u9891\u8eab\u4efd\u6807\u7b7e\u3001\u667a\u80fd\u4f20\u611f\u5668\u3001\u5d4c\u5165\u5f0f\u8f6f\u4ef6\u7684\u7814\u53d1\uff0c\u652f\u6301\u4f4d\u7f6e\u611f\u77e5\u6280\u672f\u3001\u57fa\u4e8eMEMS\u7684\u4f20\u611f\u5668\u7b49\u5173\u952e\u8bbe\u5907\u7684\u7814\u5236\uff0c\u63a8\u52a8\u4e8c\u7ef4\u7801\u89e3\u7801\u82af\u7247\u7814\u7a76”\u3002<\/p>\n

\n\t\u4e8c\u3001MEMS\u4f20\u611f\u5668\u4ea7\u4e1a\u94fe<\/p>\n

\n\tMEMS\u662f\u591a\u5b66\u79d1\u4ea4\u53c9\u7684\u590d\u6742\u7cfb\u7edf\uff0c\u5176\u4ea7\u4e1a\u94fe\u7c7b\u4f3c\u4e8e\u4f20\u7edf\u534a\u5bfc\u4f53\u4ea7\u4e1a\uff0c\u6574\u4e2a\u4ea7\u4e1a\u94fe\u6d89\u53ca\u8bbe\u8ba1\u3001\u5236\u9020\u3001\u5c01\u88c5\u6d4b\u8bd5\u3001\u8f6f\u4ef6\u53ca\u5e94\u7528\u65b9\u6848\u73af\u8282\u3002MEMS\u4ea7\u4e1a\u94fe\u7684\u4e0a\u6e38\u8d1f\u8d23MEMS\u5668\u4ef6\u8bbe\u8ba1\u3001\u6750\u6599\u548c\u751f\u4ea7\u8bbe\u5907\u4f9b\u5e94\uff0c\u4e2d\u6e38\u751f\u4ea7\u5236\u9020\u51faMEMS\u5668\u4ef6\u3001\u4e0b\u6e38\u4f7f\u7528MEMS\u5668\u4ef6\u5236\u9020\u7ec8\u7aef\u7535\u5b50\u4ea7\u54c1\uff0cMEMS\u4ea7\u4e1a\u94fe\u5982\u56fe2-2-1\u6240\u793a\u3002<\/p>\n

\n\t\u5927\u90e8\u5206MEMS\u884c\u4e1a\u7684\u4e3b\u8981\u5382\u5546\u662f\u4ee5Fabless\u4e3a\u4e3b\uff0c\u4f8b\u5982\u697c\u6c0f\u3001HP\u3001\u4f73\u80fd\u7b49\u3002\u540c\u65f6\uff0c\u5e73\u884c\u7684\u4e5f\u6709IDM\u5382\u5546\u5782\u76f4\u53c2\u4e0e\u5230\u6574\u6761\u4ea7\u4e1a\u94fe\u7684\u5404\u4e2a\u73af\u8282\uff0c\u6bd4\u5982Bosch\u3001ST\u7b49\u90fd\u5efa\u6709\u81ea\u5df1\u7684\u6676\u5143\u4ee3\u5de5\u751f\u4ea7\u7ebf\u3002<\/p>\n

\n\t<\/p>\n

\n\tMEMS\u8bbe\u8ba1\uff0c\u4f5c\u4e3aMEMS\u7684\u6838\u5fc3\u95e8\u69db\u4e4b\u4e00\uff0c\u56e0\u4e3a\u5176fabless\u7684\u8f7b\u8d44\u4ea7\u7279\u6027\uff0c\u53ca\u5176\u6838\u5fc3\u95e8\u69db\uff0c\u56fd\u5185\u516c\u53f8\u6295\u8d44\u8f83\u4e3a\u79ef\u6781\u3002\u56fd\u5185\u6709\u4f17\u591a\u6bd4\u8f83\u77e5\u540d\u7684Fabless\uff0c\u4f8b\u5982\u6d77\u601d<\/u>\u534a\u5bfc\u4f53\u3001\u5c55\u8baf\u3001RDA\u3001\u5168\u5fd7\u79d1\u6280\u3001\u56fd\u6c11\u6280\u672f\u3001\u6f9c\u8d77\u79d1\u6280\u7b49\u7b49\u3002<\/p>\n

\n\tMEMS\u5236\u9020\u76ee\u524d\u4e3b\u8981\u5206\u4e3a\u4e09\u7c7b\uff0c\u7eafMEMS\u4ee3\u5de5\u3001IDM\u4f01\u4e1a\u4ee3\u5de5\u548c\u4f20\u7edf\u96c6\u6210\u7535\u8defMEMS\u4ee3\u5de5\u3002\u4e0e\u5176\u5c06MEMS\u770b\u505a\u4e00\u79cd\u4ea7\u54c1\u5012\u4e0d\u5982\u628a\u5b83\u770b\u6210\u4e00\u79cd\u5de5\u827a\uff0cMEMS\u5668\u4ef6\u4f9d\u8d56\u5404\u79cd\u5de5\u827a\u548c\u8bb8\u591a\u53d8\u91cf\u3002\u53ea\u6709\u7ecf\u8fc7\u591a\u5e74\u7684\u5de5\u827a\u6539\u8fdb\u53ca\u6d4b\u8bd5\uff0cMEMS\u5668\u4ef6\u624d\u80fd\u771f\u6b63\u88ab\u5546\u54c1\u5316\u3002\u7814\u53d1\u56e2\u961f\u4e00\u822c\u9700\u8981\u5927\u91cf\u65f6\u95f4\u6765\u641c\u7d22\u6709\u5173\u5de5\u827a\u53ca\u6750\u6599\u7269\u7406\u7279\u6027\u65b9\u9762\u7684\u8d44\u6599\u3002\u5229\u7528\u5355\u4e00\u4e00\u79cd\u6750\u6599\uff08\u5982\u591a\u6676\u7845\uff09\u5236\u5f97\u7684\u5668\u4ef6\u53ef\u80fd\u9700\u8981\u6839\u636e\u591a\u6676\u7845\u7684\u6765\u6e90\u53ca\u6c89\u79ef\u65b9\u6cd5\u6765\u6807\u8bb0\u5de5\u827a\u4e2d\u7684\u53d8\u5316\u3002\u56e0\u6b64\u6bcf\u4e00\u79cd\u5de5\u827a\u90fd\u9700\u8981\u957f\u671f\u3001\u5927\u91cf\u7684\u6570\u636e\u6765\u7a33\u5b9a\u4e00\u4e2a\u5de5\u827a\u3002<\/p>\n

\n\t\u56fd\u5185MEMS\u4ee3\u5de5\u5382\u534e\u6da6\u4e0a\u534e\u3001\u4e2d\u82af\u56fd\u9645\u3001\u4e0a\u6d77\u5148\u8fdb\u7b49\uff0c\u786c\u4ef6\u6761\u4ef6\u867d\u4e0e\u56fd\u9645\u6c34\u5e73\u76f8\u8fd1\uff0c\u4f46\u5f00\u53d1\u80fd\u529b\u8fdc\u4e0d\u53ca\u6d77\u5916\u4ee3\u5de5\u5382\uff1b\u4e2d\u56fdMEMS\u4ee3\u5de5\u4f01\u4e1a\u8fd8\u672a\u79ef\u7d2f\u8d77\u8db3\u591f\u7684\u5de5\u827a\u6280\u672f\u50a8\u5907\u548c\u5927\u89c4\u6a21\u5e02\u573a\u9a8c\u8bc1\u53cd\u9988\u7684\u7ecf\u9a8c\uff0c\u52a0\u5de5\u5de5\u827a\u7684\u4e00\u81f4\u6027\u3001\u53ef\u91cd\u590d\u6027\u90fd\u4e0d\u80fd\u6ee1\u8db3\u8bbe\u8ba1\u9700\u8981\uff0c\u4ea7\u54c1\u7684\u826f\u7387\u548c\u53ef\u9760\u6027\u4e5f\u65e0\u6cd5\u8fbe\u5230\u89c4\u6a21\u751f\u4ea7\u8981\u6c42\u3002\u56e0\u6b64\u5546\u4e1a\u5316\u9636\u6bb5\u7684\u672c\u571f\u8bbe\u8ba1\u516c\u53f8\u66f4\u613f\u610f\u540cTSMC\u3001X-Fab\u3001Silex\u7b49\u6d77\u5916\u6210\u719f\u4ee3\u5de5\u5382\u5408\u4f5c\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u4e09\u3001MEMS\u4f20\u611f\u5668\u5e02\u573a\u5bb9\u91cf<\/p>\n

\n\t\u6309Yole\u9884\u6d4b\uff0c2017\u5e74MEMS\u4f20\u611f\u5668\u9500\u552e\u989d\u5360\u5168\u90e8\u4f20\u611f\u5668\u5e02\u573a\u768430%\uff0c\u7ea6120\u4ebf\u7f8e\u5143\u30022015-2021\u5e74MEMS\u4f20\u611f\u5668\u5e74\u5747\u589e\u957f\u7387\u7ea6\u4e3a14%\uff0c\u9ad8\u4e8e\u5168\u90e8\u4f20\u611f\u5668\u5e02\u573a12%\u7684\u589e\u957f\u7387\u3002\u5982\u56fe2-3-1\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\tMEMS\u4f20\u611f\u5668\u5728\u65e0\u4eba\u673a\u548c\u673a\u5668\u4eba\u5e94\u7528\u9886\u57df\u4ea7\u54c1\u5212\u5206\u5982\u56fe2-3-2\u6240\u793a\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u56db\u3001\u60ef\u6027\u4f20\u611f\u5668\u9640\u87ba\u4eea\u548c\u52a0\u901f\u5ea6\u8ba1\u53d1\u5c55\u8d8b\u52bf<\/p>\n

\n\t\uff08\u4e00\uff09\u9640\u87ba\u548c\u52a0\u901f\u5ea6\u8ba1\u4ecb\u7ecd<\/p>\n

\n\t1\u3001\u9640\u87ba<\/p>\n

\n\t\u9640\u87ba\u4eea\u662f\u60ef\u6027\u5bfc\u822a\u4e2d\u4e00\u79cd\u91cd\u8981\u4f20\u611f\u5668\uff0c\u80fd\u68c0\u6d4b\u8f7d\u4f53\u76f8\u5bf9\u60ef\u6027\u7a7a\u95f4\u8f6c\u52a8\u89d2\u901f\u5ea6\u6216\u7edd\u5bf9\u89d2\u5ea6\uff0c\u662f\u60ef\u6027\u5bfc\u822a\u4e0e\u5236\u5bfc\u3001\u8fd0\u52a8\u7cfb\u7edf\u7684\u59ff\u6001\u76d1\u6d4b\u4e0e\u7a33\u5b9a\u63a7\u5236\u7684\u6838\u5fc3\u90e8\u4ef6\u3002\u9640\u87ba\u4eea\u7684\u6838\u5fc3\u6280\u672f\u6307\u6807\u662f\u96f6\u504f\u7a33\u5b9a\u6027\uff0c\u6309\u7167\u96f6\u504f\u7a33\u5b9a\u6027\u7684\u5927\u5c0f\uff0c\u9640\u87ba\u4eea\u53ef\u4ee5\u5206\u4e3a\u60ef\u6027\u7ea7\uff08\u5c0f\u4e8e0.01°\/h\uff09\u3001\u6218\u672f\u7ea7\uff080.1~10°\/h\uff09\u548c\u901f\u7387\u7ea7\uff08\u5927\u4e8e10°\/h\uff09\u3002<\/p>\n

\n\t\u6839\u636e\u9640\u87ba\u7684\u5de5\u4f5c\u539f\u7406\uff0c\u53ef\u5c06\u9640\u87ba\u5206\u57fa\u4e8e\u7ecf\u5178\u529b\u5b66\u539f\u7406\u7684\u9640\u87ba\u548c\u57fa\u4e8e\u8fd1\u4ee3\u7269\u7406\u5b66\u539f\u7406\u7684\u9640\u87ba\u3002\u5728\u5de5\u7a0b\u5b9e\u8df5\u4e2d\uff0c\u6839\u636e\u654f\u611f\u8f7d\u4f53\u76f8\u5bf9\u60ef\u6027\u7a7a\u95f4\u7684\u89d2\u901f\u5ea6\u7684\u4ecb\u8d28\u7684\u4e0d\u540c\uff0c\u5c06\u9640\u87ba\u5206\u4e3a\u8f6c\u5b50\u9640\u87ba\u3001\u5149\u5b66\u9640\u87ba\u3001\u78c1\u6d41\u4f53\u9640\u87ba\u3001\u539f\u5b50\u9640\u87ba\u7b49\u3002\u6700\u4e3a\u5e38\u89c1\u7684\u8f6c\u5b50\u9640\u87ba\u5305\u62ec\u6db2\u6d6e\u9640\u87ba\u3001\u52a8\u529b\u8c03\u8c10\u9640\u87ba\u3001\u9759\u7535\u9640\u87ba\u3001\u632f\u52a8\u9640\u87ba\uff0c\u5149\u5b66\u9640\u87ba\u5305\u62ec\u6fc0\u5149\u9640\u87ba\u3001\u5149\u7ea4\u9640\u87ba\uff0c\u5fae\u673a\u68b0\u9640\u87ba\u5305\u62ec\u5df2\u7ecf\u5e94\u7528\u4e8e\u5de5\u7a0b\u5b9e\u9645\u4e2d\u7684MEMS\uff08Micro-Electron-Mechanical-System\uff0c\u7b80\u79f0MEMS\uff09\u9640\u87ba\u548c\u6b63\u5904\u4e8e\u7814\u53d1\u9636\u6bb5\u7684NEMS \uff08Nano-Electro-Mechnical-System\uff0cNEMS\uff09\u9640\u87ba\u3002<\/p>\n

\n\t\u4e0e\u4f20\u7edf\u673a\u68b0\u8f6c\u5b50\u9640\u87ba\u3001\u9759\u7535\u9640\u87ba\u3001\u6fc0\u5149\u9640\u87ba\u548c\u5149\u7ea4\u9640\u87ba\u76f8\u6bd4\uff0c\u57fa\u4e8eMEMS\u6280\u672f\u7684\u9640\u87ba\uff0c\u5177\u6709\u4f53\u79ef\u5c0f\u3001\u6210\u672c\u4f4e\u3001\u529f\u8017\u5c0f\u3001\u53ef\u9760\u6027\u9ad8\u3001\u53ef\u6279\u91cf\u751f\u4ea7\u7684\u7279\u70b9\u3002<\/p>\n

\n\t2\u3001\u52a0\u901f\u5ea6\u8ba1<\/p>\n

\n\t\u52a0\u901f\u5ea6\u8ba1\u662f\u4e00\u79cd\u60ef\u6027\u4f20\u611f\u5668\uff0c\u80fd\u591f\u6d4b\u91cf\u7269\u4f53\u7684\u52a0\u901f\u5ea6\uff0c\u901a\u5e38\u7531\u8d28\u91cf\u5757\u3001\u963b\u5c3c\u5668\u3001\u5f39\u6027\u5143\u4ef6\u3001\u654f\u611f\u5143\u4ef6\u548c\u9002\u8c03\u7535\u8def\u7b49\u90e8\u5206\u7ec4\u6210\u3002\u4f20\u611f\u5668\u5728\u52a0\u901f\u8fc7\u7a0b\u4e2d\uff0c\u901a\u8fc7\u5bf9\u8d28\u91cf\u5757\u6240\u53d7\u60ef\u6027\u529b\u7684\u6d4b\u91cf\uff0c\u5229\u7528\u725b\u987f\u7b2c\u4e8c\u5b9a\u5f8b\u83b7\u5f97\u52a0\u901f\u5ea6\u503c\u3002<\/p>\n

\n\t\u5229\u7528MEMS\u6280\u672f\u8bbe\u8ba1\u7684\u52a0\u901f\u5ea6\u8ba1\u7531\u4e8e\u91c7\u7528\u4e86\u5fae\u673a\u7535\u7cfb\u7edf\u6280\u672f\uff0c\u4f7f\u5f97\u5c3a\u5bf8\u5927\u5927\u7f29\u5c0f\uff0c\u5177\u6709\u4f53\u79ef\u5c0f\u3001\u91cd\u91cf\u8f7b\u3001\u80fd\u8017\u4f4e\u7b49\u4f18\u70b9\u3002<\/p>\n

\n\t\uff08\u4e8c\uff09\u56fd\u5185\u5916\u9640\u87ba\u53d1\u5c55\u8d8b\u52bf<\/p>\n

\n\t\u7f8e\u56fdDraper \u5b9e\u9a8c\u5ba4\u5bf92001\u5e74\u30012005\u5e74\u548c2020\u5e74\u9640\u87ba\u4eea\u7684\u53d1\u5c55\u548c\u5e94\u7528\u8fdb\u884c\u4e86\u5206\u6790\u548c\u9884\u6d4b\uff08\u59822-4-1\u30012-4-2\u30012-4-3\u6240\u793a\uff09\uff0c\u53ef\u4ee5\u770b\u51fa\u5404\u79cd\u9640\u87ba\u4eea\u7684\u53d1\u5c55\u8d8b\u52bf\u3002<\/p>\n

\n\t\u5149\u7ea4\u9640\u87ba\uff08FOG\uff09\u548c\u77f3\u82f1\/\u7845\u5fae\u673a\u7535MEMS\u9640\u87ba\u53d1\u5c55\u8fc5\u901f\u3002<\/p>\n

\n\t2020\u5e74\u77f3\u82f1\/\u7845\u5fae\u673a\u7535MEMS\u9640\u87ba\u5c06\u5360\u9886\u4e2d\u4f4e\u7cbe\u5ea6\u5e94\u7528\u9886\u57df\u3002<\/p>\n

\n\t<\/p>\n

\n\t<\/p>\n

\n\t<\/p>\n

\n\t\uff08\u4e09\uff09\u56fd\u5185\u5916\u52a0\u901f\u5ea6\u8ba1\u53d1\u5c55\u8d8b\u52bf<\/p>\n

\n\t\u7f8e\u56fdDraper\u5b9e\u9a8c\u5ba4\u5bf92001\u5e74\u30012005\u5e74\u548c2020\u5e74\u52a0\u901f\u5ea6\u8ba1\u7684\u53d1\u5c55\u548c\u5e94\u7528\u8fdb\u884c\u4e86\u5206\u6790\u548c\u9884\u6d4b\uff08\u5982\u56fe2-4-4\u30012-4-5\u30012-4-6\u6240\u793a\uff09\uff0c\u4ece\u4e2d\u53ef\u4ee5\u770b\u51fa\u5404\u79cd\u9640\u87ba\u4eea\u7684\u53d1\u5c55\u8d8b\u52bf\u3002<\/p>\n

\n\t\u5fae\u673a\u7535MEMS\u52a0\u901f\u5ea6\u8ba1\u53d1\u5c55\u8fc5\u901f,\uff0c\u5c06\u53d6\u4ee3\u77f3\u82f1\u6320\u6027\u548c\u6db2\u6d6e\u52a0\u901f\u5ea6\u8ba1\u3002<\/p>\n

\n\t\u9ad8\u7cbe\u5ea6\u673a\u7535\u52a0\u901f\u5ea6\u8ba1\u4ecd\u4fdd\u6301\u539f\u6709\u5e94\u7528\u9886\u57df\uff0c\u90e8\u5206\u9886\u57df\u88ab\u5fae\u673a\u7535MEMS\u52a0\u901f\u5ea6\u8ba1\u53d6\u4ee3\u3002<\/p>\n

\n\t<\/p>\n

\n\t<\/p>\n

\n\t<\/p>\n

\n\t\u4e94\u3001\u884c\u4e1a\u7ade\u4e89\u73b0\u72b6<\/p>\n

\n\tMEMS\u6280\u672f\u53d1\u5c55\u4e8e20\u4e16\u7eaa90\u5e74\u4ee3\uff0c\u662f\u5728\u5fae\u7535\u5b50\u5236\u9020\u6280\u672f\u53d1\u5c55\u7684\u57fa\u7840\u4e0a\u968f\u7740\u7cbe\u5bc6\u5fae\u578b\u673a\u68b0\u5236\u9020\u6280\u672f\u7684\u53d1\u5c55\u800c\u6210\u957f\u8d77\u6765\u7684\uff0c\u7ecf\u4e8c\u5341\u591a\u5e74\u7684\u7814\u7a76\u56fd\u5916\u5df2\u7ecf\u6bd4\u8f83\u6210\u719f\uff0c\u4f17\u591a\u79d1\u7814\u5355\u4f4d\u53ca\u516c\u53f8\u5982\u7f8e\u56fdDraper\u5b9e\u9a8c\u5ba4\u3001\u970d\u5c3c\u97e6\u5c14Honeywell\u3001ADI\u516c\u53f8\u3001Berkeley\u5927\u5b66\uff0c\u5fb7\u56fdBosch\u516c\u53f8\uff0c\u632a\u5a01\u7684Sensonor\uff0c\u65e5\u672cToyata\u516c\u53f8\u7b49\u5df2\u7ecf\u6709\u5546\u4e1a\u5316\u4ea7\u54c1\u3002<\/p>\n

\n\t\u6211\u56fd\u5728\u5fae\u9640\u87ba\u9886\u57df\u7684\u7814\u7a76\u8d77\u6b65\u8f83\u665a\uff0c\u7ecf\u8fc7\u8fd1\u4e9b\u5e74\u7684\u52aa\u529b\uff0c\u5173\u952e\u6280\u672f\u7814\u7a76\u6709\u957f\u8db3\u7684\u8fdb\u6b65\uff0c\u6027\u80fd\u6709\u5927\u5e45\u63d0\u9ad8\u3002\u4e0a\u4e16\u7eaa90\u5e74\u4ee3\uff0c\u6700\u65e9\u7684\u7814\u7a76\u5355\u4f4d\u662f\u4e0a\u6d77\u5fae\u7cfb\u7edf\u6240\u3001\u6e05\u534e\u5927\u5b66\u3001\u5317\u4eac\u5927\u5b66\u3001\u4e0a\u6d77\u4ea4\u5927\u7b49\uff0c\u5728\u56fd\u5bb6“\u516b\u4e94”\u3001“\u4e5d\u4e94”\u8ba1\u5212\u671f\u95f4\uff0c\u56fd\u5bb6\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u59d4\u5458\u4f1a\u3001\u79d1\u6280\u90e8\u3001\u6559\u80b2\u90e8\u3001\u4e2d\u79d1\u9662\u3001\u603b\u88c5\u5907\u90e8\u7684\u7ecf\u8d39\u603b\u6295\u5165\u7ea61.5\u4ebf\u5143\u3002“\u5341\u4e94”\u671f\u95f4MEMS\u6b63\u5f0f\u5217\u4e3a863\u8ba1\u5212\u4e2d\u7684\u91cd\u5927\u4e13\u9879\uff0c\u52a0\u4e0a\u6559\u80b2\u90e8\u7684\u6559\u80b2\u632f\u5174\u8ba1\u5212\u3001\u4e2d\u79d1\u9662\u7684\u77e5\u8bc6\u521b\u65b0\u4f53\u7cfb\u3001\u81ea\u7136\u79d1\u5b66\u57fa\u91d1\u4f1a\u548c\u79d1\u6280\u90e8\u7684\u7acb\u9879\u4ee5\u53ca\u5730\u65b9\u653f\u5e9c\u548c\u4f01\u4e1a\u7684\u6295\u5165\uff0c\u9884\u8ba1\u603b\u7ecf\u8d39\u8fbe3\u4ebf\u4ee5\u4e0a\u3002“\u5341\u4e00\u4e94”\u548c“\u5341\u4e8c\u4e94”\u671f\u95f4\u603b\u6295\u8d44\u572820\u4ebf\u4ee5\u4e0a\u3002<\/p>\n

\n\t\u56fd\u5185\u5404\u9ad8\u6821\u3001\u7814\u7a76\u6240\u867d\u7136\u505a\u4e86\u5927\u91cf\u7684\u7814\u7a76\u5de5\u4f5c\uff0c\u4f46\u4e2d\u9ad8\u6027\u80fd\u5fae\u673a\u68b0\u9640\u87ba\u5f88\u5c11\u6709\u5546\u4e1a\u5316\u4ea7\u54c1\u3002\u4e2d\u9ad8\u7aef\u4f20\u611f\u5668\u6280\u672f\u548c\u4ea7\u4e1a\u5316\u76f8\u6bd4\u56fd\u5916\u8fd8\u6709\u660e\u663e\u5dee\u8ddd\u3002\u56fd\u5185MEMS\u4f20\u611f\u5668\u516c\u53f8\u6709\u7f8e\u65b0\u534a\u5bfc\u4f53\u3001\u660e\u769c\u4f20\u611f\u3001\u77fd\u777f\u79d1\u6280\u3001\u6df1\u8fea\u534a\u5bfc\u4f53\u3001\u654f\u82af\u5fae\u7535\u5b50\u7b49\u3002\u4f46\u662f\u56fd\u5185MEMS\u516c\u53f8\u5728\u8425\u4e1a\u89c4\u6a21\u3001\u6280\u672f\u6c34\u5e73\u3001\u4ea7\u54c1\u7ed3\u6784\u3001\u4e0e\u56fd\u5916\u6709\u660e\u663e\u5dee\u8ddd\uff0c60%-70%\u7684\u8bbe\u8ba1\u4ea7\u54c1\u96c6\u4e2d\u5728\u52a0\u901f\u5ea6\u8ba1\u3001\u538b\u529b\u4f20\u611f\u5668\u7b49\u4f20\u7edf\u9886\u57df\u3002\u56fd\u5185MEMS\u4f01\u4e1a\u89c4\u6a21\u8fd8\u76f8\u5bf9\u8f83\u5c0f\uff0c\u5355\u4e2a\u4f01\u4e1a\u8f83\u5c11\u6709\u5e74\u9500\u552e\u989d\u8d85\u8fc71\u4ebf\u7f8e\u91d1\u3002\u300a\u4e2d\u56fd\u4f20\u611f\u5668\u4ea7\u4e1a\u53d1\u5c55\u767d\u76ae\u4e66\uff082014\uff09\u300b\u663e\u793a\u4e2d\u56fd\u4e2d\u9ad8\u7aef\u4f20\u611f\u5668\u7684\u8fdb\u53e3\u6bd4\u4f8b\u8fbe80%\uff0c\u4f20\u611f\u5668\u82af\u7247\u7684\u8fdb\u53e3\u6bd4\u4f8b\u66f4\u9ad8\u8fbe90%\uff0c\u51f8\u663e\u4e86\u672c\u571f\u4e2d\u9ad8\u7aef\u4f20\u611f\u5668\u6280\u672f\u548c\u4ea7\u4e1a\u5316\u7684\u843d\u540e\u3002<\/p>\n

\n\t\uff08\u4e00\uff09\u56fd\u9645\u4e3b\u8981\u516c\u53f8<\/p>\n

\n\t\uff08a\uff09\u7f8e\u56fdHoneywell<\/p>\n

\n\t\u970d\u5c3c\u97e6\u5c14\u662f\u4e00\u5bb6\u56fd\u9645\u6027\u4ece\u4e8b\u81ea\u63a7\u4ea7\u54c1\u5f00\u53d1\u53ca\u751f\u4ea7\u7684\u516c\u53f8\uff0c\u516c\u53f8\u6210\u7acb\u4e8e1885\u5e74\u3002\u662f\u4e00\u5bb6\u9500\u552e\u989d\u4e3a333.7\u4ebf\u7f8e\u5143(2011\u5e74\u5ea6)\uff0c500\u5f3a\u6392\u540d280\u4f4d\u30021954\u5e74\uff0c\u8be5\u516c\u53f8\u6536\u8d2ddoelcam\u516c\u53f8\uff0c\u4e00\u4e2a\u9640\u87ba\u4eea\u7684\u5236\u9020\u5546\u3002\u516c\u53f8\u4e0d\u65ad\u6539\u5584\u9640\u87ba\u4eea\uff0c\u4f7f\u4e4b\u66f4\u654f\u611f\u548c\u51c6\u786e\uff0c\u540c\u65f6\u964d\u4f4e\u5b83\u4eec\u7684\u5927\u5c0f\u548c\u91cd\u91cf\u3002<\/p>\n

\n\tHoneywell\u9ad8\u6027\u80fd\u60ef\u6027\u6d4b\u91cf\u5355\u5143\uff08IMU\uff09HG1900\u3001HG1930\u7b49\u7ec4\u4ef6\u4e2d\u5747\u4f7f\u7528\u4e86MEMS\u9640\u87ba\uff0c\u5df2\u88ab\u7f8e\u56fd\u56fd\u9632\u90e8\u548c\u56fd\u9645\u519b\u961f\u6210\u529f\u90e8\u7f72\u5728\u5404\u79cd\u6b66\u5668\uff0c\u65e0\u4eba\u673a\uff0c\u5e73\u53f0\u7a33\u5b9a\u5e94\u7528\u4ee5\u53ca\u5546\u4e1a\u5e94\u7528\u4e2d\u3002<\/p>\n

\n\t\u76ee\u524dHoneywell\u5728MEMS\u9640\u87ba\u7814\u5236\u5f00\u53d1\u9886\u57df\u662f\u4e16\u754c\u4e0a\u6700\u9ad8\u6c34\u5e73\u4e4b\u4e00\u3002<\/p>\n

\n\t\uff08b\uff09\u632a\u5a01Sensonor\u516c\u53f8<\/p>\n

\n\tSensonor\u516c\u53f81985\u5e74\u6210\u7acb\u4e8e\u632a\u5a01\u970d\u5c14\u6ed5\uff0c\u662f\u4e16\u754c\u9886\u5148\u7684\u5c0f\u578b\u5316\u3001\u9ad8\u6027\u80fdMEMS\u9640\u87ba\u4eea\u548cIMU\u7684\u751f\u4ea7\u5546\uff0c\u5176\u4ea7\u54c1\u4f5c\u4e3a\u5bfc\u822a\u3001\u5236\u5bfc\u548c\u7a33\u5b9a\u5e73\u53f0\u7684\u6838\u5fc3\u90e8\u4ef6\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5de5\u4e1a\u81ea\u52a8\u5316\u548c\u822a\u7a7a\u822a\u5929\u7b49\u9886\u57df\u3002<\/p>\n

\n\t2003\u5e74\u88ab\u82f1\u98de\u51cc<\/u>\u79d1\u6280\u6536\u8d2d\u30022009\u5e74\uff0c\u82f1\u98de\u51ccMBO\u5206\u62c6Sensonor\u516c\u53f8\uff0c\u7ee7\u7eed\u4e13\u6ce8\u4e8e\u57fa\u4e8eMEMS\u7684\u4f20\u611f\u5668\uff0c\u4e3b\u8981\u5173\u6ce8\u9ad8\u7cbe\u5ea6\u4f20\u611f\u5668\u7684\u5e94\u7528\u548c\u5e02\u573a\uff0c\u7279\u522b\u662f\u60ef\u6027\uff08\u9640\u87ba\u4eea\u548cIMU\uff09\u3002\u4ece2012\u5e74\u8d77\uff0cSensonor\u4e00\u76f4\u7531\u745e\u58eb\u6295\u8d44\u96c6\u56e2\u6240\u6709\u3002<\/p>\n

\n\t\u516c\u53f8\u76ee\u524d\u4e3b\u8981\u4ea7\u54c1\u662f\u9640\u87ba\u6a21\u5757STIM202\u548cSTIM210\uff0c\u4ee5\u53ca\u60ef\u6027\u6d4b\u91cf\u5355\u5143STIM300\u3002<\/p>\n

\n\t\uff08c\uff09\u7f8e\u56fdADI\u516c\u53f8<\/p>\n

\n\tADI\u516c\u53f81965\u5e74\u6210\u7acb\u4e8e\u7f8e\u56fd\u9a6c\u8428\u8bf8\u585e\u5dde\u8bfa\u4f0d\u5fb7\u5e02\uff0c\u662f\u9ad8\u6027\u80fd\u6a21\u62df\u3001\u6df7\u5408\u4fe1\u53f7\u548c\u6570\u5b57\u4fe1\u53f7\u5904\u7406\u96c6\u6210\u7535\u8def\u8bbe\u8ba1\u3001\u5236\u9020\u548c\u8425\u9500\u65b9\u9762\u4e16\u754c\u9886\u5148\u7684\u4f01\u4e1a\uff0c\u4ea7\u54c1\u6d89\u53ca\u51e0\u4e4e\u6240\u6709\u7c7b\u578b\u7684\u7535\u5b50\u7535\u5668\u8bbe\u5907\u3002<\/p>\n

\n\tADI\u516c\u53f8\u9640\u87ba\u4ea7\u54c1\u4e3b\u8981\u6709\uff1a\u5546\u4e1a\u7ea7\u7684\u52a0\u901f\u5ea6\u8ba1ADXL3XX\uff08\u666e\u901a\u98de\u884c\u5668\uff09\uff1b\u5de5\u4e1a\u7ea7\u9640\u87ba\u4eeaADXRS<\/u>6XX\u7cfb\u5217\u3001\u5de5\u4e1a\u7ea7\u52a0\u901f\u5ea6\u8ba1ADXL2XX\u7cfb\u5217\uff08\u5e94\u7528\u4e8e\u4e13\u4e1a\u7ea7\u7684\u7a7a\u62cd\uff09\uff1b\u6218\u672f\u7ea7ADIS1613X\u7cfb\u5217\u4ea7\u54c1\uff0c\u4e3b\u8981\u6709\u6218\u672f\u7ea7ADIS16135\u3001ADIS16137\u3002<\/p>\n

\n\t\uff08d\uff09\u745e\u58ebColibrys\u516c\u53f8<\/p>\n

\n\tColibrys\u662f\u4e16\u754c\u9886\u5148\u7684\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u5236\u9020\u5546, \u5177\u6709\u5b8c\u5907\u7684MEMS\u4ea7\u54c1\u8bbe\u8ba1\u3001\u7814\u7a76\u5f00\u53d1\u3001\u82af\u7247\u751f\u4ea7\u3001\u5c01\u88c5\u548c\u6df7\u5408\u673a\u7535\u5143\u4ef6\u6d4b\u8bd5\u6280\u672f\u3002\u5176\u81ea\u884c\u7814\u53d1\u5e76\u5728\u745e\u58eb\u751f\u4ea7\u7684\u9ad8\u7cbe\u5ea6MEMS\u7535\u5bb9\u5f0f\u52a0\u901f\u5ea6\u4f20\u611f\u5668 \u4e3b\u8981\u9488\u5bf9\u6076\u52a3\u73af\u5883\u4e2d\u7684\u5e94\u7528\uff0c\u7279\u522b\u5e7f\u6cdb\u5730\u7528\u4e8e\u4e09\u4e2a\u65b9\u9762\uff1a\u519b\u4e8b\u548c\u822a\u5929\u822a\u7a7a\uff0c\u80fd\u6e90\uff0c\u5de5\u4e1a\u5e02\u573a\u3002<\/p>\n

\n\t\uff08\u4e8c\uff09\u56fd\u6709\u79d1\u7814\u673a\u6784\u516c\u53f8<\/p>\n

\n\t\uff08a\uff09\u4e2d\u7535\u79d1\u5341\u4e09\u6240\u7f8e\u6cf0\u516c\u53f8<\/p>\n

\n\t\u7f8e\u6cf0\u7535\u5b50\u79d1\u6280\u6709\u9650\u516c\u53f8\u662f\u4e2d\u56fd\u7535\u5b50\u79d1\u6280\u96c6\u56e2\u516c\u53f8\uff08CETC\uff09\u7b2c\u5341\u4e09\u7814\u7a76\u6240\u63a7\u80a1\u7684\u6709\u9650\u8d23\u4efb\u516c\u53f8\uff0c\u4f4d\u4e8e\u77f3\u5bb6\u5e84\uff0c\u524d\u8eab\u662f13\u6240\u7b2c\u5341\u516b\u4e13\u4e1a\u90e8\u3002\u81f4\u529b\u4e8eMEMS\u5668\u4ef6\u4e0e\u7cfb\u7edf\u7684\u7814\u53d1\u3001\u751f\u4ea7\u548c\u9500\u552e\u3002\u56fd\u5bb6\u6295\u8d44\u8fd15\u4ebf\u5143\u5efa\u8bbeMEMS\u751f\u4ea7\u7ebf\u3002\u4e3b\u8981\u4ea7\u54c1\u6709MEMS\u60ef\u6027\u5668\u4ef6\u4e0e\u7cfb\u7edf\u3001MEMS\u6d4b\u8bd5\u6d4b\u91cf\u4f20\u611f\u5668\u3001MEMS\u9065\u6d4b\u4f20\u611f\u5668\u3001\u5c04\u9891\uff08RF\uff09MEMS\u5668\u4ef6\u3001MEMS\u6c7d\u8f66\u4f20\u611f\u5668\u7b49\u3002<\/p>\n

\n\t\uff08b\uff09\u5317\u4eac\u5927\u5b66<\/p>\n

\n\t\u5317\u4eac\u5927\u5b66\u5fae\u7535\u5b50\u7814\u7a76\u9662\u5fae\u673a\u7535\u7cfb\u7edf\u7814\u7a76\u6240\u6210\u7acb\u4e8e1995\u5e74\uff0c\u5728\u738b\u9633\u5143\u9662\u58eb\u548c\u6b66\u56fd\u82f1\u6559\u6388\u9886\u5bfc\u4e0b\uff0c\u4ece\u7845\u57fa\u52a0\u5de5\u6280\u672f\u7684\u89d2\u5ea6\u6765\u5f00\u5c55\u5fae\u673a\u7535\u7cfb\u7edf\u7684\u7814\u7a76\u3002\u4ece1996\u5e74\u5f00\u59cb\u627f\u62c5\u4e86"\u5fae\u7c73\/\u7eb3\u7c73\u52a0\u5de5\u6280\u672f\u56fd\u5bb6\u91cd\u70b9\u5b9e\u9a8c\u5ba4"\u5efa\u8bbe\u9879\u76ee\uff0c\u4ee5\u7845\u57faMEMS\u52a0\u5de5\u548c\u8bbe\u8ba1\u6280\u672f\u4e3a\u4e3b\uff0c\u540c\u65f6\u627f\u62c5\u591a\u9879ME MS\u7814\u7a76\u8bfe\u9898\u3002\u4e8e1998\u5e744\u6708\u5b8c\u6210\u5b9e\u9a8c\u5ba4\u5efa\u8bbe\u9879\u76ee\u9a8c\u6536\uff0c\u6709\u5de5\u827a\u5b9e\u9a8c\u5ba4900\u5e73\u7c73\u548c\u5177\u6709\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u7684\u5b8c\u5584\u7684 MEMS \u52a0\u5de5\u8bbe\u5907\uff0c\u662f\u56fd\u5bb6\u5fae\u673a\u7535\u7cfb\u7edf\u7814\u7a76\u7684\u91cd\u8981\u52a0\u5de5\u57fa\u5730\u548c\u7814\u7a76\u57fa\u5730\u3002<\/p>\n

\n\t\uff08c\uff09\u6e05\u534e\u5927\u5b66<\/p>\n

\n\t\u6e05\u534e\u5927\u5b66\u7cbe\u5bc6\u4eea\u5668\u4e0e\u673a\u68b0\u5b66\u7cfb\u5fae\u7535\u5b50\u6280\u672f\u7814\u7a76\u6240\uff0c\u4e3b\u8981\u7814\u7a76\u5404\u79cd\u65b0\u578b\u5fae\u7eb3\u5668\u4ef6\u4ee5\u53ca\u7531\u5b83\u4eec\u6784\u6210\u7684\u7cfb\u7edf\uff0c\u7814\u7a76\u8303\u56f4\u662f\uff1a \u65b0\u5668\u4ef6\u4e0e\u7cfb\u7edf\u3001\u65b0\u6280\u672f\u4e0e\u5de5\u827a\u3001\u65b0\u7535\u8def\u4e0e\u6a21\u578b\u3001\u65b0\u6750\u6599\u4e0e\u7ed3\u6784\u3001\u65b0\u6982\u5ff5\u4e0e\u539f\u7406\u3002\u76ee\u524d\u6709\u4e24\u4e2a\u4e3b\u8981\u7814\u7a76\u65b9\u5411\uff1a\u65b0\u578b\u5fae\u7535\u5b50\u5668\u4ef6\u4e0e\u7cfb\u7edf\uff0c\u7eb3\u7535\u5b50\u5b66\u3002\u4eea\u5668\u79d1\u5b66\u4e0e\u6280\u672f\u7814\u7a76\u6240\u56f4\u7ed5\u73b0\u4ee3\u79d1\u5b66\u4eea\u5668\u7684\u7814\u7a76\u9886\u57df\uff0c \u4e3b\u8981\u7814\u7a76\u65b9\u5411\u5305\u62ec\u5fae\u7c73\u7eb3\u7c73\u6280\u672f\u3001\u5149\u5b58\u50a8\u6280\u672f\u3001\u7cbe\u5bc6\u4eea\u5668\u548c\u6d4b\u8bd5\u6280\u672f\u3001\u5bfc\u822a\u4e0e\u63a7\u5236\u6280\u672f\u3001\u4f20\u611f\u6280\u672f\u4e0e\u667a\u80fd\u4eea\u5668\u3001\u667a\u80fd\u5fae\u7cfb\u7edf\u53ca\u63a7 \u5236\u6280\u672f\u548c\u751f\u547d\u79d1\u5b66\u4eea\u5668\u7b49\uff0c\u662f\u4e00\u4e2a\u591a\u5b66\u79d1\u4ea4\u53c9\u7684\u4e0e\u6821\u5916\u4f01\u4e1a\u548c\u7814\u7a76\u5355\u4f4d\u6709\u5e7f\u6cdb\u8054\u7cfb\u7684\u4ee5\u4e00\u7ea7\u5b66\u79d1\u5efa\u7acb\u8d77\u6765\u7684\u6559\u5b66\u7814\u7a76\u5355\u4f4d\u3002<\/p>\n

\n\t\uff08\u4e09\uff09\u6c11\u8425\u516c\u53f8<\/p>\n

\n\t\uff08a\uff09\u6df1\u8fea\u534a\u5bfc\u4f53<\/p>\n

\n\t\u6df1\u8fea\u534a\u5bfc\u4f53\uff08\u4e0a\u6d77\uff09\u6709\u9650\u516c\u53f8\u662f\u7531\u7f8e\u56fd\u6d77\u5916\u7559\u5b66\u4eba\u5458\u521b\u7acb\u7684\u4e2d\u56fd\u8bbe\u8ba1\u3001\u751f\u4ea7\u5546\u7528MEMS\u9640\u87ba\u4eea\u7cfb\u5217\u60ef\u6027\u4f20\u611f\u5668\u7684MEMS\u82af\u7247\u516c\u53f8\uff0c\u6210\u7acb\u4e8e2008\u5e748\u6708\uff0c\u603b\u90e8\u4f4d\u4e8e\u4e0a\u6d77\u5f20\u6c5f\u9ad8\u79d1\u6280\u56ed\u533a\u3002\u516c\u53f8\u7814\u53d1\u4e86\u62e5\u6709\u5b8c\u5168\u81ea\u4e3b\u77e5\u8bc6\u4ea7\u6743\u7684\u5148\u8fdb\u7684MEMS\u5de5\u827a\u548c\u96c6\u6210\u6280\u672f\uff0c\u4e13\u6ce8\u4e8e\u4e3a\u6d88\u8d39\u7535\u5b50\u53ca\u6c7d\u8f66\u7535\u5b50\u5e02\u573a\u8bbe\u8ba1\u548c\u751f\u4ea7\u4f4e\u6210\u672c\u3001\u9ad8\u6027\u4ef7\u6bd4\u3001\u4f4e\u529f\u8017\u3001\u5c0f\u5c3a\u5bf8\u7684\u5546\u7528MEMS\u9640\u87ba\u4eea\u82af\u7247\uff0c\u5e76\u4e3a\u5ba2\u6237\u63d0\u4f9b\u5404\u79cd\u5168\u9762\u7684\u5e94\u7528\u89e3\u51b3\u65b9\u6848\u548c\u6781\u5176\u4f18\u8d28\u7684\u670d\u52a1\u3002<\/p>\n

\n\t\uff08b\uff09\u82cf\u5dde\u660e\u769c<\/p>\n

\n\t\u82cf\u5dde\u660e\u769c\u4f20\u611f\u4e3b\u8981\u4ece\u4e8bMEMS\u4f20\u611f\u5668\u7684\u7814\u53d1\u3001\u8bbe\u8ba1\u548c\u751f\u4ea7\uff0c\u5e76\u63d0\u4f9b\u76f8\u5173\u6280\u672f\u670d\u52a1\u3002\u4e3b\u8981\u4ea7\u54c1\u6709\uff1a\u52a0\u901f\u5ea6\u4f20\u611f\u5668\u3001\u9640\u87ba\u4eea\u3001\u538b\u529b\u4f20\u611f\u5668\u548c\u78c1\u4f20\u611f\u5668\uff0c\u65e8\u5728\u4e3a\u6d88\u8d39\u7535\u5b50\u3001\u6c7d\u8f66\u7535\u5b50\u3001\u5de5\u4e1a\u81ea\u52a8\u5316\u4ee5\u53ca\u822a\u7a7a\u7b49\u9886\u57df\u63d0\u4f9b\u6240\u9700\u7684\u4ea7\u54c1\u548c\u96c6\u6210\u65b9\u6848\u3002<\/p>\n

\n\t\u660e\u769c\u4f20\u611f\u7531\u6d77\u5185\u5916\u77e5\u540d\u7ba1\u7406\u548c\u6280\u672f\u56e2\u961f\u4e0e\u82cf\u5dde\u56fa\u951d\u7535\u5b50\u80a1\u4efd\u6709\u9650\u516c\u53f8\u5171\u540c\u6295\u8d44\u521b\u5efa\u3002\u56e2\u961f\u5206\u5e03\u5728\u82cf\u5dde\u3001\u7f8e\u56fd\u7845\u8c37\u53ca\u53f0\u6e7e\u65b0\u7af9\uff1b\u56e2\u961f\u6210\u5458\u6267\u4e1a\u4e8e\u534a\u5bfc\u4f53\u3001MEMS\u4e1a\u754c\u6570\u5341\u5e74\uff0c\u5728\u4ea7\u54c1\u8bbe\u8ba1\u4e0e\u7814\u53d1\u3001\u7cfb\u7edf\u96c6\u6210\u4e0e\u5e94\u7528\u3001\u5c01\u88c5\u6d4b\u8bd5\u53ca\u751f\u4ea7\u8425\u8fd0\u53ca\u5e02\u573a\u63a8\u5e7f\u7b49\u65b9\u9762\u5177\u6709\u4e30\u5bcc\u7684\u7ecf\u9a8c\u3002<\/p>\n

\n\t\uff08c\uff09\u82cf\u5dde\u5723\u8d5b\u8bfa\u5c14<\/p>\n

\n\t\u82cf\u5dde\u5723\u8d5b\u8bfa\u5c14\u4f20\u611f\u5668\u6280\u672f\u6709\u9650\u516c\u53f8\u662f\u6606\u5c71\u5723\u8d5b\u8bfa\u5c14\u4f20\u611f\u6280\u672f\u6709\u9650\u516c\u53f8\u4e0e\u632a\u5a01Sensonor\u516c\u53f8\u5728\u56fd\u5185\u8bbe\u7acb\u7684\u552f\u4e00\u5408\u8d44\u4f01\u4e1a\uff0c\u7814\u53d1\u3001\u5236\u9020\u53ca\u9500\u552e\u4e0e\u632a\u5a01Sensonor\u516c\u53f8\u540c\u54c1\u8d28\u7684\u9ad8\u7cbe\u5ea6\u5fae\u673a\u7535\u9640\u87ba\u4eea\u4ea7\u54c1\u3002<\/p>\n

\n\t\u7b2c\u4e09\u8282<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u6295\u8d44\u7b56\u7565\u4e0e\u98ce\u9669\u5206\u6790<\/p>\n

\n\t\u4e00\u3001MEMS\u60ef\u6027\u4f20\u611f\u5668\u6295\u8d44\u7b56\u7565<\/p>\n

\n\t\uff08\u4e00\uff09\u4e2d\u9ad8\u7aefMEMS\u60ef\u6027\u4f20\u611f\u5668\u5e02\u573a\u9700\u6c42\u8feb\u5207\uff0c\u4f4e\u7aef\u5e02\u573a\u7ade\u4e89\u6fc0\u70c8<\/p>\n

\n\t\u5728\u4e2d\u9ad8\u7aefMEMS\u60ef\u6027\u4f20\u611f\u5668\u5e02\u573a\uff0c\u7531\u4e8e\u56fd\u5185\u6280\u672f\u53d1\u5c55\u8f83\u665a\uff0c\u56fd\u5185\u5f88\u591a\u7528\u6237\u4f7f\u7528\u7684\u662f\u897f\u65b9\u56fd\u5bb6\u4e0d\u9650\u5236\u8fdb\u53e3\u7684\u9ad8\u6027\u80fdMEMS\u60ef\u6027\u4f20\u611f\u5668\u4e2d\u76f8\u5bf9\u4f4e\u7aef\u7684\u4ea7\u54c1\uff0c\u5982Colibrys\u7684\u52a0\u901f\u5ea6\u8ba1\u3001Sensonor\u7684\u9640\u87ba\u4eea\u7b49\uff0c\u751a\u81f3\u4f7f\u7528\u4e2d\u6863\u6027\u80fd\u7684\u5de5\u4e1a\u7ea7\u4ea7\u54c1\uff0c\u5982ADI\u7684\u9640\u87ba\u4eea\u7b49\u3002\u4e2d\u9ad8\u7aef\u5e02\u573a\u7528\u6237\u9700\u6c42\u8feb\u5207\u3002<\/p>\n

\n\t\u800c\u4e2d\u4f4e\u7aef\u5e02\u573a\uff0c\u7531\u4e8e\u7ade\u4e89\u8005\u4f17\u591a\uff0c\u4ea7\u54c1\u7684\u552e\u4ef7\u4e0d\u65ad\u4e0b\u964d\uff0c\u6bdb\u5229\u6da6\u4e0d\u65ad\u4e0b\u964d\u3002<\/p>\n

\n\t\uff08\u4e8c\uff09\u638c\u63e1\u5168\u90e8\u6838\u5fc3\u8bbe\u8ba1\u6280\u672f\u7684\u4f01\u4e1a\u662f\u6295\u8d44\u7684\u5173\u952e<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u4e0d\u540c\u4e8e\u4f20\u7edf\u96c6\u6210\u7535\u8def\u8bbe\u8ba1\u578b\u4f01\u4e1a\uff0c\u4e0d\u4ec5\u8981\u6c42\u5177\u5907ASIC\u8bbe\u8ba1\u80fd\u529b\uff0c\u540c\u6837\u8981\u6c42\u5177\u5907MEMS\u8bbe\u8ba1\u80fd\u529b\uff0cASIC\u548cMEMS\u76f8\u4e92\u7d27\u5bc6\u7ed3\u5408\uff0c\u5171\u540c\u51b3\u5b9aMEMS\u60ef\u6027\u4f20\u611f\u5668\u7684\u6700\u7ec8\u6027\u80fd\u3002\u56e0\u6b64\uff0c\u638c\u63e1\u5168\u90e8\u6838\u5fc3\u8bbe\u8ba1\u6280\u672f\u7684\u4f01\u4e1a\u5c24\u4e3a\u91cd\u8981\u3002<\/p>\n

\n\t\uff08\u4e09\uff09\u638c\u63e1\u751f\u4ea7\u7ebf\u5de5\u827a\u662f\u4f01\u4e1a\u7684\u6cd5\u5b9d<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u4e0d\u540c\u4e8e\u4f20\u7edf\u96c6\u6210\u7535\u8def\u8bbe\u8ba1\u578b\u4f01\u4e1a\uff0c\u4e00\u79cd\u4ea7\u54c1\u5f80\u5f80\u662f\u4e00\u79cd\u5de5\u827a\uff0c\u65b0\u5de5\u827a\u5728 MEMS fab\u5382\u8c03\u8bd5\u7684\u5468\u671f3-6\u4e2a\u6708\uff0c\u7a33\u5b9a\u3001\u6613\u751f\u4ea7\u7684\u5de5\u827a\u662f\u4fdd\u8bc1\u9ad8\u826f\u54c1\u7387\u7684\u5173\u952e\u3002\u56e0\u6b64\uff0c\u5177\u6709MEMS fab\u5de5\u5382\uff0c\u6216\u8005\u5177\u6709\u719f\u6089MEMS\u5de5\u827a\u7684\u4f01\u4e1a\u7ade\u4e89\u4f18\u52bf\u660e\u663e\u3002<\/p>\n

\n\t\uff08\u56db\uff09\u5177\u5907\u5927\u6279\u91cf\u4f9b\u8d27\u80fd\u529b\u662f\u4f01\u4e1a\u662f\u6295\u8d44\u7684\u5173\u952e<\/p>\n

\n\tfab\u5382\u751f\u4ea7\u7684MEMS\u548cASIC\u5c01\u88c5\u540e\u7684\u4ea7\u54c1\uff0c\u9700\u8981\u5386\u7ecf\u7b5b\u9009\u8bd5\u9a8c\u4ea4\u4ed8\u6700\u7ec8\u5ba2\u6237\uff0c\u82e5\u6700\u7ec8\u5408\u683c\u4ea7\u54c1\u4f4e\uff0c\u52bf\u5fc5\u5f71\u54cd\u5927\u6279\u91cf\u4f9b\u8d27\u80fd\u529b\uff0c\u5927\u6279\u91cf\u4f9b\u8d27\u80fd\u529b\u662f\u4e00\u4e2a\u4f01\u4e1a\u5728\u8bbe\u8ba1\u3001\u5de5\u827a\u3001\u8bd5\u9a8c\u7b49\u65b9\u9762\u80fd\u529b\u7684\u96c6\u4e2d\u4f53\u73b0\uff0c\u4e5f\u662f\u6295\u8d44\u7684\u6700\u91cd\u8981\u5224\u65ad\u6307\u6807\u3002<\/p>\n

\n\t\uff08\u4e94\uff09\u5c5e\u4e8e\u6280\u672f\u548c\u8d44\u91d1\u5bc6\u96c6\u578b\u884c\u4e1a\uff0c\u547c\u5401\u56fd\u5bb6\u5927\u57fa\u91d1\u6295\u5165<\/p>\n

\n\tMEMS\u60ef\u6027\u4f20\u611f\u5668\u662f\u5c5e\u4e8e\u5178\u578b\u7684\u6280\u672f\u548c\u8d44\u91d1\u5bc6\u96c6\u578b\u884c\u4e1a\uff0c\u56fd\u5185\u5efa\u8bbe\u4e86\u4e00\u4e9bMEMS fab\u5382\uff0c\u4f46\u662f\u6c34\u5e73\u8ddd\u79bb\u56fd\u5916\u5927\u5382\u4ecd\u6709\u8f83\u5927\u5dee\u8ddd\uff0cfab\u5382\u4eba\u5458\u6c34\u5e73\u548c\u751f\u4ea7\u719f\u6089\u7a0b\u5ea6\u9700\u8981\u5927\u5e45\u5ea6\u63d0\u9ad8\u3002\u547c\u5401\u56fd\u5bb6\u5927\u57fa\u91d1\u52a0\u5927\u5728MEMS\u8bbe\u8ba1\u3001\u5de5\u827a\u65b9\u9762\u7684\u6295\u5165\u3002<\/p>\n

\n\t\u4e8c\u3001MEMS\u60ef\u6027\u4f20\u611f\u5668\u6295\u8d44\u98ce\u9669\u5206\u6790<\/p>\n

\n\t\uff08\u4e00\uff09\u56fd\u5185MEMS\u4f20\u611f\u5668\u884c\u4e1a\u5904\u4e8e\u8d77\u6b65\u9636\u6bb5\uff0c\u4ea7\u4e1a\u94fe\u4ecd\u4e0d\u5b8c\u5584<\/p>\n

\n\t\u4e2d\u56fd\u7684MEMS\u4f20\u611f\u5668\u884c\u4e1a\uff0c\u771f\u6b63\u4ea7\u4e1a\u5316\u7684\u53d1\u5c55\u5386\u53f2\u8fd8\u4e0d\u523010\u5e74\uff0c\u5728\u6574\u4f53\u6280\u672f\u6c34\u5e73\u4e0a\u4ecd\u843d\u540e\u4e8eHoneywell\u3001\u535a\u4e16<\/u>\u3001\u82f1\u98de\u51cc\u7b49\u4ee3\u8868\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u7684\u5927\u516c\u53f8\uff0c\u76ee\u524d\u56fd\u5185MEMS\u4f20\u611f\u5668\u884c\u4e1a\u5904\u4e8e\u8d77\u6b65\u9636\u6bb5\uff0c\u4ea7\u4e1a\u94fe\u4ecd\u4e0d\u5b8c\u5584\u3002<\/p>\n

\n\t\u4e0e\u96c6\u6210\u7535\u8def\u884c\u4e1a\u9ad8\u5ea6\u6807\u51c6\u5316\u7684CMOS\uff08Complementary Metal Oxide Semiconductor\uff0c\u4e92\u8865\u91d1\u5c5e\u6c27\u5316\u7269\u534a\u5bfc\u4f53\uff09\u5236\u9020\u5de5\u827a\u4e0d\u540c\uff0cMEMS\u4f20\u611f\u5668\u5177\u6709\u4e00\u6761\u9ec4\u91d1\u5b9a\u5f8b\uff0c\u5c31\u662f“\u4e00\u7c7b\u4ea7\u54c1\u7ebf\uff0c\u4e00\u79cd\u5236\u9020\u5de5\u827a”\uff0c\u505a\u773c\u775b\u7684\u5de5\u827a\u5f88\u96be\u7528\u6765\u505a\u9f3b\u5b50\uff0c\u505a\u9f3b\u5b50\u7684\u5de5\u827a\u5f88\u96be\u6765\u505a\u8033\u6735\uff0c\u968f\u7740\u56fd\u5185\u9ad8\u7aefMEMS\u4f20\u611f\u5668\u4ea7\u54c1\u7684\u8fdb\u4e00\u6b65\u53d1\u5c55\uff0c\u56fd\u5185MEMS\u4e13\u4e1a\u4ee3\u5de5\u5382\u7684\u5236\u9020\u3001\u5c01\u88c5\u548c\u6d4b\u8bd5\u5de5\u827a\u8d76\u4e0a\u56fd\u9645\u4e3b\u6d41\u6c34\u5e73\u4ecd\u9700\u8981\u65f6\u65e5\u3002<\/p>\n

\n\t\uff08\u4e8c\uff09\u5e02\u573a\u7ade\u4e89\uff0c\u5229\u6da6\u4e0b\u964d\u98ce\u9669<\/p>\n

\n\t\u8fc7\u53bb\u4e94\u5e74\u4e2d\uff0cMEMS\u4ea7\u4e1a\u4e3b\u8981\u7531\u6d88\u8d39\u7c7b\u7535\u5b50\u9a71\u52a8\u53d1\u5c55\uff0cMEMS\u5668\u4ef6\u51fa\u8d27\u91cf\u4e0d\u65ad\u6500\u5347\u3002\u4f46\u540c\u65f6MEMS\u5668\u4ef6\u5c3a\u5bf8\u4e5f\u4e0d\u65ad\u51cf\u5c0f\uff0c\u4ef7\u683c\u4e0d\u505c\u5728\u4e0b\u8dcc\uff0c\u5229\u6da6\u9010\u6e10\u840e\u7f29\uff0c\u4f7f\u5f97MEMS\u4f01\u4e1a\u7684\u65e5\u5b50\u8d8a\u6765\u8d8a\u8270\u96be\u3002<\/p>\n

\n\t\u5f00\u62d3\u84dd\u6d77\u5e02\u573a\u3001\u4ea7\u54c1\u5dee\u5f02\u5316\uff08\u6bd4\u5982\u4e30\u5bcc\u4ea7\u54c1\u529f\u80fd\uff09\u53ef\u964d\u4f4e\u5229\u6da6\u4e0b\u964d\u98ce\u9669\u3002\u65e0\u4eba\u673a\u548c\u865a\u62df\u73b0\u5b9e\u8bbe\u5907\u6709\u671b\u6210\u4e3aMEMS\u4f20\u611f\u5668\u5e94\u7528\u65b0\u84dd\u6d77\uff0c\u4f17\u591a\u5382\u5546\u63a8\u51fa\u516d\u8f74\/\u4e5d\u8f74\/\u5341\u8f74\u7684MEMS\u5668\u4ef6\uff0c\u591a\u96c6\u6210\u5ea6\u7684MEMS\u5668\u4ef6\u9010\u6e10\u53d7\u5230\u9752\u7750\u3002<\/p>\n

\n\t\uff08\u4e09\uff09\u9ad8\u7aef\u4e13\u4e1a\u4eba\u624d\u4e0d\u8db3<\/p>\n

\n\tMEMS\u4f20\u611f\u5668\u8bbe\u8ba1\u884c\u4e1a\u662f\u5178\u578b\u7684\u6280\u672f\u5bc6\u96c6\u578b\u884c\u4e1a\uff0cMEMS\u4f20\u611f\u5668\u8bbe\u8ba1\uff08\u5305\u62ecMEMS\u8bbe\u8ba1\u3001ASIC\u8bbe\u8ba1\u3001MEMS\u5de5\u827a\u8bbe\u8ba1\uff09\u5bf9\u4e8e\u4eba\u624d\u7684\u4f9d\u8d56\u8fdc\u9ad8\u4e8e\u5176\u4ed6\u884c\u4e1a\u3002\u7ecf\u8fc7\u591a\u5e74\u7684\u53d1\u5c55\uff0c\u56fd\u5185MEMS\u4f20\u611f\u5668\u8bbe\u8ba1\u884c\u4e1a\u5df2\u79ef\u7d2f\u4e00\u6279\u4eba\u624d\uff0c\u4f46\u4e0e\u56fd\u9645\u9886\u5148\u7684\u4f01\u4e1a\u76f8\u6bd4\uff0c\u56fd\u5185MEMS\u4f20\u611f\u5668\u8bbe\u8ba1\u884c\u4e1a\u9ad8\u7aef\u3001\u4e13\u4e1a\u4eba\u624d\u4ecd\u76f8\u5bf9\u7a00\u7f3a\u3002\u968f\u7740\u5e02\u573a\u9700\u6c42\u7684\u4e0d\u65ad\u589e\u957f\uff0c\u4eba\u624d\u532e\u4e4f\u7684\u60c5\u51b5\u4f9d\u7136\u666e\u904d\u5b58\u5728\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u4e2d\u56fd\u534a\u5bfc\u4f53\u4ea7\u4e1a\u4e2d\u5b58\u5728\u7740\u5de8\u5927\u53d1\u5c55\u7a7a\u95f4\u7684\u9886\u57df\u9664\u4e86 CPU \u3001 GPU \u3001FLASH\u3001 DSP \u548c FPGA \u4e4b\u5916\uff0cMEMS\u60ef\u6027 \u4f20\u611f\u5668 \u4e5f\u662f\u4e00\u4e2a\u5173\u952e\u7684\u9886\u57df\uff0c\u5728\u534a\u5bfc\u4f53\u5668\u4ef6\u56fd\u4ea7\u5316\u65e5\u76ca\u9ad8\u6da8\u7684\u4eca\u5929\uff0c\u547c\u5524MEMS\u60ef\u6027\u4f20\u611f\u5668\u9886<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[10],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1844"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1844"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1844\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1844"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1844"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1844"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}