{"id":1750,"date":"2018-12-13T09:37:00","date_gmt":"2018-12-13T09:37:00","guid":{"rendered":""},"modified":"2018-12-13T17:37:23","modified_gmt":"2018-12-13T09:37:23","slug":"%e5%9c%a8%e6%b0%ae%e5%8c%96%e9%95%93%e5%a4%96%e5%bb%b6%e7%bb%93%e6%9e%84%e4%b8%ad%e9%a6%96%e6%ac%a1%e5%ae%9e%e7%8e%b0%e4%ba%86%e5%9e%82%e7%9b%b4%e6%b2%9f%e9%81%93%e7%bb%93%e5%9e%8b%e5%9c%ba","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=1750","title":{"rendered":"\u5728\u6c2e\u5316\u9553\u5916\u5ef6\u7ed3\u6784\u4e2d\u9996\u6b21\u5b9e\u73b0\u4e86\u5782\u76f4\u6c9f\u9053\u7ed3\u578b\u573a"},"content":{"rendered":"

\n\t\u5fb7\u56fd\u4e9a\u741b\u5de5\u4e1a\u5927\u5b66\u5728\u6c2e\u5316\u9553<\/u>\uff08GaN\uff09\u5916\u5ef6\u7ed3\u6784\u4e2d\u9996\u6b21\u5b9e\u73b0\u4e86\u5782\u76f4\u6c9f\u9053\u7ed3\u578b\u573a\u6548\u5e94\u6676\u4f53\u7ba1<\/u>\uff08vc-JFET\uff09\u3002<\/p>\n

\n\t\u5782\u76f4\u5668\u4ef6\u5bf9\u4e8e\u9ad8\u529f\u7387\u5bc6\u5ea6\u5e94\u7528\u662f\u5f88\u6709\u5e94\u7528\u4ef7\u503c\u7684\uff0c\u56e0\u4e3a\u901a\u8fc7\u8be5\u7ed3\u6784\u5c06\u5cf0\u503c\u7535\u573a\u4ece\u8868\u9762\u63a8\u5165\u6563\u88c5\u6750\u6599\uff0c\u4ece\u800c\u907f\u514d\u4e86\u5bf9\u8868\u9762\u949d\u5316\u6216\u573a\u677f\u7684\u9700\u8981\u3002<\/p>\n

\n\t <\/div>\n

\n\t\u7814\u7a76\u4eba\u5458\u4f7f\u7528\u4f4e\u6210\u672c\u76842\u82f1\u5bf8\u84dd\u5b9d\u77f3\u886c\u5e95\u901a\u8fc7MOCVD\u751f\u6210\u51c6\u5782\u76f4vc-JFET\u3002\u4e4b\u540e\u4f7f\u7528\u91cdn\u578b\u63ba\u6742GaN\u5c42\u5b9e\u73b0\u80cc\u9762“\u865a\u62df”\u63a5\u89e6\uff08\u56fe1\uff09\u3002\u771f\u6b63\u7684\u5782\u76f4\u5668\u4ef6\u4f1a\u4f7f\u6f0f\u6781\u89e6\u70b9\u7a7f\u8fc7\u6676\u5706\u7684\u80cc\u9762 - \u8fd9\u662f\u4f7f\u7528\u7edd\u7f18\u84dd\u5b9d\u77f3\u65e0\u6cd5\u5b9e\u73b0\u7684\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u56fe1\uff1a\u5177\u6709\u9009\u62e9\u6027\u518d\u751f\u957f\u7684p-GaN\u6805\u6781\u533a\u57df\u7684\u51c6\u5782\u76f4vc-JFET\u7684\u793a\u610f\u56fe\u3002<\/p>\n

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\n\t\u901a\u8fc7\u9996\u5148\u65bd\u52a02μm\u8f7b\u63ba\u6742n-GaN\u6f02\u79fb\u5c42\u548c20nm\u91cd\u63ba\u6742n-GaN\u63a5\u89e6\u5c42\u6765\u751f\u957fRWTH\u5668\u4ef6\u7ed3\u6784\uff0c\u7136\u540e\u4f7f\u7528\u4e8c\u6c27\u5316\u7845\u4f5c\u4e3a\u5728\u63a9\u6a21\u548cMOCVD\u671f\u95f4\u4fdd\u62a4\u6c9f\u9053\u7684\u786c\u63a9\u6a21\uff0c\u5728\u91cd\u63ba\u6742p-GaN\u7684\u9009\u62e9\u6027\u533a\u57df\u518d\u751f\u957f\u3002\u5176\u4e2d\u6805\u6781 - \u6805\u6781\uff08GTG\uff09\u8ddd\u79bb\u4e3a4μm\u3002\u901a\u9053\u5bbd\u5ea6\u4e3a54μm\u3002<\/p>\n

\n\t\u7528\u4e8e\u9009\u62e9\u6027\u533a\u57df\u518d\u751f\u7684\u523b\u8680\u4f7f\u7528\u5e72\u6cd5\u548c\u6e7f\u6cd5\u7684\u7ec4\u5408\u65b9\u6cd5\u3002\u6c9f\u9053\u7684\u4fa7\u58c1\u4e0eGaN\u6676\u4f53\u7ed3\u6784\u7684m\u9762\u5bf9\u51c6\uff0c\u4ee5\u51cf\u5c11\u5e72\u523b\u8680\u7684\u7c97\u7cd9\u5ea6\u3002\u6e7f\u56db\u7532\u57fa\u6c22\u6c27\u5316\u94f5\uff08TMAH\uff09\u5904\u7406\u8fdb\u4e00\u6b65\u4f7f\u4fa7\u58c1\u53d8\u5e73\u5e76\u4ece\u8680\u523b\u5e95\u90e8\u7684c\u9762\u8868\u9762\u53bb\u9664\u8680\u523b\u635f\u4f24\u3002\u5728p-GaN\u518d\u751f\u957f\u4e4b\u540e\uff0c\u901a\u8fc7\u5728\u6c2e\u6c14\u4e2d\u5728900\u2103\u4e0b\u9000\u706b900\u79d2\u6765\u6fc0\u6d3b\u6750\u6599\u3002\u9000\u706b\u7684\u76ee\u7684\u662f\u4ece\u9541\u63ba\u6742\u4e2d\u9664\u53bb\u6c22\u3002\u6c22 - \u9541\u7edc\u5408\u7269\u5e72\u6270p-GaN\u6750\u6599\u4e2d\u6240\u9700\u7684\u7a7a\u7a74\u7684\u4ea7\u751f\u3002<\/p>\n

\n\t\u8be5\u5668\u4ef6\u7684\u91d1\u5c5e\u5316\u7531\u7528\u4e8e\u6f0f\u6781\u548c\u6e90\u6781\u7684\u949b\/\u94dd\/\u954d\/\u91d1\u548c\u7528\u4e8ep-GaN\u6805\u6781\u7684\u954d\/\u91d1\u7ec4\u6210\u3002\u9996\u5148\u6c89\u79ef\u6f0f\u7535\u6781\uff0c\u7136\u540e\u662f\u6805\u6781\uff0c\u6700\u540e\u662f\u6e90\u6781\u3002\u6f0f\u7535\u6781\u548c\u6805\u7535\u6781\u5206\u522b\u5728830\u2103\u548c535\u2103\u4e0b\u9000\u706b\u3002\u7531\u4e8ep-GaN\u63a5\u89e6\u7684\u6e29\u5ea6\u9650\u5236\uff0c\u6e90\u7535\u6781\u672a\u9000\u706b\u3002<\/p>\n

\n\t\u6f0f\u6781\u89e6\u70b9\u4e3a\u6b27\u59c6\uff0c\u63a5\u89e6\u7535\u963b\u4e3a0.8Ω-mm\u3002\u7136\u800c\uff0c\u6805\u6781\u63a5\u89e6\u662f\u975e\u7ebf\u6027\u7684\uff0c\u5728\u96f6\u504f\u538b\u4e0b\u5177\u6709900Ω-mm\u7684\u63a5\u89e6\u7535\u963b\uff0c\u800c\u6e90\u6781\u8868\u73b0\u51fa\u8096\u7279\u57fa\u884c\u4e3a\u3002\u8fd9\u4e9b\u95ee\u9898\u4e0e\u6e90\u6781\u63a5\u89e6\u7684\u975e\u9000\u706b\u6027\u8d28\u548c\u5728\u6805\u6781\u4e0b\u9762\u4e0d\u5b58\u5728\u91cd\u63ba\u6742\u7684p-GaN\u5c42\u6709\u5173\u3002<\/p>\n

\n\t\u6805\u7535\u6781\u5141\u8bb8\u8c03\u5236pn\u7ed3\u5904\u7684\u8017\u5c3d\u5c42\u7684\u539a\u5ea6\uff0c\u963b\u65ad\u6e90\u6781\u548c\u6f0f\u6781\u4e4b\u95f4\u7684\u6c9f\u9053\u533a\u57df\u4e2d\u7684\u7535\u6d41\u3002\u6f02\u79fb\u5c42\u5177\u6709“\u4e2d\u7b49”\u539a\u5ea6\uff0c\u964d\u4f4e\u4e86\u9884\u671f\u7684\u51fb\u7a7f\u6027\u80fd\u3002\u4e2d\u7b49\u6f02\u79fb\u5c42\u7684\u76ee\u7684\u662f\u901a\u8fc7\u5e72\u523b\u8680\u8fc7\u7a0b\u66f4\u5bb9\u6613\u63a5\u8fd1\u865a\u62df\u80cc\u63a5\u89e6\u3002<\/p>\n

\n\t\u9274\u4e8e\u7c7b\u4f3c\u8096\u7279\u57fa\u7684“\u6e90\u6781”\u63a5\u89e6\uff0c\u7814\u7a76\u4eba\u5458\u51b3\u5b9a\u9006\u8f6c\u6f0f\u6781\u504f\u7f6e\uff0c\u56e0\u6b64\u5668\u4ef6\u7684\u64cd\u4f5c\u5c31\u597d\u50cf\u6e90\u662f\u6f0f\u6781\u4e00\u6837\uff0c\u53cd\u4e4b\u4ea6\u7136\u3002\u5305\u62ec\u8096\u7279\u57fa\u5bfc\u901a\u7535\u538b\u7ea60.5V\u7684\u5668\u4ef6\u7684\u884c\u4e3a\u5ef6\u8fdf\u4e86\u6f0f\u6781\u504f\u7f6e\u7684\u7535\u6d41\u589e\u52a0\u3002\u5177\u4f53\u7684\u5bfc\u901a\u7535\u963b\u4e3a2.36mΩ-cm2\uff0c\u5f52\u4e00\u5316\u4e3a\u6c9f\u9053\u622a\u9762\u79ef\u3002 \u6805\u6781\u6f0f\u7535\u6d41\u6bd4\u6f0f\u6781\u7535\u6d41\u4f4e\u4e24\u4e2a\u6570\u91cf\u7ea7\uff0c\u6805\u6781\u7535\u4f4d\u9ad8\u8fbe10V\u3002<\/p>\n

\n\t<\/p>\n

\n\t\u56fe2\uff1a1V\u6e90\u6781 - \u6f0f\u6781\u504f\u7f6e\u4e0b\u7684\u51c6\u5782\u76f4vc-JFET\u7684\u6f0f\u6781\u548c\u6805\u6781\u7535\u6d41\u4ee5\u53ca\u8de8\u5bfc\uff0c\u4f20\u8f93\u7279\u6027\u3002 \u6807\u51c6\u5316\u4e3a\u901a\u9053\u6a2a\u622a\u9762\u3002<\/p>\n

\n\t\u867d\u7136\u6676\u4f53\u7ba1\u6ca1\u6709\u5939\u65ad\uff0c\u4f46\u6805\u6781\u7535\u4f4d\u786e\u5b9e\u8c03\u5236\u4e86\u6f0f\u6781\u7535\u6d41\uff08\u9ad8\u8fbe1.8\u500d\uff0c\u6805\u6781\u4e3a-10V\uff0c\u56fe2\uff09\u3002\u6839\u636e\u6a21\u62df\uff0c\u5939\u65ad\u53d1\u751f\u5728-112V\u5de6\u53f3\u3002\u5c06\u5176\u653e\u5728\u4e00\u4f4d\u6570\u8303\u56f4\u5185\u9700\u8981\u7f29\u5c0f\u5c3a\u5bf8\uff0c\u540c\u65f6\u51cf\u5c11\u6c9f\u9053\u63ba\u6742\u4ee5\u589e\u52a0\u7a7a\u95f4\u7535\u8377\u533a\u57df\u7684\u8303\u56f4\u3002\u6a21\u62df\u7ed3\u679c\u8868\u660e\uff0c\u5728-12V\u65f6\uff0c\u7a7a\u95f4\u7535\u8377\u533a\u57df\u4ec5\u4ece4μm\u6805\u6781 - \u6805\u6781\u95f4\u9699\u7684\u4e24\u4fa7\u5ef6\u4f381μm\u3002<\/p>\n

\n\t\u6a21\u62df\u8fd8\u8868\u660e\uff0c\u5e38\u5173\u589e\u5f3a\u6a21\u5f0f\u64cd\u4f5c\u5c06\u4f1a\u4ea7\u751f1μm\u7684\u6805\u6781 - \u6805\u6781\u95f4\u8ddd\uff0c\u4ee5\u53ca5μm\u6c9f\u9053\u957f\u548c5x10E15·cm-3\u63ba\u6742\uff0c\u63d0\u4f9b+2.3V\u9608\u503c\u3002\u6839\u636e\u6c5e\u7535\u5bb9<\/u> - \u7535\u538b\u5206\u5e03\u6d4b\u91cf\uff0c\u5b9e\u9a8c\u88c5\u7f6e\u7684\u6f02\u79fb\/\u6c9f\u9053\u63ba\u6742\u4e3a1×10E16·cm-3\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u5fb7\u56fd\u4e9a\u741b\u5de5\u4e1a\u5927\u5b66\u5728 \u6c2e\u5316\u9553 \uff08GaN\uff09\u5916\u5ef6\u7ed3\u6784\u4e2d\u9996\u6b21\u5b9e\u73b0\u4e86\u5782\u76f4\u6c9f\u9053\u7ed3\u578b\u573a\u6548\u5e94 \u6676\u4f53\u7ba1 \uff08vc-JFET\uff09\u3002 \u5782\u76f4\u5668\u4ef6\u5bf9\u4e8e\u9ad8\u529f\u7387\u5bc6\u5ea6\u5e94\u7528\u662f\u5f88\u6709\u5e94\u7528\u4ef7\u503c\u7684\uff0c\u56e0\u4e3a\u901a\u8fc7\u8be5\u7ed3\u6784\u5c06\u5cf0\u503c\u7535\u573a\u4ece\u8868\u9762<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[15],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1750"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1750"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1750\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1750"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1750"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1750"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}