{"id":16785,"date":"2024-01-24T21:23:32","date_gmt":"2024-01-24T13:23:32","guid":{"rendered":"http:\/\/www.szryc.com\/?p=16785"},"modified":"2024-01-24T21:23:32","modified_gmt":"2024-01-24T13:23:32","slug":"%e5%85%b3%e4%ba%8e%e9%9d%99%e7%94%b5%e6%94%be%e7%94%b5%e4%bf%9d%e6%8a%a4%ef%bc%9a%e5%a6%82%e4%bd%95%e9%98%b2%e6%ad%a2%e9%9d%99%e7%94%b5%e6%94%be%e7%94%b5%e6%8d%9f%e4%bc%a4","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=16785","title":{"rendered":"\u5173\u4e8e\u9759\u7535\u653e\u7535\u4fdd\u62a4\uff1a\u5982\u4f55\u9632\u6b62\u9759\u7535\u653e\u7535\u635f\u4f24"},"content":{"rendered":"

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\"8a698f08-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

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\u4ee5\u524d\u7684\u4e13\u9898<\/u>\u8bb2\u89e3PN\u7ed3\u4e8c\u6781\u7ba1\u7406\u8bba\u7684\u65f6\u5019\uff0c\u5c31\u8bb2\u8fc7\u4e8c\u6781\u7ba1\u6709\u4e00\u4e2a\u7279\u6027\uff1a<\/strong>\u6b63\u5411\u5bfc\u901a\u53cd\u5411\u622a\u6b62\uff0c\u800c\u4e14\u53cd\u504f\u7535\u538b\u7ee7\u7eed\u589e\u52a0\u4f1a\u53d1\u751f\u96ea\u5d29\u51fb\u7a7f\u800c\u5bfc\u901a\uff0c\u6211\u4eec\u79f0\u4e4b\u4e3a\u94b3\u4f4d\u4e8c\u6781\u7ba1(Clamp)\u3002\u8fd9\u6b63\u662f\u6211\u4eec\u8bbe\u8ba1\u9759\u7535\u4fdd\u62a4\u6240\u9700\u8981\u7684\u7406\u8bba\u57fa\u7840\uff0c\u6211\u4eec\u5c31\u662f\u5229\u7528\u8fd9\u4e2a\u53cd\u5411\u622a\u6b62\u7279\u6027\u8ba9\u8fd9\u4e2a\u65c1\u8def\u5728\u6b63\u5e38\u5de5\u4f5c\u65f6\u5904\u4e8e\u65ad\u5f00\u72b6\u6001\uff0c\u800c\u5916\u754c\u6709\u9759\u7535\u7684\u65f6\u5019\u8fd9\u4e2a\u65c1\u8def\u4e8c\u6781\u7ba1\u53d1\u751f\u96ea\u5d29\u51fb\u7a7f\u800c\u5f62\u6210\u65c1\u8def\u901a\u8def\u4fdd\u62a4\u4e86\u5185\u90e8\u7535\u8def\u6216\u8005\u6805\u6781(\u662f\u4e0d\u662f\u7c7b\u4f3c\u5bb6\u91cc\u6c34\u69fd\u6709\u4e2a\u6ea2\u6c34\u53e3\uff0c\u9632\u6b62\u6c34\u9f99\u5934\u5fd8\u5173\u4e86\u5bfc\u81f4\u6574\u4e2a\u536b\u751f\u95f4\u6c34\u707e)\u3002<\/p>\n

\u90a3\u4e48\u95ee\u9898\u6765\u4e86\uff0c\u8fd9\u4e2a\u51fb\u7a7f\u4e86\u8fd9\u4e2a\u4fdd\u62a4\u7535\u8def\u662f\u4e0d\u662f\u5c31\u5f7b\u5e95\u6b7b\u4e86\uff1f\u96be\u9053\u662f\u4e00\u6b21\u6027\u7684\uff1f\u7b54\u6848\u5f53\u7136\u4e0d\u662f<\/strong>\u3002PN\u7ed3\u7684\u51fb\u7a7f\u5206\u4e24\u79cd\uff0c\u5206\u522b\u662f\u7535\u51fb\u7a7f\u548c\u70ed\u51fb\u7a7f\uff0c\u7535\u51fb\u7a7f\u6307\u7684\u662f\u96ea\u5d29\u51fb\u7a7f(\u4f4e\u6d53\u5ea6)\u548c\u9f50\u7eb3<\/u>\u51fb\u7a7f(\u9ad8\u6d53\u5ea6)\uff0c\u800c\u8fd9\u4e2a\u7535\u51fb\u7a7f\u4e3b\u8981\u662f\u8f7d\u6d41\u5b50\u78b0\u649e\u7535\u79bb\u4ea7\u751f\u65b0\u7684\u7535\u5b50-\u7a7a\u7a74\u5bf9(electron-hole)\uff0c\u6240\u4ee5\u5b83\u662f\u53ef\u6062\u590d\u7684\u3002\u4f46\u662f\u70ed\u51fb\u7a7f\u662f\u4e0d\u53ef\u6062\u590d\u7684\uff0c\u56e0\u4e3a\u70ed\u91cf\u805a\u96c6\u5bfc\u81f4\u7845(Si)\u88ab\u7194\u878d\u70e7\u6bc1\u4e86\u3002\u6240\u4ee5\u6211\u4eec\u9700\u8981\u63a7\u5236\u5728\u5bfc\u901a\u7684\u77ac\u95f4\u63a7\u5236\u7535\u6d41\uff0c\u4e00\u822c\u4f1a\u5728\u4fdd\u62a4\u4e8c\u6781\u7ba1\u518d\u4e32\u8054\u4e00\u4e2a\u9ad8\u7535\u963b\uff0c<\/p>\n

\u53e6\u5916\uff0c\u5927\u5bb6\u662f\u4e0d\u662f\u53ef\u4ee5\u4e3e\u4e00\u53cd\u4e09\u7406\u89e3\u4e3a\u4ec0\u4e48ESD\u7684\u533a\u57df\u662f\u4e0d\u80fdfor<\/u>m Silicide\u7684\uff1f<\/strong>\u8fd8\u6709\u7ed9\u5927\u5bb6\u4e00\u4e2a\u7406\u8bba\uff0cESD\u901a\u5e38\u90fd\u662f\u5728\u82af\u7247\u8f93\u5165\u7aef\u7684Pad\u65c1\u8fb9\uff0c\u4e0d\u80fd\u5728\u82af\u7247\u91cc\u9762\uff0c\u56e0\u4e3a\u6211\u4eec\u603b\u662f\u5e0c\u671b\u5916\u754c\u7684\u9759\u7535\u9700\u8981\u7b2c\u4e00\u65f6\u95f4\u6cc4\u653e\u6389\u5427\uff0c\u653e\u5728\u91cc\u9762\u4f1a\u6709\u5ef6\u8fdf\u7684(\u5173\u6ce8\u6211\u524d\u9762\u89e3\u5256\u7684\u90a3\u4e2a\u82af\u7247PAD\u65c1\u8fb9\u90fd\u6709\u4e8c\u6781\u7ba1\u3002\u751a\u81f3\u6709\u653e\u4e24\u7ea7ESD\u7684\uff0c\u8fbe\u5230\u53cc\u91cd\u4fdd\u62a4\u7684\u76ee\u7684\u3002<\/p>\n

\"8a803212-ba4c-11ee-8b88-92fbcf53809c.png\"<\/p>\n

\u5728\u8bb2ESD\u7684\u539f\u7406\u548cProcess\u4e4b\u524d\uff0c\u6211\u4eec\u5148\u8bb2\u4e0bESD\u7684\u6807\u51c6\u4ee5\u53ca\u6d4b\u8bd5\u65b9\u6cd5\uff0c\u6839\u636e\u9759\u7535\u7684\u4ea7\u751f\u65b9\u5f0f\u4ee5\u53ca\u5bf9\u7535\u8def\u7684\u635f\u4f24\u6a21\u5f0f\u4e0d\u540c\u901a\u5e38\u5206\u4e3a\u56db\u79cd\u6d4b\u8bd5\u65b9\u5f0f<\/strong>\uff1a\u4eba\u4f53\u653e\u7535\u6a21\u5f0f(HBM: Human-Body Model)\u3001\u673a\u5668\u653e\u7535\u6a21\u5f0f(Machine Model)\u3001\u5143\u4ef6\u5145\u7535\u6a21\u5f0f(CDM: Charge-Device Model)\u3001\u7535\u573a\u611f\u5e94\u6a21\u5f0f(FIM: Field-Induced Model)\uff0c\u4f46\u662f\u4e1a\u754c\u901a\u5e38\u4f7f\u7528\u524d\u4e24\u79cd\u6a21\u5f0f\u6765\u6d4b\u8bd5(HBM, MM)\u3002<\/p>\n

1\u3001\u4eba\u4f53\u653e\u7535\u6a21\u5f0f(HBM)\uff1a<\/strong>\u5f53\u7136\u5c31\u662f\u4eba\u4f53\u6469\u64e6\u4ea7\u751f\u4e86\u7535\u8377\u7a81\u7136\u78b0\u5230\u82af\u7247\u91ca\u653e\u7684\u7535\u8377\u5bfc\u81f4\u82af\u7247\u70e7\u6bc1\u51fb\u7a7f\uff0c\u79cb\u5929\u548c\u522b\u4eba\u89e6\u78b0\u7ecf\u5e38\u89e6\u7535\u5c31\u662f\u8fd9\u4e2a\u539f\u56e0\u3002\u4e1a\u754c\u5bf9HBM\u7684ESD\u6807\u51c6\u4e5f\u6709\u8ff9\u53ef\u5faa(MIL-STD-883C method 3015.7\uff0c\u7b49\u6548\u4eba\u4f53\u7535\u5bb9<\/u>\u4e3a100pF\uff0c\u7b49\u6548\u4eba\u4f53\u7535\u963b<\/u>\u4e3a1.5Kohm)\uff0c\u6216\u8005\u56fd\u9645\u7535\u5b50\u5de5\u4e1a\u6807\u51c6(EIA\/JESD22-A114-A)\u4e5f\u6709\u89c4\u5b9a\uff0c\u770b\u4f60\u8981follow\u54ea\u4e00\u4efd\u4e86\u3002\u5982\u679c\u662fMIL-STD-883C method 3015.7\uff0c\u5b83\u89c4\u5b9a\u5c0f\u4e8e<2kV\u7684\u5219\u4e3aClass-1\uff0c\u57282kV~4kV\u7684\u4e3aclass-2\uff0c4kV~16kV\u7684\u4e3aclass-3\u3002<\/p>\n

\"8a93fdf6-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

2\u3001\u673a\u5668\u653e\u7535\u6a21\u5f0f(MM)\uff1a<\/strong>\u5f53\u7136\u5c31\u662f\u673a\u5668(\u5982robot)\u79fb\u52a8\u4ea7\u751f\u7684\u9759\u7535\u89e6\u78b0\u82af\u7247\u65f6\u7531pi<\/u>n\u811a\u91ca\u653e\uff0c\u6b21\u6807\u51c6\u4e3aEIAJ-IC-121 method 20(\u6216\u8005\u6807\u51c6EIA\/JESD22-A115-A)\uff0c\u7b49\u6548\u673a\u5668\u7535\u963b\u4e3a0 (\u56e0\u4e3a\u91d1\u5c5e)\uff0c\u7535\u5bb9\u4f9d\u65e7\u4e3a100pF\u3002\u7531\u4e8e\u673a\u5668\u662f\u91d1\u5c5e\u4e14\u7535\u963b\u4e3a0\uff0c\u6240\u4ee5\u653e\u7535\u65f6\u95f4\u5f88\u77ed\uff0c\u51e0\u4e4e\u662fms\u6216\u8005us\u4e4b\u95f4\u3002\u4f46\u662f\u66f4\u91cd\u8981\u7684\u95ee\u9898\u662f\uff0c\u7531\u4e8e\u7b49\u6548\u7535\u963b\u4e3a0\uff0c\u6240\u4ee5\u7535\u6d41<\/u>\u5f88\u5927\uff0c\u6240\u4ee5\u5373\u4f7f\u662f200V\u7684MM\u653e\u7535\u4e5f\u6bd42kV\u7684HBM\u653e\u7535\u7684\u5371\u5bb3\u5927\u3002\u800c\u4e14\u673a\u5668\u672c\u8eab\u7531\u4e8e\u6709\u5f88\u591a\u5bfc\u7ebf\u4e92\u76f8\u4f1a\u4ea7\u751f\u8026\u5408<\/u>\u4f5c\u7528\uff0c\u6240\u4ee5\u7535\u6d41\u4f1a\u968f\u65f6\u95f4\u53d8\u5316\u800c\u5e72\u6270\u53d8\u5316\u3002<\/p>\n

\"8aa46bfa-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

ESD\u7684\u6d4b\u8bd5\u65b9\u6cd5\u7c7b\u4f3cFAB\u91cc\u9762\u7684GOI\u6d4b\u8bd5\uff0c\u6307\u5b9apin\u4e4b\u540e\u5148\u7ed9\u4ed6\u4e00\u4e2aESD\u7535\u538b\uff0c\u6301\u7eed\u4e00\u6bb5\u65f6\u95f4\u540e<\/strong>\uff0c\u7136\u540e\u518d\u56de\u6765\u6d4b\u8bd5\u7535\u6027\u770b\u770b\u662f\u5426\u635f\u574f\uff0c\u6ca1\u95ee\u9898\u518d\u53bb\u52a0\u4e00\u4e2astep\u7684ESD\u7535\u538b\u518d\u6301\u7eed\u4e00\u6bb5\u65f6\u95f4\uff0c\u518d\u6d4b\u7535\u6027\uff0c\u5982\u6b64\u53cd\u590d\u76f4\u81f3\u51fb\u7a7f\uff0c\u6b64\u65f6\u7684\u51fb\u7a7f\u7535\u538b\u4e3aESD\u51fb\u7a7f\u7684\u4e34\u754c\u7535\u538b(ESD failure threshold Voltage)\u3002\u901a\u5e38\u6211\u4eec\u90fd\u662f\u7ed9\u7535\u8def\u6253\u4e09\u6b21\u7535\u538b(3 zaps)\uff0c\u4e3a\u4e86\u964d\u4f4e\u6d4b\u8bd5\u5468\u671f\uff0c\u901a\u5e38\u8d77\u59cb\u7535\u538b\u7528\u6807\u51c6\u7535\u538b\u768470% ESD threshold\uff0c\u6bcf\u4e2astep\u53ef\u4ee5\u6839\u636e\u9700\u8981\u81ea\u5df1\u8c03\u657450V\u6216\u8005100V\u3002<\/p>\n

 <\/p>\n\n\n\n\n\n
(1). Stress number = 3 Zaps. (5 Zaps, the worst case)<\/td>\n<\/tr>\n
(2). Stress step<\/td>\n\u0394VESD<\/u>\u00a0= 50V(100V) for VZAP\u00a0<=1000V
\n\u0394VESD\u00a0= 100V(250V, 500V) for VZAP\u00a0> 1000V<\/td>\n<\/tr>\n
(3). Starti<\/u>ng VZAP\u00a0= 70% of averaged ESD failure threshold (VESD)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n

 <\/p>\n

\u53e6\u5916\uff0c\u56e0\u4e3a\u6bcf\u4e2achip\u7684pin\u811a\u5f88\u591a\uff0c\u4f60\u662f\u4e00\u4e2a\u4e2apin\u6d4b\u8bd5\u8fd8\u662f\u7ec4\u5408pin\u6d4b\u8bd5\uff0c\u6240\u4ee5\u4f1a\u5206\u4e3a\u51e0\u79cd\u7ec4\u5408\uff1a<\/strong>I\/O-pin\u6d4b\u8bd5(Input and Output pins)\u3001pin-to-pin\u6d4b\u8bd5\u3001Vdd-Vss\u6d4b\u8bd5(\u8f93\u5165\u7aef\u5230\u8f93\u51fa\u7aef)\u3001Analog<\/u>-pin\u3002<\/p>\n

1. I\/O pins\uff1a<\/strong>\u5c31\u662f\u5206\u522b\u5bf9input-pin\u548coutput-pin\u505aESD\u6d4b\u8bd5\uff0c\u800c\u4e14\u7535\u8377\u6709\u6b63\u8d1f\u4e4b\u5206\uff0c\u6240\u4ee5\u6709\u56db\u79cd\u7ec4\u5408\uff1ainput+\u6b63\u7535\u8377\u3001input+\u8d1f\u7535\u8377\u3001output+\u6b63\u7535\u8377\u3001output+\u8d1f\u7535\u8377\u3002\u6d4b\u8bd5input\u65f6\u5019\uff0c\u5219output\u548c\u5176\u4ed6pin\u5168\u90e8\u6d6e\u63a5(floating)\uff0c\u53cd\u4e4b\u4ea6\u7136\u3002<\/p>\n

\"8aae7a5a-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

2. pin-to-pin\u6d4b\u8bd5:\u00a0<\/strong>\u9759\u7535\u653e\u7535\u53d1\u751f\u5728pin-to-pin\u4e4b\u95f4\u5f62\u6210\u56de\u8def\uff0c\u4f46\u662f\u5982\u679c\u8981\u6bcf\u6bcf\u4e24\u4e2a\u811a\u6d4b\u8bd5\u7ec4\u5408\u592a\u591a\uff0c\u56e0\u4e3a\u4efb\u4f55\u7684I\/O\u7ed9\u7535\u538b\u4e4b\u540e\u5982\u679c\u8981\u5bf9\u6574\u4e2a\u7535\u8def\u4ea7\u751f\u5f71\u54cd\u4e00\u5b9a\u662f\u5148\u7ecf\u8fc7VDD\/Vss\u624d\u80fd\u5bf9\u6574\u4e2a\u7535\u8def\u4f9b\u7535\uff0c\u6240\u4ee5\u6539\u826f\u7248\u5219\u7528\u67d0\u4e00I\/O-pin\u52a0\u6b63\u6216\u8d1f\u7684ESD\u7535\u538b\uff0c\u5176\u4ed6\u6240\u6709I\/O\u4e00\u8d77\u63a5\u5730\uff0c\u4f46\u662f\u8f93\u5165\u548c\u8f93\u51fa\u540c\u65f6\u6d6e\u63a5(Floating)\u3002<\/p>\n

\"8ac444b6-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

3\u3001Vdd-Vss\u4e4b\u95f4\u9759\u7535\u653e\u7535\uff1a<\/strong>\u53ea\u9700\u8981\u628aVdd\u548cVss\u63a5\u8d77\u6765\uff0c\u6240\u6709\u7684I\/O\u5168\u90e8\u6d6e\u63a5(floating)\uff0c\u8fd9\u6837\u7ed9\u9759\u7535\u8ba9\u4ed6\u7a7f\u8fc7Vdd\u4e0eVss\u4e4b\u95f4\u3002<\/p>\n

\"8ad2219e-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

4\u3001Analog-pin\u653e\u7535\u6d4b\u8bd5\uff1a<\/strong>\u56e0\u4e3a\u6a21\u62df<\/u>\u7535\u8def\u5f88\u591a\u5dee\u5206\u6bd4\u5bf9(Differential Pair)\u6216\u8005\u8fd0\u7b97\u653e\u5927\u5668<\/u>(OP AMP)\u90fd\u662f\u6709\u4e24\u4e2a\u8f93\u5165\u7aef\u7684\uff0c\u9632\u6b62\u4e00\u4e2a\u635f\u574f\u5bfc\u81f4\u5dee\u5206\u6bd4\u5bf9\u6216\u8fd0\u7b97\u5931\u6548\uff0c\u6240\u4ee5\u9700\u8981\u5355\u72ec\u505aESD\u6d4b\u8bd5\uff0c\u5f53\u7136\u5c31\u662f\u53ea\u9488\u5bf9\u8fd9\u4e24\u4e2apin\uff0c\u5176\u4ed6pin\u5168\u90e8\u6d6e\u63a5(floating)\u3002<\/p>\n

\"8ae718ec-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

\u597d\u4e86\uff0cESD\u7684\u539f\u7406\u548c\u6d4b\u8bd5\u90e8\u5206\u5c31\u8bb2\u5230\u8fd9\u91cc\u4e86\uff0c\u4e0b\u9762\u63a5\u7740\u8bb2Process\u548c\u8bbe\u8ba1\u4e0a\u7684factor<\/p>\n

\u968f\u7740\u6469\u5c14\u5b9a\u5f8b\u7684\u8fdb\u4e00\u6b65\u7f29\u5c0f\uff0c\u5668\u4ef6\u5c3a\u5bf8\u8d8a\u6765\u8d8a\u5c0f\uff0c\u7ed3\u6df1\u8d8a\u6765\u8d8a\u6d45\uff0cGOX\u8d8a\u6765\u8d8a\u8584\uff0c\u6240\u4ee5\u9759\u7535\u51fb\u7a7f\u8d8a\u6765\u8d8a\u5bb9\u6613\uff0c\u800c\u4e14\u5728Ad<\/u>vance\u5236\u7a0b\u91cc\u9762\uff0cSilicide\u5f15\u5165\u4e5f\u4f1a\u8ba9\u9759\u7535\u51fb\u7a7f\u53d8\u5f97\u66f4\u52a0\u5c16\u9510\uff0c\u6240\u4ee5\u51e0\u4e4e\u6240\u6709\u7684\u82af\u7247\u8bbe\u8ba1\u90fd\u8981\u514b\u670d\u9759\u7535\u51fb\u7a7f\u95ee\u9898\u3002<\/p>\n

\"8afa9142-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

\u9759\u7535\u653e\u7535\u4fdd\u62a4\u53ef\u4ee5\u4eceFAB\u7aef\u7684Process\u89e3\u51b3\uff0c\u4e5f\u53ef\u4ee5\u4eceIC\u8bbe\u8ba1\u7aef\u7684Layout\u6765\u8bbe\u8ba1<\/strong>\uff0c\u6240\u4ee5\u4f60\u4f1a\u770b\u5230Prcess\u6709\u4e00\u4e2aESD\u7684option layer\uff0c\u6216\u8005Design rule\u91cc\u9762\u6709ESD\u7684\u8bbe\u8ba1\u89c4\u5219\u53ef\u4f9b\u5ba2\u6237\u9009\u62e9\u7b49\u7b49\u3002\u5f53\u7136\u6709\u4e9b\u5ba2\u6237\u4e5f\u4f1a\u81ea\u5df1\u6839\u636eSPICE model\u7684\u7535\u6027\u901a\u8fc7layout\u6765\u8bbe\u8ba1ESD\u3002<\/p>\n

1\u3001\u5236\u7a0b\u4e0a\u7684ESD\uff1a<\/strong>\u8981\u4e48\u6539\u53d8PN\u7ed3\uff0c\u8981\u4e48\u6539\u53d8PN\u7ed3\u7684\u8d1f\u8f7d\u7535\u963b\uff0c\u800c\u6539\u53d8PN\u7ed3\u53ea\u80fd\u9760ESD_IMP\u4e86\uff0c\u800c\u6539\u53d8\u4e0ePN\u7ed3\u7684\u8d1f\u8f7d\u7535\u963b\uff0c\u5c31\u662f\u7528non-silicide\u6216\u8005\u4e32\u8054\u7535\u963b\u7684\u65b9\u6cd5\u4e86\u3002<\/p>\n

1) Source\/Drain\u7684ESD implant\uff1a<\/strong>\u56e0\u4e3a\u6211\u4eec\u7684LDD\u7ed3\u6784\u5728gate poly\u4e24\u8fb9\u5f88\u5bb9\u6613\u5f62\u6210\u4e24\u4e2a\u6d45\u7ed3\uff0c\u800c\u8fd9\u4e2a\u6d45\u7ed3\u7684\u5c16\u89d2\u7535\u573a\u6bd4\u8f83\u96c6\u4e2d\uff0c\u800c\u4e14\u56e0\u4e3a\u662f\u6d45\u7ed3\uff0c\u6240\u4ee5\u5b83\u4e0eGate\u6bd4\u8f83\u8fd1\uff0c\u6240\u4ee5\u53d7Gate\u7684\u672b\u7aef\u7535\u573a\u5f71\u54cd\u6bd4\u8f83\u5927\uff0c\u6240\u4ee5\u8fd9\u6837\u7684LDD\u5c16\u89d2\u5728\u8010ESD\u653e\u7535\u7684\u80fd\u529b\u662f\u6bd4\u8f83\u5dee\u7684(<1kV)\uff0c\u6240\u4ee5\u5982\u679c\u8fd9\u6837\u7684Device\u7528\u5728I\/O\u7aef\u53e3\uff0c\u5f88\u5bb9\u9020\u6210ESD\u635f\u4f24\u3002\u6240\u4ee5\u6839\u636e\u8fd9\u4e2a\u7406\u8bba\uff0c\u6211\u4eec\u9700\u8981\u4e00\u4e2a\u5355\u72ec\u7684\u5668\u4ef6\u6ca1\u6709LDD\uff0c\u4f46\u662f\u9700\u8981\u53e6\u5916\u4e00\u9053ESD implant\uff0c\u6253\u4e00\u4e2a\u6bd4\u8f83\u6df1\u7684N+_S\/D\uff0c\u8fd9\u6837\u5c31\u53ef\u4ee5\u8ba9\u90a3\u4e2a\u5c16\u89d2\u53d8\u5706\u800c\u4e14\u79bb\u8868\u9762\u5f88\u8fdc\uff0c\u6240\u4ee5\u53ef\u4ee5\u660e\u663e\u63d0\u9ad8ESD\u51fb\u7a7f\u80fd\u529b(>4kV)\u3002\u4f46\u662f\u8fd9\u6837\u7684\u8bdd\u8fd9\u4e2a\u989d\u5916\u7684MOS\u7684Gate\u5c31\u5fc5\u987b\u5f88\u957f\u9632\u6b62\u7a7f\u901a(punchthrough)\uff0c\u800c\u4e14\u56e0\u4e3a\u5668\u4ef6\u4e0d\u4e00\u6837\u4e86\uff0c\u6240\u4ee5\u9700\u8981\u5355\u72ec\u63d0\u53d6\u5668\u4ef6\u7684SPICE Model\u3002<\/p>\n

\"8aff14ce-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

2) \u63a5\u89e6\u5b54(contact)\u7684ESD implant\uff1a<\/strong>\u5728LDD\u5668\u4ef6\u7684N+\u6f0f\u6781\u7684\u5b54\u4e0b\u9762\u6253\u4e00\u4e2aP+\u7684\u787c\uff0c\u800c\u4e14\u6df1\u5ea6\u8981\u8d85\u8fc7N+\u6f0f\u6781(drain)\u7684\u6df1\u5ea6\uff0c\u8fd9\u6837\u5c31\u53ef\u4ee5\u8ba9\u539f\u6765Drain\u7684\u51fb\u7a7f\u7535\u538b\u964d\u4f4e(8V-->6V)\uff0c\u6240\u4ee5\u53ef\u4ee5\u5728LDD\u5c16\u89d2\u53d1\u751f\u51fb\u7a7f\u4e4b\u524d\u5148\u4eceDrain\u51fb\u7a7f\u5bfc\u8d70\u4ece\u800c\u4fdd\u62a4Drain\u548cGate\u7684\u51fb\u7a7f\u3002\u6240\u4ee5\u8fd9\u6837\u7684\u8bbe\u8ba1\u80fd\u591f\u4fdd\u6301\u5668\u4ef6\u5c3a\u5bf8\u4e0d\u53d8\uff0c\u4e14MOS\u7ed3\u6784\u6ca1\u6709\u6539\u53d8\uff0c\u6545\u4e0d\u9700\u8981\u91cd\u65b0\u63d0\u53d6SPICE model\u3002\u5f53\u7136\u8fd9\u79cd\u667a\u80fd<\/u>\u7528\u4e8enon-silicide\u5236\u7a0b\uff0c\u5426\u5219contact\u4f60\u4e5f\u6253\u4e0d\u8fdb\u53bbimplant\u3002<\/p>\n

\"8b0e06be-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

3) SAB (SAlicide Block)\uff1a<\/strong>\u4e00\u822c\u6211\u4eec\u4e3a\u4e86\u964d\u4f4eMOS\u7684\u4e92\u8fde\u7535\u5bb9\uff0c\u6211\u4eec\u4f1a\u4f7f\u7528silicide\/SAlicide\u5236\u7a0b\uff0c\u4f46\u662f\u8fd9\u6837\u5668\u4ef6\u5982\u679c\u5de5\u4f5c\u5728\u8f93\u51fa\u7aef\uff0c\u6211\u4eec\u7684\u5668\u4ef6\u8d1f\u8f7d\u7535\u963b\u53d8\u4f4e\uff0c\u5916\u754cESD\u7535\u538b\u5c06\u4f1a\u5168\u90e8\u52a0\u8f7d\u5728LDD\u548cGate\u7ed3\u6784\u4e4b\u95f4\u5f88\u5bb9\u6613\u51fb\u7a7f\u635f\u4f24\uff0c\u6240\u4ee5\u5728\u8f93\u51fa\u7ea7\u7684MOS\u7684Silicide\/Salicide\u6211\u4eec\u901a\u5e38\u4f1a\u7528SAB(SAlicide Block)\u5149\u7f69\u6321\u4f4fRPO\uff0c\u4e0d\u8981\u5f62\u6210silicide\uff0c\u589e\u52a0\u4e00\u4e2aphoto layer\u6210\u672c\u589e\u52a0\uff0c\u4f46\u662fESD\u7535\u538b\u53ef\u4ee5\u4ece1kV\u63d0\u9ad8\u52304kV\u3002<\/p>\n

\"8b3fe0bc-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

4)\u4e32\u8054\u7535\u963b\u6cd5\uff1a<\/strong>\u8fd9\u79cd\u65b9\u6cd5\u4e0d\u7528\u589e\u52a0\u5149\u7f69\uff0c\u5e94\u8be5\u662f\u6700\u7701\u94b1\u7684\u4e86\uff0c\u539f\u7406\u6709\u70b9\u7c7b\u4f3c\u7b2c\u4e09\u79cd(SAB)\u589e\u52a0\u7535\u963b\u6cd5\uff0c\u6211\u5c31\u6545\u610f\u7ed9\u4ed6\u4e32\u8054\u4e00\u4e2a\u7535\u963b(\u6bd4\u5982Rs<\/u>_NW\uff0c\u6216\u8005HiR\uff0c\u7b49)\uff0c\u8fd9\u6837\u4e5f\u8fbe\u5230\u4e86SAB\u7684\u65b9\u6cd5\u3002<\/p>\n

\"8b6b0210-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

2\u3001\u8bbe\u8ba1\u4e0a\u7684ESD\uff1a<\/strong>\u8fd9\u5c31\u5b8c\u5168\u9760\u8bbe\u8ba1\u8005\u7684\u529f\u592b\u4e86\uff0c\u6709\u4e9b\u516c\u53f8\u5728\u8bbe\u8ba1\u89c4\u5219\u5c31\u5df2\u7ecf\u63d0\u4f9b\u7ed9\u5ba2\u6237solution\u4e86\uff0c\u5ba2\u6237\u53ea\u8981\u7167\u7740\u753b\u5c31\u884c\u4e86\uff0c\u6709\u4e9b\u6ca1\u6709\u7684\u5219\u53ea\u80fd\u9760\u5ba2\u6237\u81ea\u5df1\u7684designer\u4e86\uff0c\u5f88\u591a\u8bbe\u8ba1\u89c4\u5219\u90fd\u662f\u5199\u7740\u8fd9\u4e2a\u53ea\u662fguideline\/reference\uff0c\u4e0d\u662fguarante<\/u>e\u7684\u3002\u4e00\u822c\u90fd\u662f\u628aGate\/Source\/Bulk\u77ed\u63a5\u5728\u4e00\u8d77\uff0c\u628aDrain\u7ed3\u5728I\/O\u7aef\u627f\u53d7ESD\u7684\u6d6a\u6d8c(surge)\u7535\u538b\uff0cNMOS\u79f0\u4e4b\u4e3aGGNMOS (Gate-Grounded NMOS)\uff0cPMOS\u79f0\u4e4b\u4e3aGDPMOS (Gate-to-Drain PMOS)\u3002<\/p>\n

\u4ee5NMOS\u4e3a\u4f8b\uff0c\u539f\u7406\u90fd\u662fGate\u5173\u95ed\u72b6\u6001\uff0cSource\/Bulk\u7684PN\u7ed3\u672c\u6765\u662f\u77ed\u63a50\u504f\u7684\uff0c\u5f53I\/O\u7aef\u6709\u5927\u7535\u538b\u65f6\uff0c\u5219Drain\/Bulk PN\u7ed3\u96ea\u5d29\u51fb\u7a7f\uff0c\u77ac\u95f4bulk\u6709\u5927\u7535\u6d41\u4e0e\u886c\u5e95\u7535\u963b\u5f62\u6210\u538b\u5dee\u5bfc\u81f4Bulk\/Source\u7684PN\u6b63\u504f\uff0c\u6240\u4ee5\u8fd9\u4e2aMOS\u7684\u5bc4\u751f\u6a2a\u5411NPN\u7ba1\u8fdb\u5165\u653e\u5927\u533a(\u53d1\u5c04\u7ed3\u6b63\u504f,\u96c6\u7535\u7ed3\u53cd\u504f)\uff0c\u6240\u4ee5\u5448\u73b0Snap-Back\u7279\u6027\uff0c\u8d77\u5230\u4fdd\u62a4\u4f5c\u7528\u3002PMOS\u540c\u7406\u63a8\u5bfc\u3002<\/p>\n

\"8b7a5c42-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

\u8fd9\u4e2a\u539f\u7406\u770b\u8d77\u6765\u7b80\u5355\uff0c\u4f46\u662f\u8bbe\u8ba1\u7684\u7cbe\u9ad3(know-how)\u662f\u4ec0\u4e48\uff1f\u600e\u4e48\u89e6\u53d1BJT\uff1f\u600e\u4e48\u7ef4\u6301Snap-back\uff1f\u600e\u4e48\u6491\u5230HBM>2KV or 4KV\uff1f<\/p>\n

\u5982\u4f55\u89e6\u53d1\uff1f\u5fc5\u987b\u6709\u8db3\u591f\u5927\u7684\u886c\u5e95\u7535\u6d41\uff0c\u6240\u4ee5\u540e\u6765\u53d1\u5c55\u5230\u4e86\u73b0\u5728\u666e\u904d\u91c7\u7528\u7684\u591a\u6307\u4ea4\u53c9\u5e76\u8054\u7ed3\u6784(multi-finger)\u3002\u4f46\u662f\u8fd9\u79cd\u7ed3\u6784\u4e3b\u8981\u6280\u672f\u95ee\u9898\u662f\u57fa\u533a\u5bbd\u5ea6\u589e\u52a0\uff0c\u653e\u5927\u7cfb\u6570\u51cf\u5c0f\uff0c\u6240\u4ee5Snap-back\u4e0d\u5bb9\u6613\u5f00\u542f\u3002\u800c\u4e14\u968f\u7740finger\u6570\u91cf\u589e\u591a\uff0c\u4f1a\u5bfc\u81f4\u6bcf\u4e2afinger\u4e4b\u95f4\u7684\u5747\u5300\u5f00\u542f\u53d8\u5f97\u5f88\u56f0\u96be\uff0c\u8fd9\u4e5f\u662fESD\u8bbe\u8ba1\u7684\u74f6\u9888\u6240\u5728\u3002<\/p>\n

\"8b83f914-ba4c-11ee-8b88-92fbcf53809c.jpg\"<\/p>\n

\u5982\u679c\u8981\u6539\u53d8\u8fd9\u79cd\u95ee\u9898\uff0c\u5927\u6982\u6709\u4e24\u79cd\u505a\u6cd5(\u56e0\u4e3atriger\u7684\u662f\u7535\u538b\uff0c\u6539\u5584\u7535\u538b\u8981\u4e48\u662f\u7535\u963b\u8981\u4e48\u662f\u7535\u6d41)\uff1a1\u3001\u5229\u7528SAB(SAlicide-Block)\u5728I\/O\u7684Drain\u4e0a\u5f62\u6210\u4e00\u4e2a\u9ad8\u963b\u7684non-Silicide\u533a\u57df\uff0c\u4f7f\u5f97\u6f0f\u6781\u65b9\u5757\u7535\u963b\u589e\u5927\uff0c\u800c\u4f7f\u5f97ESD\u7535\u6d41\u5206\u5e03\u66f4\u5747\u5300\uff0c\u4ece\u800c\u63d0\u9ad8\u6cc4\u653e\u80fd\u529b\uff1b2\u3001\u589e\u52a0\u4e00\u9053P-ESD (Inner-Pickup imp\uff0c\u7c7b\u4f3c\u4e0a\u9762\u7684\u63a5\u89e6\u5b54P+ ESD imp)\uff0c\u5728N+Drain\u4e0b\u9762\u6253\u4e00\u4e2aP+\uff0c\u964d\u4f4eDrain\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u538b\uff0c\u66f4\u65e9\u6709\u6bd4\u8f83\u591a\u7684\u96ea\u5d29\u51fb\u7a7f\u7535\u6d41(\u8be6\u89c1\u6587\u732e\u8bba\u6587: Inner Pickup on ESD of multi-finger NMOS.pdf)\u3002<\/p>\n

\u5bf9\u4e8eSnap-back\u7684ESD\u6709\u4e24\u4e2a\u5c0f\u5c0f\u7684\u5e38\u8bc6\u8981\u8ddf\u5927\u5bb6\u5206\u4eab\u4e00\u4e0b\uff1a<\/strong><\/p>\n

1)NMOS\u6211\u4eec\u901a\u5e38\u90fd\u80fd\u770b\u5230\u6bd4\u8f83\u597d\u7684Snap-back\u7279\u6027\uff0c\u4f46\u662f\u5b9e\u9645\u4e0aPMOS\u5f88\u96be\u6709snap-back\u7279\u6027\uff0c<\/strong>\u800c\u4e14PMOS\u8010ESD\u7684\u7279\u6027\u666e\u904d\u6bd4NMOS\u597d\uff0c\u8fd9\u4e2a\u9053\u7406\u540cHCI\u6548\u5e94\uff0c\u4e3b\u8981\u662f\u56e0\u4e3aNMOS\u51fb\u7a7f\u65f6\u5019\u4ea7\u751f\u7684\u662f\u7535\u5b50\uff0c\u8fc1\u79fb\u7387\u5f88\u5927\uff0c\u6240\u4ee5Isub<\/u>\u5f88\u5927\u5bb9\u6613\u4f7f\u5f97Bulk\/Source\u6b63\u5411\u5bfc\u901a\uff0c\u4f46\u662fPMOS\u5c31\u96be\u54af\u3002<\/p>\n

2) Trigger\u7535\u538b\/Hold\u7535\u538b: Trigger\u7535\u538b\u5f53\u7136\u5c31\u662f\u4e4b\u524d\u5c06\u7684snap-back\u7684\u7b2c\u4e00\u4e2a\u62d0\u70b9(Knee-point)\uff0c\u5bc4\u751fBJT\u7684\u51fb\u7a7f\u7535\u538b\uff0c<\/strong>\u800c\u4e14\u8981\u4ecb\u4e8eBVCEO\u4e0eBVCBO\u4e4b\u95f4\u3002\u800cHold\u7535\u538b\u5c31\u662f\u8981\u7ef4\u6301Snap-back\u6301\u7eedON\uff0c\u4f46\u662f\u53c8\u4e0d\u80fd\u8fdb\u5165\u6805\u9501(Latch-up)\u72b6\u6001\uff0c\u5426\u5219\u5c31\u8fdb\u5165\u4e8c\u6b21\u51fb\u7a7f(\u70ed\u51fb\u7a7f)\u800c\u635f\u574f\u4e86\u3002\u8fd8\u6709\u4e2a\u6982\u5ff5\u5c31\u662f\u4e8c\u6b21\u51fb\u7a7f\u7535\u6d41\uff0c\u5c31\u662f\u8fdb\u5165Latch-up\u4e4b\u540eI^2*R\u70ed\u91cf\u9aa4\u589e\u5bfc\u81f4\u7845\u878d\u5316\u4e86\uff0c\u800c\u8fd9\u4e2a\u5c31\u662f\u8981\u9650\u6d41\uff0c\u53ef\u4ee5\u901a\u8fc7\u63a7\u5236W\/L\uff0c\u6216\u8005\u589e\u52a0\u4e00\u4e2a\u9650\u6d41\u9ad8\u963b\uff0c\u6700\u7b80\u5355\u6700\u5e38\u7528\u7684\u65b9\u6cd5\u662f\u62c9\u5927Drain\u7684\u8ddd\u79bb\/\u62c9\u5927SAB\u7684\u8ddd\u79bb(ESD rule\u7684\u666e\u904d\u505a\u6cd5)\u3002<\/p>\n

3\u3001\u6805\u6781\u8026\u5408(Gate-Couple) ESD\u6280\u672f\uff1a\u6211\u4eec\u521a\u521a\u8bb2\u8fc7\uff0cMulti-finger\u7684ESD\u8bbe\u8ba1\u7684\u74f6\u9888\u662f\u5f00\u542f\u7684\u5747\u5300\u6027\uff0c\u5047\u8bbe\u6709<\/strong>10\u53eafinger\uff0c\u800c\u5728ESD \u653e\u7535\u53d1\u751f\u65f6\uff0c\u8fd910 \u652ffinger \u5e76\u4e0d\u4e00\u5b9a\u4f1a\u540c\u65f6\u5bfc\u901a(\u4e00\u822c\u662f\u56e0Breakdown \u800c\u5bfc\u901a)\uff0c\u5e38\u89c1\u5230\u53ea\u67092-3 \u652ffinger\u4f1a\u5148\u5bfc\u901a\uff0c\u8fd9\u662f\u56e0\u5e03\u5c40\u4e0a\u65e0\u6cd5\u4f7f\u6bcffinger\u7684\u76f8\u5bf9\u4f4d\u7f6e\u53ca\u62c9\u7ebf\u65b9\u5411\u5b8c\u5168\u76f8\u540c\u6240\u81f4\uff0c\u8fd92~3 \u652ffinger \u4e00\u5bfc\u901a\uff0cESD\u7535\u6d41\u4fbf\u96c6\u4e2d\u6d41\u5411\u8fd92~3\u652f\u7684finger\uff0c\u800c\u5176\u5b83\u7684finger \u4ecd\u662f\u4fdd\u6301\u5173\u95ed\u7684\uff0c\u6240\u4ee5\u5176ESD \u9632\u62a4\u80fd\u529b\u7b49\u6548\u4e8e\u53ea\u67092~3 \u652ffinger\u7684\u9632\u62a4\u80fd\u529b\uff0c\u800c\u975e10 \u652ffinger \u7684\u9632\u62a4\u80fd\u529b\u3002<\/p>\n

\u8fd9\u4e5f\u5c31\u662f\u4e3a\u4f55\u7ec4\u4ef6\u5c3a\u5bf8\u5df2\u7ecf\u505a\u5f97\u5f88\u5927\uff0c\u4f46ESD \u9632\u62a4\u80fd\u529b\u5e76\u672a\u5982\u9884\u671f\u822c\u5730\u4e0a\u5347\u7684\u4e3b\u8981\u539f\u56e0\uff0c\u589e\u6253\u9762\u79ef\u672a\u80fd\u9884\u671f\u5e26\u6765ESD\u589e\u5f3a\uff0c\u600e\u4e48\u529e\uff1f\u5176\u5b9e\u5f88\u7b80\u5355\uff0c\u5c31\u662f\u8981\u964d\u4f4eVt1(Trigger\u7535\u538b)\uff0c\u6211\u4eec\u901a\u8fc7\u6805\u6781\u589e\u52a0\u7535\u538b\u7684\u65b9\u5f0f\uff0c\u8ba9\u886c\u5e95\u5148\u5f00\u542f\u4ee3\u66ff\u51fb\u7a7f\u800c\u63d0\u524d\u5bfc\u901a\u4ea7\u751f\u886c\u5e95\u7535\u6d41\uff0c\u8fd9\u65f6\u5019\u5c31\u80fd\u591f\u8ba9\u5176\u4ed6finger\u4e5f\u4e00\u8d77\u5f00\u542f\u8fdb\u5165\u5bfc\u901a\u72b6\u6001\uff0c\u8ba9\u6bcf\u4e2afinger\u90fd\u6765\u627f\u53d7ESD\u7535\u6d41\uff0c\u771f\u6b63\u53d1\u6325\u5927\u9762\u79ef\u7684ESD\u4f5c\u7528\u3002<\/p>\n

\u4f46\u662f\u8fd9\u79cdGCNMOS\u7684ESD\u8bbe\u8ba1\u6709\u4e2a\u7f3a\u70b9\u662f\u6c9f\u9053\u5f00\u542f\u4e86\u4ea7\u751f\u4e86\u7535\u6d41\u5bb9\u6613\u9020\u6210\u6805\u6c27\u51fb\u7a7f\uff0c\u6240\u4ee5\u4ed6\u4e0d\u89c1\u7684\u662f\u4e00\u79cd\u5f88\u597d\u7684ESD\u8bbe\u8ba1\u65b9\u6848\uff0c\u800c\u4e14\u6709\u6e90\u533a\u8d8a\u5c0f\u5219\u6805\u538b\u7684\u5f71\u54cd\u8d8a\u5927\uff0c\u800c\u6709\u6e90\u533a\u8d8a\u5927\u5219snap-back\u8d8a\u96be\u5f00\u542f\uff0c\u6240\u4ee5\u5f88\u96be\u628a\u63e1\u3002<\/p>\n

4\u3001\u8fd8\u6709\u4e00\u79cd\u590d\u6742\u7684ESD\u4fdd\u62a4\u7535\u8def:\u00a0\u53ef\u63a7\u7845<\/u>\u6676\u95f8\u7ba1<\/u>(SCR: Silicon Controlled<\/u>\u00a0Rectifier)\uff0c\u5b83\u5c31\u662f\u6211\u4eec\u4e4b\u524d\u8bb2\u8fc7\u7684CMOS\u5bc4\u751f\u7684PNPN\u7ed3\u6784\u89e6\u53d1\u4ea7\u751fSnap-Back\u5e76\u4e14Latch-up\uff0c<\/strong>\u901a\u8fc7ON\/OFF\u5b9e\u73b0\u5bf9\u7535\u8def\u7684\u4fdd\u62a4\uff0c\u5927\u5bb6\u53ef\u4ee5\u56de\u987e\u4e00\u4e0b\uff0c\u53ea\u8981\u628a\u4e0a\u4e00\u7bc7\u91cc\u9762\u90a3\u4e9b\u6291\u5236LATCH-up\u7684factor\u60f3\u6cd5\u8ba9\u5176\u53d1\u751f\u5c31\u53ef\u4ee5\u4e86\uff0c\u4e0d\u8fc7\u53ea\u80fd\u9002\u7528\u4e8eLayout\uff0c\u4e0d\u80fd\u9002\u7528\u4e8eProcess\uff0c\u5426\u5219Latch-up\u53c8\u8981fail\u4e86\u3002<\/p>\n

\u6700\u540e\uff0cESD\u7684\u8bbe\u8ba1\u5b66\u95ee\u592a\u6df1\u4e86\uff0c\u6211\u8fd9\u91cc\u53ea\u662f\u629b\u7816\u5f15\u7389\u7ed9FAB\u7684\u4eba\u79d1\u666e<\/u>\u4e00\u4e0b\u4e86\uff0c\u57fa\u672c\u4e0aESD\u7684\u65b9\u6848\u6709\u5982\u4e0b\u51e0\u79cd:\u7535\u963b\u5206\u538b\u3001\u4e8c\u6781\u7ba1\u3001MOS\u3001\u5bc4\u751fBJT\u3001SCR(PNPN structure)\u7b49\u51e0\u79cd\u65b9\u6cd5\u3002\u800c\u4e14ESD\u4e0d\u4ec5\u548cDesign\u76f8\u5173\uff0c\u66f4\u548cFAB\u7684process\u76f8\u5173\uff0c\u800c\u4e14\u5b66\u95ee\u592a\u6df1\u4e86\uff0c\u6211\u4e5f\u4e0d\u662f\u5f88\u61c2\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

\u5148\u6765\u8c08\u9759\u7535\u653e\u7535(ESD: Electrostatic\u00a0Discharge)\u662f\u4ec0\u4e48\uff1f\u8fd9\u5e94\u8be5\u662f\u9020\u6210\u6240\u6709\u7535\u5b50\u5143\u5668\u4ef6\u6216 […]<\/p>\n","protected":false},"author":1,"featured_media":16787,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[21],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/16785"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=16785"}],"version-history":[{"count":1,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/16785\/revisions"}],"predecessor-version":[{"id":16802,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/16785\/revisions\/16802"}],"wp:featuredmedia":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/media\/16787"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=16785"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=16785"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=16785"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}