{"id":1299,"date":"2018-11-08T14:26:52","date_gmt":"2018-11-08T14:26:52","guid":{"rendered":""},"modified":"2018-11-08T22:27:38","modified_gmt":"2018-11-08T14:27:38","slug":"%e5%88%86%e6%9e%90mos%e7%ae%a1%e6%9c%aa%e6%9d%a5%e5%8f%91%e5%b1%95%e4%b8%8e%e9%9d%a2%e4%b8%b4%e7%9a%84%e6%8c%91%e6%88%98","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=1299","title":{"rendered":"\u5206\u6790MOS\u7ba1\u672a\u6765\u53d1\u5c55\u4e0e\u9762\u4e34\u7684\u6311\u6218"},"content":{"rendered":"\n\n\n\n
\n
\n
\n
\n\t\t\t\t\t\t\t\u3000\u968f\u7740\u96c6\u6210\u7535\u8def\u5de5\u827a\u5236\u7a0b\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u4e3a\u4e86\u63d0\u9ad8\u96c6\u6210\u7535\u8def\u7684\u96c6\u6210\u5ea6\uff0c\u540c\u65f6\u63d0\u5347\u5668\u4ef6\u7684\u5de5\u4f5c\u901f\u5ea6\u548c\u964d\u4f4e\u5b83\u7684\u529f\u8017\uff0cMOS\u7ba1\u7684\u7279\u5f81\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\uff0cMOS\u5668\u4ef6\u9762\u4e34\u4e00\u7cfb\u5217\u7684\u6311\u6218\u3002\u4f8b\u5982\u77ed\u6c9f\u9053\u6548\u5e94(ShortChannelEffect-SCE)\uff0c\u70ed\u8f7d\u6d41\u5b50\u6ce8\u5165\u6548\u5e94(HotCarrierInject-HCI)\u548c\u6805\u6c27\u5316\u5c42\u6f0f\u7535\u7b49\u95ee\u9898\u3002\u4e3a\u4e86\u514b\u670d\u8fd9\u4e9b\u6311\u6218\uff0c\u534a\u5bfc\u4f53\u4e1a\u754c\u4e0d\u65ad\u5f00\u53d1\u51fa\u4e00\u7cfb\u5217\u7684\u5148\u8fdb\u5de5\u827a\u6280\u672f\uff0c\u4f8b\u5982\u591a\u6676\u7845\u6805\u3001\u6e90\u6f0f\u79bb\u5b50\u6ce8\u5165\u81ea\u5bf9\u51c6\u3001LDD\u79bb\u5b50\u6ce8\u5165\u3001polycide\u3001Salicide\u3001SRD\u3001\u5e94\u53d8\u7845\u548cHKMG\u6280\u672f\u3002\u53e6\u5916\uff0c\u6676\u4f53\u7ba1\u4e5f\u4eceMOSFET\u6f14\u53d8\u4e3aFD-SOI\u3001BulkFinFET\u548cSOIFinFET\u3002<\/font>

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\n\t\t\t\t\t\t\t\t\t\t <\/div>\n

\t\t\t\t\t\t\t\t\t

\n\t\t\t\t\t\t\t\t\t\u3000\u30001\u3001\u94dd\u6805MOS\u7ba1

\n\t\t\t\t\t\t\t\t\t

\n\t\t\t\t\t\t\t\t\t\u3000\u3000MOS\u7ba1\u8bde\u751f\u4e4b\u521d\uff0c\u6805\u6781\u6750\u6599\u91c7\u7528\u91d1\u5c5e\u5bfc\u4f53\u6750\u6599\u94dd\uff0c\u56e0\u4e3a\u94dd\u5177\u6709\u975e\u5e38\u4f4e\u7684\u7535\u963b\uff0c\u5b83\u4e0d\u4f1a\u4e0e\u6c27\u5316\u7269\u53d1\u751f\u53cd\u5e94\uff0c\u5e76\u4e14\u5b83\u7684\u7a33\u5b9a\u6027\u975e\u5e38\u597d\u3002\u6805\u4ecb\u8d28\u6750\u6599\u91c7\u7528SiO2\uff0c\u56e0\u4e3aSiO2\u53ef\u4ee5\u4e0e\u7845\u886c\u5e95\u5f62\u6210\u975e\u5e38\u7406\u60f3\u7684Si-SiO2\u754c\u9762\u3002\u5982\u56fe1.13(a)\u6240\u793a\uff0c\u662f\u6700\u521d\u94dd\u6805\u7684MOS\u7ba1\u7ed3\u6784\u56fe\u3002<\/font>

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\n\t\t\t\t\t\t\t\t\t\t\t\u3000\u3000\u968f\u7740MOS\u5668\u4ef6\u7684\u7279\u5f81\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\uff0c\u94dd\u6805\u4e0e\u6e90\u6f0f\u6269\u6563\u533a\u7684\u5957\u523b\u4e0d\u51c6\u95ee\u9898\u53d8\u5f97\u8d8a\u6765\u8d8a\u4e25\u91cd\uff0c\u6e90\u6f0f\u4e0e\u6805\u91cd\u53e0\u8bbe\u8ba1\u5bfc\u81f4\uff0c\u6e90\u6f0f\u4e0e\u6805\u4e4b\u95f4\u7684\u5bc4\u751f\u7535\u5bb9\u8d8a\u6765\u8d8a\u4e25\u91cd\uff0c\u534a\u5bfc\u4f53\u4e1a\u754c\u5229\u7528\u591a\u6676\u7845\u6805\u4ee3\u66ff\u94dd\u6805\u3002\u591a\u6676\u7845\u6805\u5177\u6709\u4e09\u65b9\u9762\u7684\u4f18\u70b9\uff1a\u7b2c\u4e00\u4e2a\u4f18\u70b9\u662f\u4e0d\u4f46\u591a\u6676\u7845\u4e0e\u7845\u5de5\u827a\u517c\u5bb9\uff0c\u800c\u4e14\u591a\u6676\u7845\u53ef\u4ee5\u8010\u9ad8\u6e29\u9000\u706b\uff0c\u9ad8\u6e29\u9000\u706b\u662f\u79bb\u5b50\u6ce8\u5165\u7684\u8981\u6c42;\u7b2c\u4e8c\u4e2a\u4f18\u70b9\u662f\u591a\u6676\u7845\u6805\u662f\u5728\u6e90\u6f0f\u79bb\u5b50\u6ce8\u5165\u4e4b\u524d\u5f62\u6210\u7684\uff0c\u6e90\u6f0f\u79bb\u5b50\u6ce8\u5165\u65f6\uff0c\u591a\u6676\u7845\u6805\u53ef\u4ee5\u4f5c\u4e3a\u906e\u853d\u5c42\uff0c\u6240\u4ee5\u79bb\u5b50\u53ea\u4f1a\u6ce8\u5165\u591a\u6676\u7845\u6805\u4e24\u4fa7\uff0c\u6240\u4ee5\u6e90\u6f0f\u6269\u6563\u533a\u4e0e\u591a\u6676\u7845\u6805\u662f\u81ea\u5bf9\u51c6\u7684;\u7b2c\u4e09\u4e2a\u4f18\u70b9\u662f\u53ef\u4ee5\u901a\u8fc7\u63ba\u6742N\u578b\u548cP\u578b\u6742\u8d28\u6765\u6539\u53d8\u5176\u529f\u51fd\u6570\uff0c\u4ece\u800c\u8c03\u8282\u5668\u4ef6\u7684\u9608\u503c\u7535\u538b\u3002\u56e0\u4e3aMOS\u5668\u4ef6\u7684\u9608\u503c\u7535\u538b\u7531\u886c\u5e95\u6750\u6599\u548c\u6805\u6750\u6599\u529f\u51fd\u6570\u7684\u5dee\u5f02\u51b3\u5b9a\u7684\uff0c\u591a\u6676\u7845\u5f88\u597d\u5730\u89e3\u51b3\u4e86CMOS\u6280\u672f\u4e2d\u7684NMOS\u548cPMOS\u9608\u503c\u7535\u538b\u7684\u8c03\u8282\u95ee\u9898\u3002\u5982\u56fe1.13(b)\u6240\u793a\uff0c\u662f\u591a\u6676\u7845\u6805\u7684MOS\u7ba1\u7ed3\u6784\u56fe\u3002<\/font>

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\u3000\u3000\u591a\u6676\u7845\u6805\u7684\u7f3a\u70b9\u662f\u7535\u963b\u7387\u9ad8\uff0c\u867d\u7136\u53ef\u4ee5\u901a\u8fc7\u91cd\u63ba\u6742\u6765\u964d\u4f4e\u5b83\u7684\u7535\u963b\u7387\uff0c\u4f46\u662f\u5b83\u7684\u7535\u963b\u7387\u4f9d\u7136\u5f88\u9ad8\uff0c\u539a\u5ea63K\u57c3\u7c73\u7684\u591a\u6676\u7845\u7684\u65b9\u5757\u7535\u963b\u9ad8\u8fbe36ohm\/sq\u3002\u867d\u7136\u9ad8\u7535\u963b\u7387\u7684\u591a\u6676\u7845\u6805\u5bf9MOS\u7ba1\u5668\u4ef6\u7684\u76f4\u6d41\u7279\u6027\u662f\u6ca1\u6709\u5f71\u54cd\u7684\uff0c\u4f46\u662f\u5b83\u4e25\u91cd\u5f71\u54cd\u4e86MOS\u7ba1\u5668\u4ef6\u7684\u9ad8\u9891\u7279\u6027\uff0c\u7279\u522b\u662f\u968f\u7740MOS\u7ba1\u5668\u4ef6\u7684\u7279\u5f81\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\u5230\u4e9a\u5fae\u7c73(1um≥L≥0.35um)\uff0c\u591a\u6676\u7845\u6805\u7535\u963b\u7387\u9ad8\u7684\u95ee\u9898\u53d8\u5f97\u8d8a\u53d1\u4e25\u91cd\u3002\u4e3a\u4e86\u964d\u4f4e\u591a\u6676\u7845\u6805\u7684\u7535\u963b\uff0c\u534a\u5bfc\u4f53\u4e1a\u754c\u5229\u7528\u591a\u6676\u7845\u548c\u91d1\u5c5e\u7845\u5316\u7269(polycide)\u7684\u53cc\u5c42\u6750\u6599\u4ee3\u66ff\u591a\u6676\u7845\u6805\uff0c\u4ece\u800c\u964d\u4f4e\u591a\u6676\u7845\u6805\u7684\u7535\u963b\uff0cPolycide\u7684\u65b9\u5757\u7535\u963b\u53ea\u67093ohm\/sq\u3002\u534a\u5bfc\u4f53\u4e1a\u754c\u901a\u7528\u7684\u91d1\u5c5e\u7845\u5316\u7269\u6750\u6599\u662fWSi2\u3002\u5982\u56fe1.14(a)\u6240\u793a\uff0c\u662f\u591a\u6676\u7845\u548c\u91d1\u5c5e\u7845\u5316\u7269\u6805\u7684MOS\u7ba1\u7ed3\u6784\u56fe\u3002<\/font>

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\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t\u5206\u6790mos\u7ba1\u672a\u6765\u53d1\u5c55\u4e0e\u9762\u4e34\u7684\u6311\u6218<\/span><\/div>\n<\/p><\/div>\n
\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t0<\/span><\/div>\n<\/p><\/div>\n<\/p><\/div>\n
\n\t\t\t\t\t\t\t\t\t\t\t\t\t <\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/p><\/div>\n<\/td>\n<\/tr>\n
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<\/p>\n","protected":false},"excerpt":{"rendered":"

\u968f\u7740\u96c6\u6210\u7535\u8def\u5de5\u827a\u5236\u7a0b\u6280\u672f\u7684\u4e0d\u65ad\u53d1\u5c55\uff0c\u4e3a\u4e86\u63d0\u9ad8\u96c6\u6210\u7535\u8def\u7684\u96c6\u6210\u5ea6\uff0c\u540c\u65f6\u63d0\u5347\u5668\u4ef6\u7684\u5de5\u4f5c\u901f\u5ea6\u548c\u964d\u4f4e\u5b83\u7684\u529f\u8017\uff0cMOS\u7ba1\u7684\u7279\u5f81\u5c3a\u5bf8\u4e0d\u65ad\u7f29\u5c0f\uff0cMOS\u5668\u4ef6\u9762\u4e34\u4e00\u7cfb\u5217\u7684\u6311\u6218\u3002\u4f8b\u5982\u77ed\u6c9f\u9053\u6548\u5e94<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[15],"tags":[],"_links":{"self":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1299"}],"collection":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=1299"}],"version-history":[{"count":0,"href":"http:\/\/www.szryc.com\/index.php?rest_route=\/wp\/v2\/posts\/1299\/revisions"}],"wp:attachment":[{"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=1299"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=1299"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.szryc.com\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=1299"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}