{"id":11149,"date":"2023-02-22T20:26:40","date_gmt":"2023-02-22T12:26:40","guid":{"rendered":"http:\/\/www.szryc.com\/?p=11149"},"modified":"2023-02-22T20:26:40","modified_gmt":"2023-02-22T12:26:40","slug":"tsv%e5%88%b6%e9%80%a0%e5%85%b3%e9%94%ae%e5%b7%a5%e8%89%ba%e6%b5%81%e7%a8%8b-tsv%e5%85%b3%e9%94%ae%e8%ae%be%e5%a4%87%e5%85%b7%e4%bd%93%e5%ba%94%e7%94%a8","status":"publish","type":"post","link":"http:\/\/www.szryc.com\/?p=11149","title":{"rendered":"TSV\u5236\u9020\u5173\u952e\u5de5\u827a\u6d41\u7a0b TSV\u5173\u952e\u8bbe\u5907\u5177\u4f53\u5e94\u7528"},"content":{"rendered":"

TSV \u662f\u76ee\u524d\u534a\u5bfc\u4f53\u5236\u9020<\/u>\u4e1a\u4e2d\u6700\u4e3a\u5148\u8fdb\u7684\u6280\u672f\u4e4b\u4e00\uff0c\u5df2\u7ecf\u5e94\u7528\u4e8e\u5f88\u591a\u4ea7\u54c1\u751f\u4ea7\u3002\u5b9e\u73b0\u5176\u5236\u7a0b\u7684\u5173\u952e\u8bbe\u5907\u9009\u62e9\u4e0e\u5de5\u827a\u9009\u62e9\u606f\u606f\u76f8\u5173\uff0c \u5728\u67d0\u79cd\u7a0b\u5ea6\u4e0a\u76f4\u63a5\u51b3\u5b9a\u4e86 TSV \u7684\u6027\u80fd\u4f18\u52a3\u3002\u672c\u6587\u7b14\u8005\u5728\u7efc\u8ff0 TSV \u7684\u5de5\u827a\u6d41\u7a0b\u548c\u5173\u952e\u6280\u672f\u57fa\u7840\u4e0a , \u5bf9\u5176\u4e2d\u6df1\u5b54\u523b\u8680\u3001\u6c14\u76f8\u6c89\u79ef\u3001\u901a\u5b54\u586b\u5145\u3001 \u5316\u5b66\u673a\u68b0<\/u>\u629b\u5149\uff08CMP\uff09\u7b49\u51e0\u79cd\u5173\u952e\u5de5\u827a\u8bbe\u5907\u8fdb\u884c\u4e86\u8be6\u7ec6\u4ecb\u7ecd\uff0c\u5bf9\u5728\u786e\u4fdd\u6ee1\u8db3\u751f\u4ea7\u5de5\u827a\u8981\u6c42\u7684\u524d\u63d0\u4e0b\u4e0d\u540c\u8bbe\u5907\u7684\u9009\u578b\u5e94\u7528\u53ca\u5bf9\u8bbe\u5907\u5b89\u88c5\u7684\u5382 \u52a1\u9700\u6c42\u63d0\u51fa\u4e86\u76f8\u5173\u5efa\u8bae\uff0c\u540c\u65f6\u5bf9 TSV \u8bbe\u5907\u505a\u51fa\u56fd\u4ea7\u5316\u5c55\u671b\u3002<\/p>\n

\u7845\u901a\u5b54\uff08TSV\uff09\u662f\u76ee\u524d\u534a\u5bfc\u4f53<\/u>\u5236\u9020\u4e1a\u4e2d\u6700\u4e3a\u5148\u8fdb\u7684\u6280 \u672f\u4e4b\u4e00\uff0c\u56e0\u5176\u5177\u6709\u66f4\u597d\u7684\u7535\u6027\u80fd\u3001\u66f4\u4f4e\u7684\u529f\u8017\u3001\u66f4\u5bbd\u7684 \u5e26\u5bbd\u3001\u66f4\u9ad8\u7684\u5bc6\u5ea6\u3001\u66f4\u5c0f\u7684\u5916\u5f62\u5c3a\u5bf8\u3001\u66f4\u8f7b\u7684\u8d28\u91cf\u7b49\u4f18\u52bf\uff0c \u5df2\u9010\u6b65\u6210\u4e3a\u672a\u6765\u53d1\u5c55\u7684\u70ed\u70b9\u4e0e\u65b9\u5411\uff0c\u662f\u5b9e\u73b0\u7535\u8def\u5c0f\u578b\u5316\u3001 \u9ad8\u5bc6\u5ea6\u3001\u591a\u529f\u80fd\u5316\u7684\u9996\u9009\u89e3\u51b3\u65b9\u6848\uff0c\u5176\u5728\u56fd\u5185\u5e94\u7528\u6b63\u65b9 \u5174\u672a\u827e\u3002\u5177\u5907\u8be5\u6280\u672f\u751f\u4ea7\u80fd\u529b\uff0c\u5bf9\u56fd\u5185\u5fae\u7535\u5b50<\/u>\u52a0\u5de5\u5236\u9020 \u53d1\u5c55\u5177\u6709\u91cd\u5927\u610f\u4e49\u3002<\/p>\n

TSV \u6280\u672f\u4e3b\u8981\u6d89\u53ca\u4ee5\u4e0b\u51e0\u4e2a\u5173\u952e\u5de5\u827a\uff1a\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680\uff08DRIE\uff09\u5236\u4f5c TSV \u5b54\uff0c\u7b49\u79bb\u5b50\u589e\u5f3a\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08PECVD\uff09 \u5236\u4f5c\u4ecb\u7535\u5c42\uff0c\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u5236\u4f5c\u963b\u6321\u5c42\u548c\u79cd\u5b50\u5c42\uff0c \u7535\u9540\u94dc\uff08Cu\uff09\u586b\u5b54\uff0c\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u53bb\u9664\u591a\u4f59\u7684\u91d1\u5c5e\uff1b\u53e6\u5916\u7531\u4e8e\u82af\u7247<\/u>\u5806\u53e0\u96c6\u6210\u7684\u9700\u8981\uff0c\u5bf9\u4e8e 3D IC\/Si \u96c6\u6210\u800c\u8a00\uff0c \u8fd8\u6709\u6676\u5706\u7684\u51cf\u8584\u548c\u8584\u6676\u952e\u5408\u7b49\u5173\u952e\u5de5\u827a\u3002\u6bcf\u4e00\u6b65\u5de5\u827a\u90fd \u6709\u76f8\u5f53\u7684\u6280\u672f\u96be\u5ea6\u3002\u800c\u8fd9\u4e9b\u5173\u952e\u5de5\u827a\u6d89\u53ca\u7684\u8bbe\u5907\u9009\u62e9\u4e0e \u5de5\u827a\u9009\u62e9\u606f\u606f\u76f8\u5173\uff0c\u5728\u6574\u4e2a\u751f\u4ea7\u73af\u8282\u4e2d\u8d77\u7740\u5173\u952e\u7684\u4f5c\u7528\uff0c \u5728\u67d0\u79cd\u7a0b\u5ea6\u4e0a\u76f4\u63a5\u51b3\u5b9a\u4e86 TSV \u7684\u6027\u80fd\u4f18\u52a3\u3002<\/p>\n

1\u3001TSV\u5236\u9020\u5173\u952e\u5de5\u827a\u6d41\u7a0b<\/strong><\/p>\n

TSV \u5236\u9020\u7684\u4e3b\u8981\u5de5\u827a\u6d41\u7a0b\u4f9d\u6b21\u4e3a\uff1a\u6df1\u53cd\u5e94\u79bb\u5b50\u523b\u8680 \uff08DRIE\uff09\u6cd5\u884c\u6210\u901a\u5b54\uff1b\u4f7f\u7528\u5316\u5b66\u6c89\u79ef\u7684\u65b9\u6cd5\u6c89\u79ef\u5236\u4f5c\u7edd \u7f18\u5c42\u3001\u4f7f\u7528\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u7684\u65b9\u6cd5\u6c89\u79ef\u5236\u4f5c\u963b\u6321\u5c42\u548c\u79cd\u5b50 \u5c42\uff1b\u9009\u62e9\u4e00\u79cd\u7535\u9540\u65b9\u6cd5\u5728\u76f2\u5b54\u4e2d\u8fdb\u884c\u94dc\u586b\u5145\uff1b\u4f7f\u7528\u5316\u5b66 \u548c\u673a\u68b0\u629b\u5149\uff08CMP\uff09\u6cd5\u53bb\u9664\u591a\u4f59\u7684\u94dc\u3002\u800c\u4e00\u65e6\u5b8c\u6210\u4e86\u94dc\u586b\u5145\uff0c \u5219\u9700\u8981\u5bf9\u6676\u5706\u8fdb\u884c\u51cf\u8584\uff1b\u6700\u540e\u662f\u8fdb\u884c\u6676\u5706\u952e\u5408\u3002\u6574\u4f53\u5de5 \u827a\u8def\u7ebf\u4f1a\u6839\u636e\u7279\u5b9a\u9700\u6c42\u5bf9\u5178\u578b\u5de5\u827a\u8fdb\u884c\u53d8\u52a8\u3002<\/p>\n

2\u3001TSV\u5173\u952e\u5de5\u827a\u8bbe\u5907\u53ca\u7279\u70b9<\/strong><\/p>\n

\u5bf9\u5e94 TSV \u751f \u4ea7 \u6d41 \u7a0b\uff0c \u4f1a \u6d89 \u53ca \u5230 \u6df1 \u5b54 \u523b \u8680\u3001PVD\u3001 CVD\u3001\u94dc\u586b\u5145\u3001\u5fae\u51f8\u70b9\u53ca\u7535\u9540\u3001\u6e05\u6d17\u3001\u51cf\u8584\u3001\u952e\u5408\u7b49\u4e8c\u5341 \u4f59\u79cd\u8bbe\u5907\uff0c\u5176\u4e2d\u6df1\u5b54\u523b\u8680\u3001\u6c14\u76f8\u6c89\u79ef\u3001\u94dc\u586b\u5145\u3001CMP \u53bb\u9664 \u591a\u4f59\u7684\u91d1\u5c5e\u3001\u6676\u5706\u51cf\u8584\u3001\u6676\u5706\u952e\u5408\u7b49\u5de5\u5e8f\u6d89\u53ca\u7684\u8bbe\u5907\u6700 \u4e3a\u5173\u952e\u3002\u00a0<\/p>\n

2.1 \u6df1\u5b54\u523b\u8680\u8bbe\u5907\u00a0<\/strong><\/p>\n

\u6df1\u5b54\u523b\u8680\u662f TSV \u7684\u5173\u952e\u5de5\u827a\uff0c\u76ee\u524d\u9996\u9009\u6280\u672f\u662f\u57fa\u4e8e\u00a0Bosch<\/u>\u00a0\u5de5\u827a\u7684\u5e72\u6cd5\u523b\u8680\u3002\u6df1\u53cd\u5e94\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u5c31\u662f\u611f\u5e94\u00a0\u8026\u5408<\/u>\u9ad8\u5bc6\u5ea6\u7b49\u79bb\u5b50\u4f53\u5e72\u6cd5\u523b\u8680\u673a\uff08Inducti<\/u>vely Coupled \u00a0Plasma Etcher\uff09\uff0c\u5b83\u91c7\u7528\u534a\u5bfc\u4f53\u523b\u8680\u673a\u7684\u6210\u719f\u6280\u672f\uff0c\u72ec \u7279\u8bbe\u8ba1\u7684\u53cc\u7b49\u79bb\u5b50\u4f53\u6e90\uff0c\u5b9e\u73b0\u4e86\u5bf9\u8154\u5ba4\u5185\u7b49\u79bb\u5b50\u4f53\u5bc6\u5ea6 \u7684\u5747\u5300\u63a7\u5236\uff0c\u6ee1\u8db3\u7845\u9ad8\u6df1\u5bbd\u6bd4\u523b\u8680\u5de5\u827a\u7684\u8981\u6c42\u3002\u5177\u6709\u7a33 \u5b9a\u53ef\u9760\u7684\u5de5\u827a\u6027\u80fd\u3001\u5bbd\u9614\u7684\u5de5\u827a\u7a97\u53e3\u548c\u826f\u597d\u7684\u5de5\u827a\u517c\u5bb9 \u6027\uff0c\u7528\u4e8e\u6676\u7247\u7684\u9ad8\u6df1\u5bbd\u6bd4\u523b\u8680\u3002<\/p>\n

2.2 \u6c14\u76f8\u6c89\u79ef\u8bbe\u5907\u00a0<\/strong><\/p>\n

\u6c14\u76f8\u6c89\u79ef\u8bbe\u5907\u4e3b\u8981\u7528\u4e8e\u8584\u819c\u7535\u8def\u8868\u9762\u7684\u9ad8\u4f4e\u9891\u4f4e\u5e94 \u529b\u6c27\u5316\u7845\u7b49\u8584\u819c\u6dc0\u79ef\u3002\u8bbe\u5907\u5177\u6709\u4f4e\u6e29\u00a0TE<\/u>OS \u5de5\u827a\u6c89\u79ef\u6c27\u5316 \u7845\u8584\u819c\uff0c\u5e94\u529b\u6613\u8c03\u63a7\uff0c\u9002\u7528\u4e8e\u8584\u819c\u7535\u8def\u5236\u9020\u4e2d\u4fdd\u62a4\u819c\u5c42 \u7684\u6c89\u79ef\u3002\u8bbe\u5907\u5e94\u5177\u6709\u9884\u771f\u7a7a\u5ba4\u3001\u57fa\u7247\u4f20\u9001\u6a21\u5757\u4ee5\u53ca\u5de5\u827a \u6a21\u5757\u7b49\uff0c\u4f20\u7247\u53ca\u5de5\u827a\u8fc7\u7a0b\u81ea\u52a8\u5316\u3002\u00a0<\/p>\n

\u7edd\u7f18\u5c42\u505a\u597d\u540e\uff0c\u901a\u8fc7\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u6cd5\uff08PVD\uff09\u6c89\u79ef\u91d1 \u5c5e\u6269\u6563\u963b\u6321\u5c42\u548c\u79cd\u5b50\u5c42\uff0c\u4e3a\u540e\u7eed\u7684\u94dc\u586b\u5145\u505a\u597d\u51c6\u5907\u3002\u540e \u7eed\u7684\u7535\u9540\u94dc\u586b\u5145\u8981\u6c42 TSV \u4fa7\u58c1\u548c\u5e95\u90e8\u5177\u6709\u8fde\u7eed\u7684\u963b\u6321\u5c42 \u548c\u79cd\u5b50\u5c42\u3002\u79cd\u5b50\u5c42\u7684\u8fde\u7eed\u6027\u548c\u5747\u5300\u6027\u88ab\u8ba4\u4e3a\u662f TSV \u94dc\u586b \u5145\u6700\u91cd\u8981\u7684\u5f71\u54cd\u56e0\u7d20\u3002\u6839\u636e\u7845\u901a\u5b54\u7684\u5f62\u72b6\u3001\u6df1\u5bbd\u6bd4\u53ca\u6c89 \u79ef\u65b9\u6cd5\u4e0d\u540c\uff0c\u79cd\u5b50\u5c42\u7684\u7279\u70b9\u4e5f\u5404\u6709\u4e0d\u540c\uff0c\u79cd\u5b50\u5c42\u6c89\u79ef\u7684 \u539a\u5ea6\u3001\u5747\u5300\u6027\u548c\u7c98\u5408\u5f3a\u5ea6\u662f\u5f88\u91cd\u8981\u7684\u6307\u6807\u3002\u00a0<\/p>\n

2.3 \u94dc\u586b\u5145\u8bbe\u5907\u00a0<\/strong><\/p>\n

\u6df1\u5b54\u91d1\u5c5e\u5316\u7535\u9540\u8bbe\u5907\u7528\u4e8e\u65b0\u4e00\u4ee3\u9ad8\u9891\u7ec4\u4ef6\u9ad8\u6df1\u5bbd\u6bd4 \u901a\u5b54\u586b\u5b54\u7535\u9540\u94dc\u5de5\u827a\uff0c\u89e3\u51b3\u9ad8\u6df1\u5bbd\u6bd4\u5fae\u5b54\u5185\u7684\u91d1\u5c5e\u5316\u95ee \u9898\uff0c\u63d0\u9ad8\u4e92\u8054\u5b54\u7684\u53ef\u9760\u6027\u3002TSV \u586b\u5b54\u9540\u94dc\u5de5\u5e8f\u662f\u6574\u4e2a TSV \u5de5\u827a\u91cc\u6700\u6838\u5fc3\u3001\u96be\u5ea6\u6700\u5927\u7684\u5de5\u827a\uff0c\u5bf9\u8bbe\u5907\u7684\u8981\u6c42\u6bd4\u8f83\u9ad8\uff0c \u6210\u719f\u7684\u7528\u4e8e TSV \u586b\u5b54\u9540\u94dc\u7684\u8bbe\u5907\u4ef7\u683c\u6602\u8d35\u3002<\/p>\n

2.4 \u51cf\u8584\u629b\u5149\u8bbe\u5907\u00a0<\/strong><\/p>\n

\u4e00\u65e6\u5b8c\u6210\u4e86\u94dc\u586b\u5145\uff0c\u5219\u9700\u8981\u5bf9\u6676\u5706\u8fdb\u884c\u51cf\u8584\u629b\u5149\u3002TSV \u8981\u6c42\u6676\u5706\u51cf\u8584\u81f3 50\u03bcm \u751a\u81f3\u66f4\u8584\uff0c\u8981\u4f7f\u7845\u5b54\u5e95\u90e8\u7684\u94dc \u66b4\u9732\u51fa\u6765\uff0c\u4e3a\u4e0b\u4e00\u6b65\u7684\u4e92\u8fde\u505a\u51c6\u5907\u3002\u76ee\u524d\u6676\u5706\u51cf\u8584\u53ef\u4ee5 \u901a\u8fc7\u673a\u68b0\u7814\u78e8\u3001\u5316\u5b66\u673a\u68b0\u629b\u5149\u3001\u6e7f\u6cd5\u53ca\u5e72\u6cd5\u5316\u5b66\u5904\u7406\u7b49 \u4e0d\u540c\u7684\u52a0\u5de5\u5de5\u5e8f\u6765\u5b9e\u73b0\u3002\u4f46\u6676\u5706\u5f88\u96be\u5bb9\u5fcd\u51cf\u8584\u8fc7\u7a0b\u4e2d\u7684 \u78e8\u524a\u5bf9\u6676\u5706\u7684\u635f\u4f24\u53ca\u5185\u5728\u5e94\u529b\uff0c\u5176\u521a\u6027\u4e5f\u96be\u4ee5\u4f7f\u6676\u5706\u4fdd \u6301\u539f\u6709\u7684\u5e73\u6574\u72b6\u6001\uff0c\u540c\u65f6\u540e\u7eed\u5de5\u827a\u7684\u6676\u5706\u4f20\u9012\u3001\u642c\u9001\u4e5f\u9047\u5230\u4e86\u5f88\u5927\u7684\u95ee\u9898\u3002\u76ee\u524d\u4e1a\u754c\u7684\u591a\u91c7\u7528\u4e00\u4f53\u673a\u7684\u601d\u8def\uff0c \u5c06\u6676\u5706\u7684\u78e8\u524a\u3001\u629b\u5149\u3001\u8d34\u7247\u7b49\u5de5\u5e8f\u96c6\u5408\u5728\u4e00\u53f0\u8bbe\u5907\u5185\u3002\u00a0<\/p>\n

3\u3001TSV\u5173\u952e\u8bbe\u5907\u5177\u4f53\u5e94\u7528<\/strong><\/p>\n

TSV \u5173\u952e\u5de5\u827a\u8bbe\u5907\u7cbe\u5bc6\u590d\u6742\uff0c\u4ef7\u683c\u6602\u8d35\uff0c\u4e0d\u540c\u8bbe\u5907\u4f9b \u5e94\u5546\u6240\u91c7\u7528\u4e0d\u540c\u7684\u5de5\u827a\u65b9\u6cd5\uff0c\u5bf9\u9644\u5c5e\u8bbe\u5907\u9009\u62e9\u3001\u5382\u52a1\u6761 \u4ef6\u914d\u5957\u3001\u5b89\u5168\u73af\u5883\u7ba1\u7406\u7b49\u90fd\u6709\u5f88\u5927\u7684\u5f71\u54cd\u3002\u73b0\u6839\u636e\u5b9e\u9645 \u7684\u5de5\u827a\u9700\u6c42\u3001\u6280\u672f\u6761\u4ef6\uff0c\u4ee5\u4e00\u5957\u6210\u719f TSV \u751f\u4ea7\u7ebf\u8bbe\u5907\u4e3a \u6848\u4f8b\uff0c\u63a8\u8350<\/u>\u9002\u5b9c\u7684 TSV \u8bbe\u5907\u3002\u56fd\u5185\u5916\u8bbe\u5907\u4ef7\u683c\u5dee\u8ddd\u8f83\u5927\uff0c \u7531\u4e8e\u6b64\u7c7b\u540c\u65f6\u8003\u8651\u5230\u56fd\u5916\u7981\u8fd0\u98ce\u9669\uff0c\u5728\u9047\u5230\u56fd\u5185\u6709\u53ef\u63d0 \u4f9b\u5de5\u827a\u8bbe\u5907\u751f\u4ea7\u5546\u65f6\uff0c\u6211\u4eec\u5e94\u8be5\u5bf9\u56fd\u5185\u8bbe\u5907\u7684\u5de5\u827a\u65b9\u6cd5\u3001 \u53ef\u9760\u6027\u3001\u670d\u52a1\u4fdd\u969c\u3001\u7528\u6237\u8bc4\u4ef7\u7b49\u65b9\u9762\u8fdb\u884c\u7279\u522b\u8003\u5bdf\uff0c\u5728 \u786e\u4fdd\u6ee1\u8db3\u751f\u4ea7\u5de5\u827a\u8981\u6c42\u7684\u524d\u63d0\u4e0b\u4f18\u5148\u63a8\u8350\u9009\u62e9\u56fd\u4ea7\u8bbe\u5907\u3002<\/p>\n

3.1 \u6df1\u53cd\u5e94\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u9009\u578b\u5e94\u7528\u00a0<\/strong><\/p>\n

\u672c\u6848\u4f8b\u5b9e\u9645\u751f\u4ea7\u5e94\u7528\u4e2d\u7684\u6df1\u5b54\u523b\u8680\u8bbe\u5907\u662f\u7528\u4e8e\u65b0\u4e00 \u4ee3\u9ad8\u5bc6\u5ea6\u5c01\u88c5\u57fa\u677f\u7684\u5fae\u7eb3\u52a0\u5de5\uff0c\u76ee\u7684\u662f\u89e3\u51b3\u73b0\u6709\u6e7f\u6cd5\u523b \u8680\u7684\u7cbe\u5ea6\u548c\u6210\u54c1\u7387\u95ee\u9898\uff0c\u4f7f\u7528\u6df1\u53cd\u5e94\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u5b8c \u6210\u7cbe\u7ec6\u6df1\u69fd\u3001\u9ad8\u6df1\u5bbd\u6bd4\u5fae\u7eb3\u901a\u5b54\u7684\u9ad8\u7cbe\u5ea6\u5e72\u6cd5\u523b\u8680\u3002\u5177 \u4f53\u8981\u6c42\u652f\u6301\u6676\u5706\u5c3a\u5bf8\u6700\u5927 8 \u82f1\u5bf8\u5411\u4e0b\u517c\u5bb9\uff0c\u5728\u4e00\u822c\u6307\u6807 \u57fa\u7840\u4e0a\u8981\u6c42\u523b\u8680\u5b54\u5f84\u2264 20\u03bcm\uff0c\u7cbe\u5ea6\u4f18\u4e8e \u00b15%\uff0c\u523b\u8680\u6df1 \u5ea6\u2265 200\u03bcm\u3002<\/p>\n

\u76ee\u524d\u56fd\u5916\u4e3b\u6d41\u6df1\u7845\u523b\u8680\u8bbe\u5907\u4e3b\u8981\u7531\u7f8e\u56fd\u5e94\u7528\u6750\u6599\u3001 \u6cdb\u6797\u534a\u5bfc\u4f53\u7b49\u8bbe\u5907\u5382\u5546\u63a7\u5236\u3002\u4f46\u8fd1\u5e74\u6765\uff0c\u56fd\u5185\u5fae\u7535\u5b50\u8bbe \u5907\u5382\u5bb6\u8fdb\u6b65\u60ca\u4eba\uff0c\u4e2d\u5fae\u534a\u5bfc\u4f53\u8bbe\u5907\u6709\u9650\u516c\u53f8\u3001\u5317\u65b9\u534e\u521b \u5fae\u7535\u5b50\u88c5\u5907\u6709\u9650\u516c\u53f8\u7b49\u63a8\u51fa\u7684\u7b49\u79bb\u5b50\u523b\u8680\u673a\uff0c\u5747\u53ef\u5b9e\u73b0 \u9ad8\u6df1\u5bbd\u6bd4\u523b\u8680\uff0c\u6ee1\u8db3\u7edd\u5927\u591a\u6570\u751f\u4ea7\u5de5\u827a\u9700\u6c42\uff0c\u5177\u6709\u5b9e\u73b0 \u4f18\u826f\u7684\u4fa7\u58c1\u5f62\u8c8c\u63a7\u5236\u3001\u7a33\u5b9a\u7684\u5747\u5300\u6027\u3001\u6781\u9ad8\u7684\u523b\u8680\u9009\u62e9 \u6bd4\u3002\u5728\u540e\u7eed\u7684\u8bbe\u5907\u91c7\u8d2d\u8c03\u7814\u4e2d\uff0c\u901a\u8fc7\u8bd5\u7247\u9a8c\u8bc1\uff0c\u5317\u65b9\u534e \u521b\u751f\u4ea7\u7684\u6df1\u53cd\u5e94\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u53ef\u4ee5\u6ee1\u8db3\u4ea7\u54c1\u52a0\u5de5\u9700\u6c42\u3002\u5b83\u91c7\u7528\u6a21\u5757\u5316\u8bbe\u8ba1\uff0c\u6574\u673a\u5305\u62ec\u5de5\u827a\u6a21\u5757\uff08PM:Process \u00a0Module\uff09\u548c\u4f20\u8f93\u6a21\u5757\uff08TM:Transfer Module\uff09\u3002\u4f20\u8f93\u6a21 \u5757\u88c5\u6709\u673a\u68b0\u624b\uff0c\u5b9e\u73b0\u6676\u7247\u5728\u5176\u548c\u5de5\u827a\u6a21\u5757\u4e4b\u95f4\u7684\u4f20\u8f93\u3002\u8bbe\u5907\u5177\u5907\u667a\u80fd<\/u>\u5316\u7684\u8f6f\u4ef6\u64cd\u4f5c\u7cfb\u7edf<\/u>\uff0c\u5b9e\u73b0\u5355\u7247\u6676\u5706\u7684\u81ea\u52a8 \u523b\u8680\u5de5\u827a\u3002\u00a0<\/p>\n

3.2 PECVD \u6c14\u76f8\u6c89\u79ef\u8bbe\u5907\u9009\u578b\u5e94\u7528\u00a0<\/strong><\/p>\n

\u56fd\u5185\u5916\u6709\u8bf8\u591a\u516c\u53f8\u5747\u6709\u5404\u7c7b\u6210\u719f\u4ea7\u54c1\u3002\u6bd4\u5982\u82f1\u56fd\u7684 SPTS \u516c\u53f8\uff0c\u4e3a\u56fd\u5185\u00a0MEMS<\/u>\u3001\u5148\u8fdb\u5c01\u88c5\u3001LED \u7b49\u4ea7\u4e1a\u63d0\u4f9b\u6676 \u5706\u523b\u8680\u3001PVD\u3001CVD \u7b49\u8bbe\u5907\uff0c\u76ee\u524d\u7efc\u5408\u6280\u672f<\/u>\u5b9e\u529b\u5904\u4e8e\u884c\u4e1a \u9886\u5148\u5730\u4f4d\u3002\u5176 PECVD \u8bbe\u5907\u4e3b\u8981\u7528\u4e8e\u4f4e\u6e29\u5355\u9762\u6dc0\u79ef\u4f4e\u5e94\u529b \u6c2e\u5316\u7845\u3001\u6c27\u5316\u7845\u8584\u819c\u3002\u4f20\u9001\u624b\u81c2\u4f1a\u81ea\u52a8\u628a\u57fa\u7247\u8f6c\u9001\u5230\u5de5 \u827a\u8154\u6a21\u5757\u3002\u4f20\u7247\u53ca\u5de5\u827a\u8fc7\u7a0b\u81ea\u52a8\u5316\uff1b\u56fd\u5185\u7684\u6c88\u9633\u62d3\u8346\u79d1 \u6280\u6709\u9650\u516c\u53f8\uff0c\u5177\u6709 100% \u81ea\u4e3b\u77e5\u8bc6\u4ea7\u6743\u7684\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u8bbe \u5907\uff0c\u53ef\u642d\u914d\u9ad8\u4f4e\u9891\u7535\u6e90\u53ef\u5feb\u901f\u6c89\u79ef\u4f4e\u5e94\u529b\u3001\u9ad8\u5747\u5300\u6027\u7684 \u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u3001\u6c2e\u6c27\u5316\u7845\u7b49\u591a\u79cd\u819c\u5c42\uff0c\u652f\u6301\u4f4e\u6e29 TEOS \u5de5\u827a\u5e94\u7528\u4e8e TSV \u7b49\u9886\u57df\u3002\u8bbe\u5907\u914d\u5907 EFEM\u3001load<\/u>lock\u3001\u4f20 \u9001\u6a21\u5757\u3001\u5de5\u827a\u6a21\u5757\u7b49\u3002\u82f1\u56fd SPTS \u5bf9\u8981\u6c42\u8f83\u9ad8\u7684\u819c\u5c42\u9700\u8981 \u4f7f\u7528 H2 \u505a\u540e\u5904\u7406\u53bb\u9664\u819c\u5c42\u4e2d\u7684\u6c34\u5206\uff0c\u63d0\u9ad8\u819c\u5c42\u957f\u671f\u7a33\u5b9a \u6027\uff0c\u5982\u819c\u5c42\u5e94\u529b\u3001\u51fb\u7a7f\u7535\u538b\u3001\u6f0f\u7535\u6d41\u7b49\u6307\u6807\uff1b\u6c88\u9633\u62d3\u8346 \u5728\u6c89\u79ef\u65f6\u91c7\u7528\u5f88\u9ad8\u7684\u80fd\u91cf\uff0c\u9488\u5bf9\u4e0d\u540c\u7684\u72b6\u6001\u628a\u8fc7\u7a0b\u4e2d\u7684 \u6c34\u8fdb\u884c\u7535\u79bb\u6210\u6d3b\u6027\u57fa\u56e2\uff0c\u6d88\u9664\u819c\u5c42\u5438\u6c34\u7684\u5f71\u54cd\uff0c\u4fdd\u8bc1\u819c \u5c42\u7684\u8fde\u7eed\u6027\u548c\u7a33\u5b9a\u6027\uff0c\u4e0d\u9700\u8981 H2\u3002<\/p>\n

\u672c\u6848\u4f8b\u5b9e\u9645\u751f\u4ea7\u5e94\u7528\u4e2d\u7684\u4e3b\u8981\u9700\u6c42\u662f\u7528\u4e8e\u8584\u819c\u7535\u8def \u8868\u9762\u7684\u9ad8\u4f4e\u9891\u4f4e\u5e94\u529b\u6c27\u5316\u7845\u7b49\u8584\u819c\u6dc0\u79ef\u3002\u8bbe\u5907\u9700\u8981\u5177\u6709 \u4f4e\u6e29 TEOS \u5de5\u827a\u6c89\u79ef\u6c27\u5316\u7845\u8584\u819c\uff0c\u5e94\u529b\u6613\u8c03\u63a7\uff0c\u9002\u7528\u4e8e\u8584 \u819c\u7535\u8def\u5236\u9020\u4e2d\u4fdd\u62a4\u819c\u5c42\u7684\u6c89\u79ef\u3002\u8bbe\u5907\u5177\u6709\u9884\u771f\u7a7a\u5ba4\u3001\u57fa \u7247\u4f20\u9001\u6a21\u5757\u4ee5\u53ca\u5de5\u827a\u6a21\u5757\u7b49\uff0c\u4f20\u7247\u53ca\u5de5\u827a\u8fc7\u7a0b\u81ea\u52a8\u5316\u3002\u6545\u91c7\u8d2d\u7684\u8bbe\u5907\u5177\u6709\u9002\u7528\u4e8e\u6c27\u5316\u7845\u819c\u5c42\u6c89\u79ef\uff1b\u5177\u5907\u9ad8\u5747\u5300 \u6027\u548c\u4f4e\u5e94\u529b\u6c89\u79ef\u80fd\u529b\uff1b\u83dc\u5355\u5f0f\u6c89\u79ef\u5de5\u827a\uff1b\u5177\u5907\u8154\u4f53\u6e05\u6d17 \u529f\u80fd\uff1b\u5de5\u827a\u8fc7\u7a0b\u6e29\u5ea6\u53ef\u63a7\uff1b\u8f6f\u4ef6\u53ef\u5bf9\u5de5\u827a\u548c\u6a21\u5757\u72b6\u6001\u5b9e \u65f6\u8ddf\u8e2a\u76d1\u63a7\uff1b\u5177\u5907\u4fdd\u5b58\u5386\u53f2\u5de5\u827a\u548c\u72b6\u6001\u7b49\u4e3b\u8981\u529f\u80fd\u3002\u00a0<\/p>\n

3.3 PVD \u8bbe\u5907\u9009\u578b\u5e94\u7528\u00a0<\/strong><\/p>\n

\u6c89\u79ef\u8bbe\u5907\u9886\u57df\uff0c\u4f20\u7edf\u7684\u82f1\u56fd SPTS \u8bbe\u5907\u5168\u7403\u5e02\u573a\u5360\u6709 \u7387\u8f83\u9ad8\uff0c\u5176\u524d\u8eab\u4e3a\u6df1\u53cd\u5e94\u7b49\u79bb\u5b50\u523b\u8680\u8bbe\u5907\u7684\u4e24\u5bb6\u9886\u5bfc\u4f01\u4e1a Aviza \u548c STS \u5408\u5e76\u800c\u6210\uff0c\u76ee\u524d\u7efc\u5408\u6280\u672f\u5b9e\u529b\u5904\u4e8e\u884c\u4e1a\u9886\u5148 \u5730\u4f4d\uff0c\u5168\u7403 MEMS \u9886\u57df\u5e02\u573a\u5360\u6709\u7387\u8fbe 90%\uff0c\u516c\u53f8\u7684 Sigma \u00a0fxP \u78c1\u63a7\u6e85\u5c04\u8bbe\u5907\u7528\u4e8e 8 \u82f1\u5bf8\u57fa\u7247\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u3002\u914d\u7f6e\u624b \u52a8\u4e0a\u7247\u76d2\uff0c\u4f20\u7247\u53ca\u5de5\u827a\u8fc7\u7a0b\u81ea\u52a8\u5316\u3002\u914d\u7f6e 1 \u4e2a\u9884\u70ed\u6a21\u5757 \u7528\u4e8e\u9664\u6c14\u529f\u80fd\uff0c1 \u4e2a\u8868\u9762\u523b\u8680\u6a21\u5757\u7528\u4e8e\u57fa\u7247\u8868\u9762\u9884\u6e05\u6d17\u3002\u53e6\u5916\u8fd8\u6709 2 \u4e2a\u6c89\u79ef\u4e0d\u540c\u91d1\u5c5e\u6750\u6599\u6c89\u79ef\u6a21\u5757\uff08Ti&Cu\uff09\uff0c\u6c89 \u79ef\u901f\u7387\u5feb\u3001\u5747\u5300\u6027\u597d\u3001\u5e94\u529b\u8c03\u63a7\u4f73\u3002\u8bbe\u5907\u5e94\u7528\u4e8e\u5236\u9020\u4e0d \u540c TSV \u548c MEMS \u5668\u4ef6\u3002\u00a0<\/p>\n

\u8fd1\u5e74\u6765\u5317\u65b9\u534e\u521b\u516c\u53f8\u51ed\u501f\u81ea\u8eab\u5b9e\u529b\uff0c\u8d8a\u6765\u8d8a\u591a\u7684\u5360\u9886 \u56fd\u5185\u5e02\u573a\u3002\u56e0\u6b64\u5728\u5b9e\u9645\u7684\u8bbe\u5907\u9009\u578b\u8c03\u7814\u4e2d\uff0c\u9664\u4e86\u5728 SPTS \u8fdb\u884c\u6837\u7247\u8bd5\u9a8c\u4ee5\u5916\uff0c\u540c\u65f6\u5728\u5317\u65b9\u534e\u521b\u516c\u53f8\u4e5f\u8fdb\u884c\u4e86\u6837\u7247 \u751f\u4ea7\u3002\u56e0\u4e3a\u8be5 PVD \u8bbe\u5907\u5728\u5b9e\u9645\u9ad8\u5bc6\u5ea6\u5c01\u88c5\u57fa\u677f\u7684\u5fae\u7eb3\u52a0 \u5de5\u751f\u4ea7\u4e2d\uff0c\u662f\u7528\u6765\u89e3\u51b3\u9ad8\u6df1\u5bbd\u6bd4\u5fae\u7eb3\u901a\u5b54\u5185\u4fa7\u58c1\u96be\u4ee5\u6c89 \u79ef\u963b\u6321\u5c42 \/ \u79cd\u5b50\u5c42\u95ee\u9898\uff0c\u63d0\u9ad8\u91d1\u5c5e\u5316\u5fae\u7eb3\u901a\u5b54\u4e92\u8054\u53ef\u9760\u6027\u3002\u6545\u5728\u9009\u62e9 PVD \u8bbe\u5907\u65f6\uff0c\u9664\u6ee1\u8db3 20*200\u03bcm\u300120*100\u03bcm \u7b49 \u9ad8\u6df1\u5bbd\u6bd4\u5b54\u7684\u4fa7\u58c1\u91d1\u5c5e\u8584\u819c\u6c89\u79ef\u7684\u5404\u9879\u6280\u672f\u6307\u6807\uff0c\u8fd8\u5173 \u6ce8\u8bbe\u5907\u662f\u5426\u5177\u6709\u57fa\u677f\u7684\u9664\u6c14\u3001\u9884\u6e05\u6d17\u548c\u901a\u5b54\u4fa7\u58c1\u78c1\u63a7\u6e85 \u5c04\u9540\u819c\u5de5\u827a\uff0c\u667a\u80fd\u5316\u64cd\u4f5c\u7cfb\u7edf\u53ef\u5b9e\u73b0\u81ea\u52a8\u751f\u4ea7\u529f\u80fd\u3002\u534e \u521b\u516c\u53f8\u751f\u4ea7\u7684 Polaris T620 \u8bbe\u5907\u5177\u5907\u9664\u6c14\uff08degas\uff09\u3001 \u9884\u6e05\u6d17\uff08preclean\uff09\u3001\u9ad8\u8154 Ti \u6e85\u5c04\u6c89\u79ef\u3001\u9ad8\u8154 Cu \u6e85\u5c04 \u6c89\u79ef 4 \u4e2a\u5de5\u827a\u6a21\u5757\uff0c\u4ee5\u53ca\u81ea\u52a8\u4f20\u8f93\u6a21\u5757\u548c Facility \u6a21\u5757\uff0c \u5b8c\u6210 8 \u82f1\u5bf8\u53ca\u4ee5\u4e0b\u57fa\u677f\u7684\u9664\u6c14\u3001\u9884\u6e05\u6d17\u548c\u901a\u5b54\u4fa7\u58c1\u78c1\u63a7 \u6e85\u5c04\u9540\u819c\u5de5\u827a\uff0c\u5177\u5907\u667a\u80fd\u5316\u64cd\u4f5c\u7cfb\u7edf\uff0c\u53ef\u5b9e\u73b0\u81ea\u52a8\u751f\u4ea7\uff0c \u6545\u800c\u6210\u4e3a\u6700\u7ec8\u7684\u9009\u62e9\u3002<\/p>\n

3.4 \u7535\u9540\u94dc\u586b\u5145\u8bbe\u5907\u9009\u578b\u5e94\u7528<\/strong>\u00a0<\/strong><\/p>\n

\u4e3a\u8fdb\u4e00\u6b65\u786e\u8ba4 TSV \u586b\u5b54\u9540\u94dc\u8bbe\u5907\u7684\u6027\u80fd\u548c\u9488\u5bf9\u7279\u5f02\u7684 TSV\u5b54\u578b\u7ed3\u6784\u9700\u6c42\uff0c\u5efa\u8bae\u5728\u9009\u8d2d\u65f6\uff0c\u9664\u8003\u8651\u6b63\u5e38\u91c7\u8d2d\u539f\u5219\u5916\uff0c \u9700\u5728\u5382\u5bb6\u76f8\u5e94\u8bbe\u5907\u4e0a\u8fdb\u884c\u751f\u4ea7\u6240\u9700\u7684 TSV \u5b54\u578b\u7ed3\u6784\u7684\u6837\u54c1 \u6253\u6837\uff0c\u6839\u636e\u6253\u6837\u8981\u6c42\u9700\u4fdd\u8bc1\u5b54\u5185\u586b\u5145\u81f4\u5bc6\u3001\u65e0\u5b54\u9699\uff0c\u9540\u5c42 \u539a\u5ea6\u5747\u5300\u6027\u597d\u7b49\u57fa\u672c\u9700\u6c42\uff0c\u518d\u786e\u5b9a\u6700\u7ec8\u91c7\u8d2d\u7684\u8bbe\u5907\u3002\u6839\u636e \u672c\u6848\u4f8b\u5b9e\u9645\u751f\u4ea7\u4e2d\u7684\u5177\u4f53\u9700\u6c42\uff0c\u8981\u6c42\u8bbe\u5907\u5177\u6709\u9ad8\u6df1\u5bbd\u6bd4\u586b \u5b54\u7535\u9540\u529f\u80fd\uff1b\u57fa\u7247\u6e05\u6d17\u7529\u5e72\u529f\u80fd\uff1b\u9540\u69fd\u5177\u5907\u6e29\u5ea6\u63a7\u5236\u3001\u6db2 \u4f4d\u63a7\u5236\u3001PH \u6d4b\u8bd5\u3001\u6e29\u5ea6\u8fc7\u4fdd\u62a4\u3001\u52a0\u70ed\u5668\u9632\u5e72\u70e7\u3001\u6c2e\u6c14\u4fdd\u62a4 \u7b49\u529f\u80fd\uff1b\u9540\u69fd\u91c7\u7528\u65cb\u8f6c\u9634\u6781\uff0c\u901f\u5ea6\u53ef\u8c03\uff1b\u5de5\u827a\u63a7\u5236\u7cfb\u7edf<\/u>\u5177 \u5907\u5de5\u827a\u6570\u636e\u5b58\u50a8\u5907\u4efd\u7b49\u4e3b\u8981\u529f\u80fd\u3002<\/p>\n

3.5 \u51cf\u8584\u629b\u5149\u8bbe\u5907\u9009\u578b\u5e94\u7528<\/strong>\u00a0<\/strong><\/p>\n

\u8fd1\u5e74\u6765\uff0c\u56fd\u4ea7\u5316\u8d85\u8584\u6676\u5706\u51cf\u8584\u629b\u5149\u8bbe\u5907\u5df2\u5b9e\u73b0\u4e86\u91cf \u4ea7\u5e94\u7528\uff0c\u5b9e\u73b0\u4e86\u56fd\u9645\u540c\u7c7b\u8bbe\u5907\u7684\u9ad8\u6027\u80fd\u6c34\u5e73\u3002\u56e0\u672c\u6848\u4f8b\u5b9e\u9645\u751f\u4ea7\u4e2d\uff0c\u4e3b\u8981\u7528\u4e8e HTCC \u6c2e\u5316\u94dd\u57fa\u677f\u7684\u8d34\u7247\u51cf\u8584\u629b\u5149 \u5de5\u827a\u52a0\u5de5\uff0c\u52a0\u5de5\u5e45\u9762 \u03c6305mm\u3002\u9664\u4ef7\u683c\u56e0\u7d20\u4ee5\u5916\uff0c\u8003\u8651\u5230 \u5382\u623f\u5b89\u88c5\u3001\u591a\u5de5\u5e8f\u5e76\u884c\u52a0\u5de5\u3001\u5b9e\u9645\u751f\u4ea7\u9700\u6c42\u7b49\uff0c\u5e0c\u671b\u8bbe \u5907\u53ef\u4ee5\u7531\u51cf\u8584\u3001\u629b\u5149\u3001\u8d34\u7247\u591a\u53f0\u76f8\u5173\u8bbe\u5907\u6309\u5b9e\u73b0\u987a\u5e8f\u76f8 \u8fd1\u653e\u7f6e\uff0c\u4ee5\u5b9e\u73b0\u57fa\u677f\u8d34\u7247\u3001\u51cf\u8584\u3001\u629b\u5149\u548c\u539a\u5ea6\u6d4b\u8bd5\u7b49\u529f \u80fd\u3002\u5317\u4eac\u7279\u601d\u8fea\u534a\u5bfc\u4f53\u8bbe\u5907\u6709\u9650\u516c\u53f8\u662f\u751f\u4ea7\u51cf\u8584\u629b\u5149 CMP \u4e13\u4e1a\u8bbe\u5907\u5382\u5bb6\uff0c\u53ef\u4ee5\u63d0\u4f9b\u7684\u57fa\u677f\u51cf\u8584\u629b\u5149\u7cfb\u7edf\uff0c\u7531 1 \u53f0 \u51cf\u8584\u8bbe\u5907\u30011 \u53f0\u629b\u5149\u8bbe\u5907\u30011 \u53f0\u8d34\u7247\u8bbe\u5907\u7ec4\u6210\uff0c\u7528\u4e8e HTCC \u6c2e\u5316\u94dd\u57fa\u677f\u7684\u51cf\u8584\u629b\u5149\u8d34\u7247\u5de5\u827a\u52a0\u5de5\uff0c\u5176\u4e2d\u51cf\u8584\u8bbe\u5907\u901a \u8fc7\u5feb\u901f\u51cf\u8584\u53ca\u5728\u7ebf\u539a\u5ea6\u6d4b\u91cf\u7cfb\u7edf\u5c06\u57fa\u677f\u52a0\u5de5\u81f3\u76ee\u6807\u539a\u5ea6\uff1b\u629b\u5149\u8bbe\u5907\u901a\u8fc7\u629b\u5149\u57ab\u548c\u629b\u5149\u6db2\u7684\u4f5c\u7528\u5bf9\u51cf\u8584\u540e\u7684\u8868\u9762\u8fdb \u884c\u629b\u5149\uff0c\u4ee5\u964d\u4f4e\u57fa\u677f\u8868\u9762\u7c97\u7cd9\u5ea6\uff1b\u8d34\u7247\u8bbe\u5907\u9002\u7528\u4e8e\u5c06\u57fa \u677f\u7c98\u63a5\u5230\u9676\u74f7\u8f7d\u76d8\u4e0a\uff0c\u4ee5\u4f5c\u4e3a\u51cf\u8584\u629b\u5149\u7684\u8f7d\u4f53\u3002\u7ecf\u5b9e\u9645 \u6d4b\u8bd5\uff0c\u7b26\u5408\u8be5\u6848\u4f8b\u5b9e\u9645\u751f\u4ea7\u9700\u6c42\u3002\u00a0<\/p>\n

3.6 TSV \u8bbe\u5907\u5b89\u88c5\u5382\u52a1\u9700\u6c42\u00a0<\/strong><\/p>\n

TSV \u8bbe\u5907\u5bf9\u6c34\u3001\u98ce\u3001\u7535\u3001\u6c14\u7b49\u5382\u52a1\u914d\u5957\u6761\u4ef6\u8981\u6c42\u8f83\u9ad8\uff0c \u5e76\u4e14\u4e0d\u540c\u5382\u5bb6\u63d0\u4f9b\u7684\u540c\u7c7b\u8bbe\u5907\u7531\u4e8e\u5176\u91c7\u7528\u7684\u5de5\u827a\u65b9\u6cd5\u4e0d \u540c\u6240\u9700\u8981\u7684\u5382\u52a1\u6761\u4ef6\u5dee\u522b\u5f88\u5927\uff0c\u5982\u6240\u8d2d\u4e70\u7684\u7b49\u79bb\u5b50\u523b\u8680 \u8bbe\u5907\u3001\u6c14\u76f8\u6c89\u79ef\u8bbe\u5907\u7b49\u7528\u5230\u591a\u79cd\u7279\u79cd\u6c14\u4f53\u3001\u6db2\u4f53\u6709\u673a\u7269 \u4f5c\u4e3a\u5de5\u827a\u4ecb\u8d28\uff0c\u6709\u7684\u4f9b\u5e94\u5546\u63d0\u4f9b\u7684\u8bbe\u5907\u8fd8\u9700\u8981\u7528\u5230\u6c22\u6c14\u3001 \u7845\u70f7\u7b49\u6613\u71c3\u6613\u7206\u6c14\u4f53\uff0c\u53cd\u5e94\u7ed3\u675f\u540e\u7684\u5e9f\u6c14\u9700\u8981\u7ecf\u8fc7\u4e13\u95e8 \u7684\u71c3\u70e7\u88c5\u7f6e\u8fdb\u884c\u5904\u7406\u540e\u624d\u53ef\u4ee5\u8fdb\u5165\u5382\u623f\u4e3b\u6392\u98ce\u7cfb\u7edf\uff0c\u540c \u65f6\u8bbe\u5907\u5bf9\u51b7\u5374\u6c34\u7684\u538b\u529b\u3001\u6d41\u91cf\u7b49\u5747\u6709\u8f83\u9ad8\u7684\u8981\u6c42\u3002\u00a0<\/p>\n

\u7531\u4e8e\u6d89\u53ca\u5230\u7279\u6c14\u4f7f\u7528\u4e14\u90e8\u5206\u5c5e\u4e8e\u6613\u71c3\u6613\u7206\u5371\u9669\u6c14\u4f53\uff0c \u6240\u4ee5\u5fc5\u987b\u901a\u8fc7\u5bf9\u73b0\u6709\u5382\u623f\u6761\u4ef6\u3001\u5404\u4e2a\u8bbe\u5907\u5382\u52a1\u9700\u6c42\u7684\u68b3 \u7406\u5bf9\u6bd4\uff0c\u5bf9\u6574\u4e2a TSV \u751f\u4ea7\u8fdb\u884c\u7cfb\u7edf\u8003\u8651\uff0c\u5728\u5145\u5206\u8003\u8651\u5230 \u5b89\u5168\u73af\u4fdd\u3001\u8fd0\u8425\u7ef4\u62a4\u3001\u5b9e\u65bd\u6210\u672c\u7684\u57fa\u7840\u4e0a\uff0c\u4ece\u9644\u5c5e\u8bbe\u5907 \u91c7\u8d2d\u4ee5\u53ca\u653e\u7f6e\u3001\u5de5\u827a\u5e03\u5c40\u3001\u754c\u9762\u5212\u5206\u3001\u8bbe\u5907\u5b89\u88c5\u7b49\u65b9\u9762 \u5165\u624b\uff0c\u5168\u9762\u8fdb\u884c\u89c4\u5212\uff0c\u5728\u786e\u4fdd\u5b89\u5168\u73af\u4fdd\u7684\u524d\u63d0\u4e0b\uff0c\u4ee5\u6700 \u5408\u7406\u7684\u4ef7\u683c\u4e3a\u5404\u4e2a\u8bbe\u5907\u6b63\u5e38\u4f7f\u7528\u7684\u63d0\u4f9b\u5382\u52a1\u4fdd\u969c\u3002\u00a0<\/p>\n

4\u3001\u7ed3\u8bed<\/strong><\/p>\n

\u968f\u7740 TSV \u6280\u672f\u7684\u53d1\u5c55\uff0c\u5927\u91cf\u7684\u4f20\u7edf\u5fae\u7535\u5b50\u8bbe\u5907\u5373\u5c06 \u6dd8\u6c70\u3002\u901a\u8fc7\u8fd1\u51e0\u5e74\u7684 TSV \u8bbe\u5907\u7684\u9010\u6b65\u5927\u91cf\u4f7f\u7528\uff0c\u56fd\u5185\u5728 \u4f7f\u7528\u6df1\u523b\u8680\u3001PVD\/CVD\u3001\u94dc\uff08Cu\uff09\u586b\u5b54\u3001\u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09 \u7b49\u7528\u4e8e TSV \u5236\u7a0b\u7684\u5173\u952e\u8bbe\u5907\u9886\u57df\u79ef\u7d2f\u4e86\u4e00\u5b9a\u7ecf\u9a8c\u3002\u957f\u671f \u4ee5\u6765\uff0c\u8be5\u7c7b\u8bbe\u5907\u4f9d\u8d56\u56fd\u5916\u4f01\u4e1a\uff0c\u5b58\u5728\u6210\u672c\u9ad8\u3001\u4ea4\u8d27\u5468\u671f\u957f\u3001 \u5e94\u5bf9\u5e02\u573a\u53d8\u5316\u53cd\u5e94\u8f83\u6162\u7684\u60c5\u51b5\u3002\u8fd1\u5e74\uff0c\u56fd\u5185\u8bbe\u5907\u5382\u5546\u8bbe \u5907\u6709\u4e86\u5f88\u5927\u7a81\u7834\uff0c\u5c3d\u7ba1\u4e0e\u56fd\u5916\u6700\u9ad8\u6c34\u5e73\u76f8\u6bd4\u8fd8\u6709\u4e00\u5b9a\u5dee \u8ddd\uff0c\u4f46\u5728\u786e\u4fdd\u6ee1\u8db3\u751f\u4ea7\u5de5\u827a\u8981\u6c42\u7684\u524d\u63d0\u4e0b\uff0c\u56fd\u4ea7\u8bbe\u5907\u5404 \u9879\u7ecf\u6d4e\u6280\u672f\u6307\u6807\u5982\u80fd\u8fbe\u5230\u56fd\u5916\u8bbe\u5907\u540c\u7b49\u6216\u66f4\u9ad8\u7684\u6c34\u5e73\uff0c \u5c06\u4f1a\u88ab\u4f18\u5148\u91c7\u7528\uff0c\u5e02\u573a\u524d\u666f\u5e7f\u9614\u3002<\/p>\n","protected":false},"excerpt":{"rendered":"

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