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\"ab92d064-3761-11ed-ba43-dac502259ad0\"<\/p>\n

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65 nm\u8282\u70b9\u4e4b\u540e\uff0c\u5df2\u7ecf\u5c06\u9563\u7845\u5316\u7269\u4f5c\u4e3a\u7845\u5316\u7269\u6750\u6599\u7528\u4e8e\u9ad8\u901f\u903b\u8f91IC\u4e2d\u3002NiSi\u53ef\u4ee5\u5728\u7ea6450Y\u7684\u8f83\u4f4e\u6e29\u5ea6\u4e0b\u5f62\u6210\uff0c\u4ece\u800c\u51cf\u5c11\u4e86\u70ed\u79ef\u5b58\u3002<\/p>\n

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\"abbc786a-3761-11ed-ba43-dac502259ad0\"<\/p>\n

\u518d\u6d41\u52a8\u8fc7\u7a0b<\/p>\n

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\"abd7abee-3761-11ed-ba43-dac502259ad0\"<\/p>\n

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\u9ad8\u6e29\u5316\u5b66\u6c14\u76f8\u6c89\u79ef<\/p>\n

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\u5916\u5ef6\u7845\u6c89\u79ef<\/p>\n

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\u7845\u70f7(SiHQ)\u3001\u4e8c\u6c2f\u7845\u70f7(DC<\/u>S, SiH2Cl2)\u548c\u4e09\u6c2f\u7845\u70f7(TCS, SiHCl3)\u662f\u7845\u5916\u5ef6\u751f\u957f\u4e2d\u6700\u5e38\u4f7f\u7528\u7684\u4e09\u79cd\u6c14\u4f53\u3002\u7845\u5916\u5ef6\u751f\u957f\u7684\u5316\u5b66\u53cd\u5e94\u5982\u4e0b\uff1a<\/p>\n

\"ac018220-3761-11ed-ba43-dac502259ad0\"<\/p>\n

\"ac160024-3761-11ed-ba43-dac502259ad0\"<\/p>\n

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